nanolab - review納米實(shí)驗(yàn)室評論_第1頁
nanolab - review納米實(shí)驗(yàn)室評論_第2頁
nanolab - review納米實(shí)驗(yàn)室評論_第3頁
nanolab - review納米實(shí)驗(yàn)室評論_第4頁
nanolab - review納米實(shí)驗(yàn)室評論_第5頁
已閱讀5頁，還剩11頁未讀， 繼續(xù)免費(fèi)閱讀

下載本文檔

版權(quán)說明：本文檔由用戶提供并上傳，收益歸屬內(nèi)容提供方，若內(nèi)容存在侵權(quán)，請進(jìn)行舉報(bào)或認(rèn)領(lǐng)

文檔簡介

13.10.2024NanoLab1NanoLab@OFFIS13.10.2024NanoLabPage2OutlineReview:NanoLabSetupCNTsamplesVisualFeedbackCNTlocalizationandtrackingNewdepthdetectionforfineapproachAutomatedCNT-NanohandlingNanohandlingstrategiesandautomatedsequencesAutomatedassemblyofAFMsupertipsConclusionsReview:NanoLabsetupTwomobileplatformswithmodulartoolsSeveralCCDcamerasSEMintegrationSamplestageFourdegreesoffreedomUptoeightsampleholdersAutomatedcalibrationAutomatedclosed-looppositioncontrol13.10.2024NanoLabPage3CNTsamples13.10.2024NanoLabPage4CambridgeUniversity,EngineeringDepartmentMultiwalledCNTsGrownbyplasmaenhancedchemicalvapordeposition(PECVD)VerticallyalignedDiameter:100-200nmLength:~10μmSpacing:50μmVisualFeedback–CNTLocalizationProblem:CNTdetectioninSEMimagesRequirementsRobustnessagainstnoiseCNTswithvaryingshape,sizeandcontaminationEndpointandorientationmeasurementSolution:PCA(PrincipleComponentAnalysis)13.10.2024NanoLabPage5VisualFeedback–CNTTrackingProblem:ContinuouslytrackCNTsRequirements:Speed:~20fpsMag.:500xto4000xOcclusionsSolution:Region-based

activecontoursAccuracy:1.0pixel

~about30nm

13.10.2024NanoLabPage6VisualFeedback–ShadowDetectionProblem:FinezalignmentRequirements:2-3μmaccuracySolution:Shadow-based

depthdetectionSecondaryelectrons

“collected”bygripperSE-detectorbias13.10.2024NanoLabPage7NanohandlingStrategies–DetachingSeveralapproachespossibleTensiledetachingSheardetachingTwistingSheardetachingusedSufficientgrippingforceLess“damage”toCNT13.10.2024NanoLabPage8NanohandlingStrategies–ReleasingGripperopeningwithCNTinsideFourdifferentesHardtodetect(CNTvisibility)Solution:ApplyforcewhileopeningWelldefinedfinalstateTwopointcontacts,littleadhesion13.10.2024NanoLabPage91.2.3.1.2a.2b.2c.2d.NanohandlingStrategies–AttachingHowtoattachaCNTtoacantilever?Previewsapproach:Beam-induceddepositionGasinjectionsystemAdditionalcostsLongdurationLowerthroughputCostsNewapproach:UsesurfaceadhesionLinecontactstrongerthanpointcontact13.10.2024NanoLabPage101.2.3.AutomationSequencesAutomatednanohandlingdividedintosequences:InitializationsequenceDetachingsequenceAssemblysequenceCentraldatabase13.10.2024NanoLabPage11AutomationSequences-InitializationActuatorhomingandcalibrationFindabsolutepositionofactuatorsRelationofactuatorandSEMcoordinatesystemsToolregistrationMeasuringexactlocationoftoolTemplatesfortrackingCNTindexingVideoTargetindexing13.10.2024NanoLabPage12AutomationSequences-DetachingCNTselectionCoarseapproach(firstz,thenxandy)Fineapproach(firstxandy,thenz)ClosegripperDetachingshearmovementDuration:~1min13.10.2024NanoLabPage13AutomationSequences-AssemblyCoarseapproach(firstz,thenxandy)Fineapproach(firstxandy,thenz)PushCNTagainstcantileverandopengripperMovetocreatelinecontact

betweenCNTandcantileverPullawaygripperDuration:~1min13.10.2024NanoLabPage14Conclusion13.10.2024NanoLabPage15NanoLabisaversatilemicro-/nano-factoryOperatesinthescanningelectronmicroscopeFlexiblenanohandlingModularintegrationofseveralkeycomponentsMobileplatformsElectrothermalmicrogrippersReal-timeimageprocessing

algorithmsControlarchitectureConclusionFullyautomatednano-handlingAlternativeto

溫馨提示

  • 1. 本站所有資源如無特殊說明，都需要本地電腦安裝OFFICE2007和PDF閱讀器。圖紙軟件為CAD,CAXA,PROE,UG,SolidWorks等.壓縮文件請下載最新的WinRAR軟件解壓。
  • 2. 本站的文檔不包含任何第三方提供的附件圖紙等，如果需要附件，請聯(lián)系上傳者。文件的所有權(quán)益歸上傳用戶所有。
  • 3. 本站RAR壓縮包中若帶圖紙，網(wǎng)頁內(nèi)容里面會(huì)有圖紙預(yù)覽，若沒有圖紙預(yù)覽就沒有圖紙。
  • 4. 未經(jīng)權(quán)益所有人同意不得將文件中的內(nèi)容挪作商業(yè)或盈利用途。
  • 5. 人人文庫網(wǎng)僅提供信息存儲空間，僅對用戶上傳內(nèi)容的表現(xiàn)方式做保護(hù)處理，對用戶上傳分享的文檔內(nèi)容本身不做任何修改或編輯，并不能對任何下載內(nèi)容負(fù)責(zé)。
  • 6. 下載文件中如有侵權(quán)或不適當(dāng)內(nèi)容，請與我們聯(lián)系，我們立即糾正。
  • 7. 本站不保證下載資源的準(zhǔn)確性、安全性和完整性, 同時(shí)也不承擔(dān)用戶因使用這些下載資源對自己和他人造成任何形式的傷害或損失。

評論

0/150

提交評論