二維MoS2薄膜的可控制備及其電子輸運(yùn)特性研究

二維MoS2薄膜的可控制備及其電子輸運(yùn)特性研究【摘要】

二維MoS2作為一種新型半導(dǎo)體材料，在電子學(xué)和光電子學(xué)領(lǐng)域具有廣泛的應(yīng)用前景。在本文研究中，我們采用化學(xué)氣相沉積（CVD）技術(shù)在氧化硅基底上制備了高質(zhì)量的二維MoS2薄膜，并通過壓電傳感器進(jìn)行了表征。通過在不同條件下控制CVD過程中的溫度、氣體流量和反應(yīng)時(shí)間等參數(shù)，成功地實(shí)現(xiàn)了對(duì)MoS2薄膜的可控制備。同時(shí)，利用離子束雕刻技術(shù)對(duì)MoS2薄膜進(jìn)行了納米加工，使其形成了具有排列有序的長(zhǎng)條紋的結(jié)構(gòu)，可作為電極進(jìn)行電子輸運(yùn)特性研究。

進(jìn)一步的電子輸運(yùn)實(shí)驗(yàn)表明，MoS2薄膜具有半導(dǎo)體特性，并在室溫下呈現(xiàn)出n型導(dǎo)電性。在不同溫度和電場(chǎng)的情況下，MoS2薄膜的電子輸運(yùn)性質(zhì)表現(xiàn)出明顯的變化。通過調(diào)控材料的缺陷和摻雜，成功地實(shí)現(xiàn)了對(duì)MoS2薄膜電子輸運(yùn)特性的調(diào)控。結(jié)果表明，MoS2薄膜在電子學(xué)和光電子學(xué)器件中具有廣泛的應(yīng)用前途。

【關(guān)鍵詞】

二維MoS2；CVD；可控制備；納米加工；電子輸運(yùn)特性

【Abstract】

Two-dimensional(2D)MoS2asanovelsemiconductormaterialhasgreatpotentialapplicationsinthefieldsofelectronicsandoptoelectronics.Inthisstudy,high-quality2DMoS2filmwaspreparedonaSiO2substratebychemicalvapordeposition(CVD)techniqueandcharacterizedbypiezoelectricsensors.ThecontrollablepreparationofMoS2filmwasachievedbycontrollingthetemperature,gasflowrate,andreactiontimeintheCVDprocessunderdifferentconditions.Meanwhile,theMoS2filmwaspatternedbyionbeametching,formingastructurewithalongitudinallyalignedstripethatwasusedasanelectrodeforthestudyofelectronictransportcharacteristics.

FurtherelectronictransportexperimentsdemonstratedthattheMoS2filmexhibitedsemiconductorpropertiesandshowedann-typeconductivityatroomtemperature.TheelectronictransportpropertiesofMoS2filmshowedsignificantchangesunderdifferenttemperaturesandelectricfields.Bycontrollingthematerialdefectsanddoping,theelectronictransportcharacteristicsofMoS2filmweresuccessfullyregulated.TheresultsindicatedthatMoS2filmhadgreatpotentialapplicationsinelectronicsandoptoelectronicsdevices.

【Keywords】

Two-dimensionalMoS2;CVD;Controllablepreparation;Nanofabrication;ElectronictransportcharacteristicTwo-dimensionalMoS2hasattractedincreasingattentioninrecentyearsduetoitsuniquepropertiesandpotentialapplicationsinelectronicsandoptoelectronicsdevices.Inordertofullyutilizeitspotential,thecontrollablepreparationofhigh-qualityMoS2filmiscrucial.

OneofthemostcommonlyusedmethodsforpreparingMoS2filmischemicalvapordeposition(CVD).Bycontrollingthegrowthconditions,suchastemperature,pressure,andprecursorconcentration,high-qualityMoS2filmwithuniformthicknessandlargeareacanbeobtained.

TheelectronictransportpropertiesofMoS2filmarestronglydependentonitscrystalquality,defectdensity,anddopinglevel.IthasbeenfoundthattheelectronictransportpropertiesofMoS2filmcanbesignificantlyimprovedbyreducingthedefectdensityanddopingwithcertainimpurities.

Underdifferenttemperaturesandelectricfields,theelectronictransportpropertiesofMoS2filmexhibitsignificantchanges.Forinstance,theelectricalconductivityofMoS2filmcanincreasewithincreasingtemperatureorelectricfieldduetotheenhancedcarriermobility.Furthermore,theconductivitycanalsobetunedbycontrollingthedopinglevel,ascertaindopantscaneitherenhanceorsuppressthecarrierconcentration.

Insummary,thecontrollablepreparationandregulationofelectronictransportcharacteristicsofMoS2filmprovideopportunitiesforitspotentialapplicationsinfutureelectronicandoptoelectronicsdevices.ThenanofabricationofMoS2-baseddeviceswithhighperformanceandreliabilitycanbeachievedwiththeadvancementofthesynthesisandcharacterizationtechniquesApartfromelectronicandoptoelectronicapplications,MoS2filmsalsohavepotentialinotherfieldssuchasenergystorageandcatalysis.Oneofthemostpromisingapplicationsisinsupercapacitors,whichareenergystoragedeviceswithhighpowerdensityandfastcharginganddischargingcapabilities.MoS2hasbeenexploredasanelectrodematerialforsupercapacitorsduetoitslargesurfacearea,highelectricalconductivity,andgoodstability.ResearchershavereportedthatMoS2-basedsupercapacitorsexhibitexcellentelectrochemicalperformance,whichcanbefurtherimprovedbytuningthemorphologyandstructureofthematerial.

MoS2-basedcatalystshavealsoattractedmuchattentioninrecentyearsduetotheirhighcatalyticactivityandselectivityinvariouschemicalreactions.Forinstance,MoS2hasbeenreportedtobeanefficientcatalystforthehydrogenevolutionreaction(HER),whichisakeystepinwater-splittingtechnologiesfortheproductionofhydrogenfuel.ThehighcatalyticactivityofMoS2forHERcanbeattributedtoitsuniqueelectronicandgeometricstructures,aswellasthesynergisticeffectbetweentheactivesitesandthesupportmaterial.

Inaddition,MoS2canalsobeusedasacatalystforotherreactionssuchashydrodesulfurization(HDS)andoxygenreductionreaction(ORR),whichareimportantprocessesinthepetrochemicalindustryandfuelcells,respectively.ThecatalyticperformanceofMoS2canbefurtherenhancedbymodifyingitssurfacechemistry,morphology,andstructurethroughvariousmethodssuchasdoping,surfacefunctionalization,andnanostructuring.

Overall,thecontrollablepreparationandregulationofMoS2filmsoffergreatopportunitiesfortheirapplicationsinvariousfields.Withthecontinuousdevelopmentofsynthesisandcharacterizationtechniques,aswellastheincreasingunderstandingofthefundamentalpropertiesandbehaviorsofMoS2,wecanexpectmorebreakthroughsinthedesignandfabricationofadvancedMoS2-basedmaterialsanddevicesinthefutureOnepromisingapplicationofMoS2isinoptoelectronics.Duetoitsdirectbandgapnatureandstronglight-matterinteraction,MoS2hasbeendemonstratedtohaveexcellentperformanceasaphotoelectricmaterial,makingitanidealcandidateforsolarcellsandphotodetectors.Additionally,MoS2-basedlight-emittingdiodes(LEDs)haveshownpromisingperformanceintermsofbrightnessandefficiency,andcouldpotentiallybeintegratedwithelectronicdevicesforoptoelectronicapplications.

AnotherpotentialapplicationofMoS2isinenergystoragedevices,suchasbatteriesandsupercapacitors.MoS2hasbeenshowntohaveahighspecificcapacitanceandexcellentcyclingstability,makingitanattractiveelectrodematerialforsupercapacitors.Inaddition,MoS2hasbeenusedasacathodematerialinlithium-ionbatteries,withpromisingresultsintermsofbothcapacityandcyclelife.FurtherresearchisneededtofullyrealizethepotentialofMoS2inenergystorageapplications,butthematerial'suniquepropertiesmakeitapromisingcandidateforfuturedevelopments.

Inthefieldofcatalysis,MoS2hasshowngreatpotentialduetoitshighsurfacearea,abundance,anduniqueelectronicandchemicalproperties.MoS2-basedcatalystshavebeenusedinvariousapplications,suchaselectrocatalysis,photocatalysis,andhydrogenevolutionreactions.Additionally,MoS2-basedcatalystshaveshownpromisingactivityforconversionofgreenhousegases,suchascarbondioxide,intovaluablechemicals,makingthemapotentiallyimportanttoolforaddressingclimatechange.

Overall,theuniquepropertiesandversatileapplicationsofMoS2makeitanexcitingmaterialforresearchanddevelopmentinvariousfields.AstheunderstandingofMoS2continuestogrow,wecanexpecttoseemoreadvancesinthedesignandfabricationofadvancedmaterialsanddevices.Thedevelopmentofnewsynthesi