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1、Flexible High-Output Nanogenerator Based on Lateral ZnO Nanowire Array 基于彈性Nanogenerator血庫的橫向氧化鋅納米線陣列Guang Zhu, Rusen Yang, Sihong Wang, and Zhong Lin Wang* 廣朱、Rusen得來,楊泗洪縣得來王建民,王建民、眾林*School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245材料科學(xué)與工程學(xué)院,
2、佐治亞理工學(xué)院,亞特蘭大,喬治亞州30332 - 0245ABSTRACT We report here a simple and effective approach, named scalable sweeping-printing-method, for fabricating flexible high-output nanogenerator (HONG) that can effectively harvesting mechanical energy for driving a small commercial electronic component. The techniqu
3、e consists of two main steps. In the first step, the vertically aligned ZnO nanowires (NWs) are transferred to a receiving substrate to form horizontally aligned arrays. Then, parallel stripe type of electrodes are deposited to connect all of the NWs together. Using a single layer of HONG structure,
4、 an open-circuit voltage of up to 2.03 V and a peak output power density of 11 mW/cm3 have been achieved. The generated electric energy was effectively stored by utilizing capacitors, and it was successfully used to light up a commercial light-emitting diode (LED), which is a landmark progress towar
5、d building self-powered devices by harvesting energy from the environment. This research opens up the path for practical applications of nanowire-based piezoelectric nanogeneragtors for self-powered nanosystems.摘要本文報告一個簡單而有效的方法,可擴展的sweeping-printing-method命名,因為制作靈活 (香港)nanogenerator血庫,能有效地收獲機械能量來驅(qū)動小
6、型商業(yè)電子器件。該技術(shù)包括兩個 主要的步驟。在第一步的氧化鋅奈米線垂直對齊(NWs)轉(zhuǎn)移到一個接收基體形成橫向?qū)R的 數(shù)組。然后,平行條紋沉積類型的電極連接所有的新創(chuàng)建在一起。采用單層結(jié)構(gòu)的香港,一個 開路電壓2.03 V,輸出功率密度峰值11 mW / cm3已經(jīng)達(dá)成。所產(chǎn)生的電力能源有效利用電 容器存儲,并成功用于照亮一個商業(yè)發(fā)光二極管,這是一個具有里程碑意義的進步對建立自我 動力的設(shè)備被收獲能量從環(huán)境。該研究為實際應(yīng)用nanowire-based路徑的壓電 nanogeneragtors nanosystems 為自我動力。KEYWORDS Nanogenerator, ZnO, nan
7、owire, light-emitting diode, self-powering 關(guān)鍵詞Nanogenerator、氧化鋅和納米線、發(fā)光二極管、self-poweringEnergy harvesting is critical to achieve independent and sustainable operations of nanodevices, aiming at building self-powered nanosystems. 1-3 Taking the 能量收獲是關(guān)鍵和可持續(xù)經(jīng)營實現(xiàn)獨立設(shè)備,以建設(shè)nanosystems自我動力。1 - 3以 forms of ir
8、regular air flow/vibration, ultrasonic waves, body movement, and hydraulic pressure, mechanical energy is ubiquitously available in our living environment. It covers a wide range of magnitude and frequency from cell contrac-tion to ocean waves. The mechanical-electric energy conver-sion has been dem
9、onstrated using piezoelectric cantilever working at its resonating mode. 4-7 However, the applicabil-ity and adaptability of the traditional cantilever based energy harvester is greatly impeded by the large unit size, large triggering force and specific high resonance frequency. Recently, a series o
10、f rationally designed nanogenerators (NGs) with piezoelectricnanowires(NWs)haveshowngreatpotentialtoscavengetinyandirregularmechanicalenergy. 8-15 However, insufficient electric output hinders their practical applications. We report here a simple and effective ap-proach, named scalable sweeping-prin
11、ting-method, for fab-ricating flexible high-output nanogenerator (HONG). An open-circuit voltage of up to 2.03 V and a peak output power density of11 mW/cm3 havebeen achieved. The generated electric energy was effectively stored by utilizing capacitors, and it was successfully used to light up a com
12、mercial light-emitting diode (LED), which is a landmark progress toward building self-powered devices by harvesting energy from the environment. Furthermore, by optimizing the density of the NWs on the substrate and with the use of multilayer integra-tion, a peak output power density of 0.44 mW/cm2
13、and volume density of 1.1 W/cm3 are predicted.形式的不規(guī)則的氣流/振動、超音波、肢體動作、液壓、機械能量可在我們的生存環(huán)境而傳 播。它涵蓋了廣泛的程度和頻率,從細(xì)胞contrac-tion海浪。電力能源的conver-sion已經(jīng)被證 實使用壓電懸臂梁的工作在其產(chǎn)生共鳴的模式。4 - 7然而,applicabil-ity和適應(yīng)性,傳統(tǒng)的基 礎(chǔ)能源礦車懸臂大大阻礙大單位的大小、大型觸發(fā)力和特定的高諧振頻率。最近,一系列的 合理設(shè)計 nanogenerators(上天)(NWs)壓電奈米線表現(xiàn)出極大的 potentialtoscavengetinyan
14、dirregularmechanicalenergy。然而,這個不足,不妨礙電力輸出的實際 應(yīng)用。這里我們報告一個簡單而有效的ap-proach,名叫可擴展的sweeping-printing-method,靈 活nanogenerator fab-ricating血庫(香港)。一個開路電壓2.03 V,輸出功率密度峰值11 mW / cm3已經(jīng)達(dá)成。所產(chǎn)生的電力能源有效利用電容器存儲,并成功用于照亮一個商業(yè)發(fā)光二極 管,這是一個具有里程碑意義的進步對建立自我動力的設(shè)備被收獲能量從環(huán)境。此外,通過優(yōu) 化的密度在基底,另外采用多層integra-tion,輸出功率密度峰值0.44 mW /平方厘
15、米和體積密 度為1.1 W / cm3進行預(yù)測。* To whom correspondence should be addressed. E-mail: HYPERLINK mailto: .*通信所應(yīng)處理。電子郵件:。t Authors with equal contribution作者以同樣的貢獻得來Received for review: 6/3/2010 收到評:6/3/2010Published on Web: 07/21/2010 在網(wǎng)上公布:07/21/2010The mechani
16、sm of converting mechanical energy by a single ZnO NW that is laterally bonded to a substrate has been discussed in details in our previous report. 13 Owing to much smaller diameter of the NW compared to the substrate thickness, outward bending of the substrate induces a uniaxial tensile strain in t
17、he NW. Because of the piezoelectric property of the ZnO NW, the stress results in a piezoelectric field along the length, which causes a transient charge flow in the external circuit. The Schottky contact at the bonded ends can regulate the charge flow. As a result, the bending and releasing of the
18、single-wire-NG gives rise to an alternat-ing flow of the charges in the external circuit. In this work, the power output has been scaled up with the integration of hundreds of thousands of horizontally aligned NWs, which was made by a scalable sweeping-printing-method that is simple, cost-effective,
19、 and highly efficient.機械能量轉(zhuǎn)換的機制,由一個單一的氧化鋅西北是粘結(jié)基體橫向已經(jīng)詳細(xì)討論了在我們先前 的報告。13因為較小的直徑比基體厚度西北,拓展彎曲基底的單向拉伸應(yīng)變誘發(fā)在西北方向 移動。由于壓電特性的氧化鋅NW應(yīng)力導(dǎo)致壓電場沿長度,使一個暫時的費用流的外部電路。 肖特基接觸,保稅結(jié)束,能調(diào)節(jié)電荷的流動。作為一個結(jié)果,彎曲和釋放的single-wire-NG產(chǎn)生 一個alternat-ing流量的費用在外部電路。在這部作品中,輸出功率已經(jīng)擴大了于一體的成千 上萬的橫向?qū)RNWs,由一個可擴展的sweeping-printing-method,簡單、高效,效率高。Th
20、e method consists of two main steps. In the first step, the vertically aligned NWs are transferred to a receiving substrate to form horizontally aligned arrays. The major components of the transfer setup are two stages (Figure 1a). Stage 1 has a flat surface that faces downward and holds the vertica
21、lly aligned NWs; stage 2 has a curved surface and holds the receiving substrate. Polydimethylsiloxane (PDMS) film on the surface of stage 2 is used as a cushion layer to support the receiving substrate and enhances the alignment of the transferred NWs. The radius of the curved surface of stage 2 equ
22、als the length of the rod supporting the stage, which is free to move in circular motion (Supporting Infor-mation Figure S1). In the second step, electrodes are depos-ited to connect all of the NWs together.該方法包括兩個主要的步驟。在第一步,垂直地對齊NWs是轉(zhuǎn)移到一個接收基體形成橫向?qū)?齊的數(shù)組。主要部件的安裝兩個階段轉(zhuǎn)移(圖1)。階段1有一個平面朝向下且具有垂直地對 齊NWs;舞臺2有
23、一個曲面并持有接收板上。以聚二甲基硅氧烷(PDMS)的油膜將摩擦表面上 的第二階段作為墊層支持接收基體和提高對準(zhǔn)的轉(zhuǎn)讓NWs。曲面的半徑相等的第二階段桿 的長度支持階段的產(chǎn)物,是自由移動圓心的運動(支持徹底圖S1)。第二步,depos-ited電極連接 所有的新創(chuàng)建在一起。Vertically aligned ZnO NWs on Si substrates were syn-thesized using physical vapor deposition method. 16,17 The dense and uniform NWs have the length of50 pm, diam
24、eter of 200 nm,and growth direction along the c-axis垂直地對齊在硅襯底氧化鋅便利是syn-thesized物理氣相沉積方法使用。16、17密集的、有 統(tǒng)一的新創(chuàng)建的長度pm50,直徑200海里,沿著c-axis增長方向 2010 American Chemical Society 3151 DOI: 10.1021/nl101973h I Nano Lett. 2010, 10, 3151 31552010美國化學(xué)學(xué)會3151 土井:/ nl101973h |納米學(xué)報。年,10、3155 -FIGURE 1.Fabrication proce
25、ss and structure characterization of the HONG. (a) Experimental setup for transferring vertically grown ZnO NWs to a flexible substrate to make horizontally aligned ZnO NW arrays with crystallographic alignment. (b) SEM image of as-grown vertically aligned ZnO NWs by physical vapor method on Si subs
26、trate. (c) SEM image of the as-transferred horizontal ZnO NWs on a flexible substrate.圖1。工藝過程及結(jié)構(gòu)表征香港。(一)實驗裝置對轉(zhuǎn)移垂直生長氧化鋅NWs 一個靈活的基體 橫向?qū)R使西北陣列氧化鋅晶體排列。掃描電鏡照片(b)的垂直對齊as-grown氧化鋅NWs 物理氣方法在硅基片上。掃描電鏡照片(c)的水平上as-transferred氧化鋅NWs柔性襯底材料。 (d) Process of fabricating Au electrodes on horizontal ZnO NW arrays, wh
27、ich includes photolithography, metallization, and lift-off. (e) SEM image of ZnO NW arrays bonded by Au electrodes. Inset: demonstration of an as-fabricated HONG. The arrowhead indicates the effective working area of the HONG(d)制作金電極過程中水平氧化鋅西北數(shù)組,它包括光刻、金屬化、發(fā)射。(e)的掃描電鏡照片 所結(jié)合氧化鋅西北金電極陣列。插圖:一個as-fabricat
28、ed香港的示范。箭頭表示香港的有效工 作區(qū)域。(Figure 1b, Supporting Information Figure S2). The same growth direction of NWs guarantees the alignment of the piezoelectric potentials in all of the NWs and a successful scaling up of the output, which will be elaborated later. A small piece of Si substrate with grown ZnO NW
29、s was mounted onto stage 1 (Figure 1a) and a piece of Kapton film with the thickness of 125 p m was attached to stage 2 (Figure 1a). The distance between the receiving substrate and NWs was precisely controlled to form a loose contact between the two. The receiving substrate then counterclockwise sw
30、ept across the vertical NWs arrays, which were detached from Si substrate and aligned on the receiving substrate along the direction of sweeping due to the applied shear force (Figure 1a). The as-transferred NWs are presented in Figure 2c with an estimated average density of 1.1 x 106 cm-2. The leng
31、th variation is probably due to the fact that not all of the NWs were broken off at the roots.(圖1 b,支持信息圖S2)。另外一樣生長方向的校準(zhǔn),保證了壓電電位在所有的便利,一個成功 的比例增加的輸出,將闡述之后。一小塊硅襯底與成長氧化鋅便利上安裝了第一階段(圖1 A) 和一塊Kapton膜厚度的125pm是附屬于第二階段(圖1)。之間的距離是接收基底,精確控制 的便利,形成一個松散的聯(lián)系二者的區(qū)別。然后逆時針方向接收基質(zhì)席卷垂直新創(chuàng)建數(shù)組,它 是與硅基片上接受基質(zhì)和結(jié)盟的方向掃沿由于應(yīng)用剪切力(圖
32、1)。介紹了 as-transferred NWs 圖2c估計平均密度為1.1X106 cm-2。長度變化可能是由于這樣的事實:并不是所有的新創(chuàng) 建被折下來于萌芽之中。Next, the evenly spaced electrode pattern over the aligned NWs was first defined using photolithography and then其次,間隔均勻的電極排列模式by首次定義使用光刻和即可followed by sputtering 300 nm thick Au film (Figure 1d). After lifting off th
33、e photoresist, 600 rows of stripe-shaped Au electrodes with 10 pm spacing were fabricated on top of the horizontal NW arrays (Figure 1e). Au electrodes form Schottky contacts with the ZnO NWs, which are mandatory for a working NG. 8,18 Approximately 3.0 x 105 NWs in an effective working area of 1 cm
34、2, as pointed by an arrowhead in Figure 1d (inset), are in contact with electrodes at both ends. Finally, a PDMS packaging over the entire structure can further enhance mechanical robustness and protect the device from invasive chemicals.其次是濺射300海里厚金膜(圖1 d)。起飛后光刻膠,600排stripe-shaped金電極間距10pm碳 納米管基西北的
35、頂部水平陣列(圖1 e)。金電極肖特基接觸形式氧化鋅便利,這是一個有工作 的NG強制性。8約3.0X105另外18有效工作區(qū)1平方厘米,指出一個箭頭在圖1 d(插圖), 在接觸電極的兩端。最后,在整個結(jié)構(gòu)(PDMS)包裝能進一步增強魯棒性和保護裝置機械從侵 入性的化學(xué)物質(zhì)。The working principle of the HONG is illustrated by the schematic diagrams in Figure 2a,b. NWs connected in parallel collectively contribute to the current output;
36、 NWs in different rows connected in serial constructively improve the voltage output. The same growth direction of all NWs and the sweeping printing method ensure that the crystal-lographic orientations of the horizontal NWs are aligned along the sweeping direction. Consequently, the polarity of 香港的
37、工作原理,說明了在圖2的原理圖a、b。by并聯(lián)輸出電流集體貢獻;另外不同的行連接 在串行積極增進電壓輸出。相同的增長方向和全面的便利的印刷方法確保crystal-lographic 水平方向的排列沿掃另外的方向。因此,極性的 2010 American Chemical Society 3152 DOI: 10.1021/nl101973h I Nano Lett. 2010, 10, 3151- 31552010美國化學(xué)學(xué)會3152 土井:/ nl101973h |學(xué)報。納米、10、3155FIGURE 2. Working principle and output measurement
38、of the HONG. (a) Schematic diagramof HONGs structure without mechanical deformation, in which gold is used to form Schottky contacts with the ZnO NW arrays. (b) Demonstration of the output scaling-up when mechanicaldeformation is induced, where the “( signs indicate the polarity of the local piezoel
39、ectric p created in the NWs. (c) Open circuit voltage measurement of the HONG, (d) Short circuitcurrent measurement of the HONG. The measurement is performed at a strain of 0.1% and strainrate of 5% s-1 with the deformation frequency of 0.33 Hz. The insets are the enlarged view ofthe boxed area for
40、one cycle of deformation.圖2。工作原理和輸出測量的香港。(一)原理圖,以及香港的結(jié)構(gòu)沒有機械變形,其中黃金用做 肖特基接觸形式氧化鋅西北的數(shù)組。(b)示范的輸出機械變形誘導(dǎo)放大,那里的”(“跡象顯示 的極性壓電潛在創(chuàng)造了當(dāng)?shù)乇憷?c)開斷電壓測量的香港。(d)短路電流測量的香港。根據(jù) 測量應(yīng)變和應(yīng)變率為5%,0.1% s-1頻率與變形0.33赫茲。擴大的小圖是觀點的一個周期框區(qū) 域的變形。the induced piezopotential is also aligned, leading to a macroscopic potential contributed
41、 constructively by all of the NWs (Figure 2b).誘導(dǎo)piezopotential也是對齊,導(dǎo)致了宏觀潛在的建設(shè)性的便利(圖2 b)。To investigate the performance of the HONG, a linear motor was used to periodically deform the HONG in a cyclic stretching-releasing agitation (0.33 Hz). The open-circuit voltage (V oc) and the short-circuit curr
42、ent (Isc) were measured with caution to rule out possible artifacts. 19 At a strain of 0.1% and strain rate of 5% s-1, peak voltage and current reached up to 2.03 V and 107 nA, respectively. Assuming that all of the integrated NWs actively contribute to the output, the current generated by a single
43、NW is averaged to be 200 pA; and the voltage from each row is 3.3 mV in average. Considering the size of the working area of the nanogenerator (1 cm2) (Figure 1e, inset), a peak output power density of 0.22 pW/cm2 has been achieved, which is over 20-fold increase compared to our latest report based
44、on a more complex design. 14 For nanowires with the diameter of 200 nm, the power volume density is 11 mW/cm3, which is 12-22 times of that from PZT based cantilever energy harvester. 6,7 The durability test and further characterization were performed, which prove the stability and robustness of the
45、 HONGs (Supporting Information Figure S3). Voltage linear superposition test verified the proposed working principle of the HONGs (Supporting In-formation Figure S4).探討香港的性能,從而建立了一個線性馬達(dá)是用來定期變形的循環(huán)stretching-releasing風(fēng)潮在 香港(0.33赫茲)。寄生偏置電壓(Voc)和短路電流(Isc)測定了注意排除可能失真。19在緊張的 0.1%和應(yīng)變率為5% s-1、峰值電壓和電流達(dá)到2.03伏
46、特和107鈉,分別。假設(shè)所有的綜合 NWs積極促成輸出,當(dāng)前的產(chǎn)生是由一個單一的西北平均是200名乘客,電壓由每一行是平 均3.3 mV??紤]工作區(qū)域的大小的nanogenerator(1平方厘米)(圖1 e、插圖),峰值功率密度的 0.22MW /平方厘米已經(jīng)實現(xiàn),超過增加了 20我們的最新報告相比,基于一個更復(fù)雜的設(shè)計。 14與直徑的奈米線200海里,電源體積密度是11 mW / cm3這是12-22倍之壓電懸臂梁的基 礎(chǔ)能源的礦車。6、7個耐久性試驗和進一步進行了表征,證明了穩(wěn)定性和魯棒性的HONGs(提 供的信息圖S3)。電壓線性疊加的驗證工作原理的基礎(chǔ)上提出HONGs(支持圖(S4)
47、接受方)。Further scaling up the power output is expected to be technically feasible. If NWs can be uniformly and densely packed as a monolayer over the entire working area, and all can actively contribute to the output, the maximum power area density is expected to reach 22 pW/cm2. The power volume density is anticipated to be improved up to1.1 W/cm3. With 20 layers ofsuch NW arrays stacked together, the power area density would be boosted up to 0.44 mW/cm2. 進一步提高輸出功率預(yù)計將技術(shù)上可
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