NanoFocus μScan(激光掃描輪廓儀)

1、n NanoFocus Scan（激光掃描輪廓儀）Scan采用模塊化設(shè)計，特點是快速測量、不接觸、不破壞、自動化Scan的中心部件掃描模塊(x/y方向樣品掃描)可以和不同的傳感器(Z方向測量)連用，如Confocal point sensor、Autofocus sensor、Chromatic white light sensor、Holographic sensor等。AF2 自動對焦（Autofocus)借由探測器的回饋訊號調(diào)整物鏡位置，得到待測物焦點，而獲得待測物的確實高度（如下左圖）。CF4 共軛焦（Confocal, Laser)激光光束經(jīng)由物鏡迅速上下移動聚焦于待測物上，此時偵測

2、器能經(jīng)由孔洞得到最大光的強度，如此偵測器根據(jù)此訊號確定其位置（如下右圖）。AF2CF4 n 應(yīng)用ü 集成電路封裝和表面貼片技術(shù)ü 厚膜混合電路:膜厚度的自動化測量ü 精密部件1 BGA 2 thick film 3 dispenser dots 4 laminaten 技術(shù)參數(shù)Scan modulesMeasuring range in x,y-direction mmResolution in x,y-direction mmPositioning range in z-direction mmMax. measuring speed mm/sSC 5050X5

3、00.510050SC 100100x1000.510050SC 150150x1500.510050SC 200200x2000.510050other dimensions on requestSensorsResolution z mResolution x,y mWorking distance mmMeasuring range in z-direction mm Camera (optional)Confocal point sensorCF 40.02141.0off-axisCF 130.021131.0(BMT5)Autofocus sensorAF 20.025/0.011

4、1)121.5/0.651)integratedAF 50.025/0.0111)151.5/0.651)(BMT3)Chromatic white light sensorCRT 52)0.010450.3off-axis (BMT5)CRT 122)0.0254121.0CRT 162)0.0758163.0Holographic sensorCP 153.012121.8integrated(BMT 4)CP 426.015428.0CP 6510.0256518.01) with restricted measuring range 2) with 1, 4 or 30 kHz mea

5、suring frequency availableModulesSystem controllerHigh performance industrial PC, DVD-Writer, network card,Windows XP ProfessionalCabinet and work table MT 70Stable container for electronic modules with work table1550x800x750 (lxwxh in mm)Granite measuring stand MP 100Portal construction, 660x450x49

6、7 (lxwxh in mm) for SC 50 to SC 150Granite measuring stand MP 200Portal construction, 680x480x385 (lxwxh in mm) from SC 200NF soft standard softwareNanoFocus control and evaluation software, profile and topographyrepresentation, roughness calculation compliant with DIN EN ISOOptionsNF 3D-PlusPhoto-r

7、ealistic 3D presentation of topographical data (OpenGL)NF Active XInterface modules to program individual measurement processes andcalculations (Excel/VBA)NF HybridmasterAutomation tool for the use of scan® in thick film production incl. SPC andteach in moduleNF FlatmasterAutomated measurement of straightness, flatness and warpageNF SolderAutomated off-line measurement of fine pitch solderpa