進(jìn)階微機(jī)電元件實(shí)作

1、進(jìn)階微機(jī)電元件實(shí)作進(jìn)階微機(jī)電元件實(shí)作l奈米壓痕器試片載臺(tái)散熱lAdviser：Prof. Li, Wang Longl Speakers：Huang, Chih-Chieh Q26971037Environmental Controll To take full advantage of the fine displacement resolution available,l Several precautions must be taken in choosing and preparing the testing environment. l Uncertainties and error

2、s in measured displacements arise from two separate environmental sources: 1. Variations in temperature that cause thermal expansion and contraction of the sample and testing system. 2. The system sits on a vibration isolation table, but it is also desirable that the equipment be placed on a quiet,

3、solid foundation (ground floor). Environmental Controll The isolation cabinet in which the instrument is enclosed provides some thermal stability, but the room temperature should be controlled to within 1 C. l On some materials, one can account for small thermal displacements using the correction fo

4、r thermal drift, which is described later. However, for time-dependent materials (polymers and metals at a significant fraction of their melting temperature), extra care must be taken in providing thermal stability because separation of the thermal displacements from the specimen displacements is vi

5、rtually impossible.Thermal Driftl This correction is unique to each indentation experiment and seeks to adjust measured correction displacements to account for small amounts of thermal expansion or contraction in the test material and/or indentation equipment. Near the conclusion of the indentation

6、experiment, the indenter is held at a small constant load for at least 50 seconds. Displacement changes measured during this period are attributed to thermal expansion or contraction in the test material or indentation equipment, and a drift rate is calculated, in nm/sec.Experimentl 1.熱電偶絲感溫端利用耐熱膠帶固定於鋁錠上待量測(cè)溫度用，連結(jié)端連結(jié)熱電偶感溫計(jì)。Experimentl 2.鋁錠放置加熱平臺(tái)上加熱與熱電偶感溫計(jì)開(kāi)啟量測(cè)溫度。Experimentl 3.待鋁錠溫度一致取下放置於散熱片與鋁箔上並記錄溫度。 Case1.氣冷Experimentl 3.待鋁錠溫度一致取下放置於散熱片與鋁箔上並記錄溫度。 Case2.風(fēng)扇強(qiáng)迫對(duì)流Experimentl 3.待鋁錠溫度一致取下放置於散熱片與鋁箔上並記錄溫度。 Case3.散熱膏改善熱傳接觸面積 ResultsDiag