利用晶體生長軟件對藍(lán)寶石晶體生長的仿真計(jì)算方法

利用晶體生長軟件FEMAG對藍(lán)寶石晶體生長的仿真計(jì)算方法當(dāng)前第1頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALGeneralintroductionSapphireGrowthContent當(dāng)前第2頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALIntroduction

Formorethan25years,FEMAGSoftdevelopssimulationsoftwarededicatedtotheresearchanddevelopmentofoptimalcrystalgrowthprocesses.1984 FirstresearchonGermaniumgrowthinUniversityofLouvain.

Prof.Fran?oisDupret1989 FirstresearchonSilicongrowthinUniversityofLouvain.1992 FirstcollaborationswithmajorICcompanies. Developmentofdefect-freesiliconwaferproduction.Today,morethan 35patentsarereferencingFEMAGSoftware2003 FEMAGSoftS.A.,spin-offfromUniversityofLouvain.2006 CollaboratrionwithmajorSolarcompanies. Developmentoflow-costandlow-oxygencontentprocesses.2009 Largeinvestmentforanewsoftwareframework 2010 ReleaseofSoftwareapplicationforSapphireingotproduction.當(dāng)前第3頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALCzochralskiprocess當(dāng)前第4頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALDirectionalSolidificationSystem當(dāng)前第5頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALFloatingZoneProcess當(dāng)前第6頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALSapphireGrowthbyCZandkyropoulos當(dāng)前第7頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALSapphiregrowthbyHEM當(dāng)前第8頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALWhatareFEMAGsoftware?Process-dedicatedsimulationtools,adaptedtoyourownprocessesandabletosolveyourproblems.Global

Allthefurnacecomponentsareconsidered.

Alltheheattransfermodeareconsidered(radiationtransfer,heatconduction,meltandgasconvection)InductionandohmicheatingTimeDependent當(dāng)前第9頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALProcess-dedicatedtools

FEMAG-CZ :CzochralskiFEMAG-FZ :FloatingZoneFEMAG-VB :VerticalBridgmanFEMAG-CZ/OX :CzochralskiforSapphireFEMAG-KY :KyropoulosFEMAG-DS :DirectionalSolidificationFEMAG-HEM :HeatExchangeMethodGainoftime.ProcessmasteringAccurateandrighttothepoint當(dāng)前第10頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALPlatformorientedFRAMEWORK:FEMAG3RADIATIONCONVECTION…MESHGEOMETRYCONDUCTIONFEMAG-CZFEMAG-HEMFEMAG-DSFEMAG-KYROPOULOSFEMAG3NEW2011Veryaccurate:FiniteElementandSpectralmethodsVeryefficient:3Dsimulationsinless1dayVeryflexible:Veryfastdevelopmentofnewdemand

…當(dāng)前第11頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALGlobalsimulations

CzochralskiFurnaceforSiliconHEMFurnaceforSapphireNosimplificationoftheprocessconditions當(dāng)前第12頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALDynamicsimulationsAdynamicsimulationtoolCompleteprocesssimulationDynamiceffectofinterfacedeformationVaryingprocessingconditions

當(dāng)前第13頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALSapphireCrystalGrowthSimulation

當(dāng)前第14頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALSapphireSimulationObjectiveThemarketofSapphireisexperiencingaveryfastgrowthrateandbecomeverycompetitiveManycompaniesinvestinsimulationsoftwareinordertoreinforcetheirpositionsHEM,CzochralskiandKyropoulosprocessrequireoptimizationandagoodunderstandingStrongneedforefficientnumericaltools.

Radiationeffectsintheparticipatingcrystalandmeltisacomplexproblem.當(dāng)前第15頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALSapphireSimulationObjectiveOurgoalistoprovideaccurate

simulationtool,abletotakealltheprocessfeaturesintoaccountandtooptimize

thegrowthprocessintermsoftheresultingcrystalquality.當(dāng)前第16頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALSapphireSimulationObjectiveKYROPULOSCZOCHRALSKIHEM當(dāng)前第17頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALFEMAG-CZ/OXFEMAG-CZ/OXSoftwaretosimulateSapphireGrowthbyCZandKyropoulosSpecifications:Temperatureinthesapphireand

inallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.Crystallizationfrontshape

OhmicandInductionHeatingAdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal當(dāng)前第18頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALTemperatureintheHotZoneFEMAG-CZ/OXCZprocess

withInductionHeatingsystemInductionHeating

system當(dāng)前第19頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALTemperatureinthecrystal

andinthemeltFEMAG-CZ/OXCZprocess

withInductionHeatingsystem當(dāng)前第20頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALMeltvelocityamplitude

FEMAG-CZ/OXCZprocess

withInductionHeatingsystemTheinterfaceshapeandpositionisaresultofthesimulation當(dāng)前第21頁\共有33頁\編于星期四\20點(diǎn)FEMAGSoft?2012Temperature

fieldinthemeltStream

functionFEMAG-CZ/OX/CZandKYROPOULOSprocess當(dāng)前第22頁\共有33頁\編于星期四\20點(diǎn)FEMAGSoft?2012Meltmeshes

BLM(boundarylayermesh)Coarse

meshBLMmeshisveryimportanttosimulatetheinterface當(dāng)前第23頁\共有33頁\編于星期四\20點(diǎn)FEMAGSoft?2012LocaltemperaturefieldResultusingcoarsemeshResultusingBLMmeshBLMmeshenablesabetterpredictionofthecrystalisationinterface當(dāng)前第24頁\共有33頁\編于星期四\20點(diǎn)FEMAGSoft?2012VelocityfieldResultusingcoarsemeshResultusingBLMmesh當(dāng)前第25頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALFEMAG-HEMFEMAG-HEMSoftwaretosimulateSapphireGrowthbyHeatExchangeMethodSpecifications:Temperatureinthesapphireand

inallfurnacecomponentsbysolvingtheglobalheattransferinthefurnace(radiation,conduction,convection).Flowvelocityinthesapphireliquidphase.Crystallizationfrontshape

AdvancedradiationheattransferinthesapphireGasconvectionAnisotropicthermalstressesinthecrystal當(dāng)前第26頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALFEMAG-HEMFEMAGSoftCADtooltointroducethegeometry當(dāng)前第27頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALFEMAG-HEMGlobalTemperatureinthefurnace當(dāng)前第28頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALFEMAG-HEMMeltconvectionDetailofmeltconvection當(dāng)前第29頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALFEMAG-HEMTemperaturedistributioninthecrystalandmeltfordifferenttimesVelocityamplitudedistributioninthemeltfordifferenttimes當(dāng)前第30頁\共有33頁\編于星期四\20點(diǎn)CONFIDENTIALAnisotropicThermalStress(HEMSapphireA-axis)FEMAG-HEMquasi-