衍射光柵論文：衍射波前測(cè)試方法的研究

1、衍射光柵論文：衍射波前測(cè)試方法的研究【中文摘要】衍射光柵是應(yīng)用在光譜儀器中最重要的元件之一。 隨著光譜儀器應(yīng)用領(lǐng)域的擴(kuò)展，衍射光柵不僅應(yīng)用于物質(zhì)元索的光譜 分析，而且在天文學(xué)、量子光學(xué)、集成光學(xué)、生物學(xué)、光通訊、化工 以及冶金等領(lǐng)域也得到了廣泛應(yīng)用。同時(shí)，隨著科學(xué)技術(shù)的不斷發(fā)展, 光柵加工也達(dá)到了一個(gè)嶄新的高度。衍射光柵應(yīng)用領(lǐng)域的擴(kuò)展使得制 造光柵刻劃技術(shù)的提高成為目前光柵研究領(lǐng)域的首要任務(wù)。光柵面型 復(fù)雜化，面積增大，刻線密度的提高等均給光柵的制備帶來新的挑戰(zhàn)， 與此同時(shí)光柵的質(zhì)量檢測(cè)就成為不可或缺的重要環(huán)節(jié)。對(duì)于衍射光柵 的檢測(cè)，測(cè)量光柵衍射波面的波象差是評(píng)價(jià)光柵質(zhì)量是否合格的重要 環(huán)節(jié)，

2、對(duì)其測(cè)量主耍有干涉法、全息術(shù)法和位相對(duì)比法三種方法。通 過對(duì)干涉條紋的獲取、處理即可得知波前缺陷,從而反映出此光柵的 質(zhì)量水平和加工上的不足,并得以改進(jìn)。目前衍射光柵波前檢測(cè)已應(yīng) 用于在平面光柵的檢測(cè)中,而對(duì)于凹面光柵的質(zhì)量檢測(cè)僅是對(duì)其衍射 效率進(jìn)行檢測(cè)，未應(yīng)用于其衍射波前進(jìn)行檢測(cè)。本文在闡述了光柵衍 射理論性質(zhì)基礎(chǔ)之上，論述了衍射波前檢測(cè)在光柵加工質(zhì)量評(píng)價(jià)的重 要性，并對(duì)凹面衍射光柵波前檢測(cè)方法進(jìn)行研究?；谔┞缮鎯x檢 測(cè)原理搭建實(shí)驗(yàn)光路，針對(duì)于i叫面光柵檢測(cè)進(jìn)行相應(yīng)的改進(jìn),成功獲 得凹面光柵零級(jí)和一級(jí)干涉條紋，并用zemax軟件對(duì)本系統(tǒng)中凹面光 柵模擬進(jìn)行了相關(guān)的像差分析。從而證明了干涉

3、檢驗(yàn)針對(duì)凹面光柵衍 射波前的可行性,為凹面光柵的加工質(zhì)量檢測(cè)提供了依據(jù)?！居⑽恼縟iffraction grating is one of the most important components which have used in spectroscopic instruments with the expansion of application fields, diffraction grating have not only been applied in diffraction grating spectrum, but al so been widely used in a

4、stronomy, quantum optics, integrated optics, biological, optical communications, chemical and metallurgy and other fields .at the same time as the development of science and technology, craft of diffraction grating has reached a new height the development in character!zation technology and research

5、in diffraction grating nature have become priority mission in diffraction grating research. it wou 1 d be new challenges under the consideration of complex in grating face, increasing of the grating area, improving of grooves characterization density. therefore, grating qual i ty testing has become

6、an indispensable link. for the detection of diffraction grating, wave aberration measurement of diffraction grating is the important means in evaluating grating quality interference, holography and phase comparison have been widely applied wave-front defects can be discovered by acquisition and proc

7、essing of the interference fringes it will also reflect the lack of grating processing and grating quality, and improve the defects after that. test in diffraction grating wave-front is mainly used in plane grating currently, as for concave grating diffraction, diffraction efficiency is only paramet

8、er can be tested .wavefront detection methods of concave diffraction grating is discussed in this paper. wavefront detection methods of concave grating is improved from the plane grating, based on the principle of testing concave grating by the twyman interferometer zero and one class grating fringe

9、s can be got by this experiment, aberration in experiment have been analyzed by the zemax.which has proved feasibility of interfere testing in concave grating【關(guān)鍵詞】衍射光柵凹面光柵波前檢測(cè) 泰曼干涉儀波前像差 【英文關(guān)鍵詞】diffraction gratingconcave gratingwave-front testingtwyman interferometerwavefront aberration【目錄】衍射波前測(cè)試方法的研

10、究摘要45 abstract 5第一章緒論 7141. 1 引言7-812干涉技術(shù)發(fā)展及應(yīng)用8-91.3衍射光柵的介紹9-131. 4本論文研究目的及意義13-14 第二章衍射理論及衍射光柵性質(zhì)14-242. 1惠更斯一菲涅耳原理14-152.2菲涅耳-基爾霍夫衍射公式15-162.3旁軸近似16-172. 4菲涅耳近似172. 5夫瑯禾費(fèi)近似17-182. 6衍射光柵衍射性質(zhì)18-24第三章產(chǎn)生衍射波前缺陷的參數(shù)及測(cè)量方法24-373. 1光柵衍射圖樣光強(qiáng)度分布的數(shù)字解24-253.2刻劃誤差和波面像差的關(guān)系25-273.3周期刻劃誤差的影響27-283.4衍射光柵檢測(cè)28-37 第四章衍射凹面光柵的波前檢測(cè)研究37-514. 1凹面光柵性質(zhì)37-404