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2008.11.04?????GlobalCS???????EOS/ESD???????EOS/ESDSeminar1EOS/ESDSeminar??EOS/ESD????.EOS???/??.ESD???/??2.???????.??????????.???????ESD??.MSL????.ESD????????Mechanism3.???????.???????.???????.EOS/ESD????.???????21.EOS/ESD??????

??????????(AbsoluteMaximumRating)?Over??????????????????????????Stress????????:ElectricalOver-Stress???

Burnt?WireOpen(Decap.??????????,??pattern?????)EOS(ElectricalOver-Stress)3EOS????

.Spec.limit???????

.ImpulsiveSurge????AC?DC???Switching/Noise??????????????????,??????pulse

.ACleakAC??????????????Ground?Floating???????????Chassis?????AC????

.Swell/SagVoltage??????????DC?????????Switching???????Over(swell)/Under(sag)voltage.

.Latch-up????????????????????????????????????????????????????????????????????.1.EOS/ESD????4???????????????????????????????????????????????????:??????????discharge???ESD??(HBM,CDM)ESD(Electro-staticDischarge)1.EOS/ESD????HOTSPOT????5ESD????

.??????

.?????(induction)ESD????

.EMIPulse(Wide-bandElectromagneticInterferencePulse)Spark???????????????????????????

.??????(ThermalBreakdown)

???????????????????????????????

(HotSpot)→HBM,MM

.???????????(DielectricBreakdown)MOSGate??????????????????????→CDM,HBM

.?????(MetallizationMelt)

??????Bondwire???????1.EOS/ESD????6??.?????????(+??)???(-??)??????????????,????????????????????????????????????????????.???????????????????????,????????????????????????????????????..?????????ESD(Electro-StaticDischarge)??.?????2.???????+???-???7???????

.???????:2???????????,??????+,-??????????.

??:??????????????????????.

??:???????????????????????.

??:???????????????????????????.

??:??????????????????,?????????????.

??:???????????????????,+,-????????????.

.??????????????????????????,????????????????????????????????????????,??????????????????????.2.???????8????

.???????????(+)??????????~(-)??????????1????????????

.??????????????(??????)????????Class??(??ESD??,HBM)

2.???????(-)(+)?????????????????????????????????????????????????????????????????PVC,????????????????DEVICETYPE????????????DEVICETYPE????????????

VMOS30V-C–MOS250V-

MOSFET100V-SCHOTTKY

DIODES300V-

GA,ASFET100V-FILM

RESISTORS300V-

EPROM100V-BIPOLAR?????380V-

JFET140V-ECL(P.C.B

LEVEL)500V-

SAW150V-SCR680V-

OP-AMP190V-??PASS??Fail????CLASS0-250VCLASS1A250V500VCLASS1B500V1KVCLASS1C1KV2KVCLASS22KV4KVCLASS3A4KV8KVCLASS3B8KV-9????????????

???3KV???????????????,?????????????100V???IC???????.2.???????

??????

???

??

??

?

?1.0?

????????.

????????

????????

????????

(?)???????????????????90-150?????.2.0?

?????????????????.2.5?

??????????????????.3.0?

?????????.???????????.4.0?

???????????????????.5.0?

?????????????????????.6.0?

?????????????????????.7.0?

???,???????????????????8.0?

????????????????????.9.0?

????????????????????.10.0?

??????????????????.11.0?

???????????????????????12.0?

??????????????????????.10????????????

?????????????(??)???????????,??????????????????????????.???????????????????????????????50%?????????????.

???????????????????,??????????.

.??????????????????.5℃,65%????20℃???????????24%?,??????????.2.????????

?

??

?

?

??

?

(10-20%)?

?

(65-90%)

-

?????????-

??????????-

???????-

??????-

?????????????-

???????????

35000V12000V

6000V

7000V20000V18000V

1500V

250V

100V

600V1200V1500V

11??(??)?????????

.MSL:????????????????LEVEL(Moisture-SensitivedevicesLevel)

.????????:??????

1?

.?????????

????????BAKING??????????2.???????MSL???????????,????Baking??????Baking???????12MSL?Baking???(????)2.???????

Level

30℃/????60%RH????Bag?????????

1

30℃/????85%RH????????

21?

2a4?

3168??

(7?)??????[??????]

4

72??

(3?)

5

48??

(2?)

5a

24??

(1?)

Package??Level125℃??Bake[Tray??]40℃???Bake[Reel??]

1.4mm??

2a

4??

5?

3

7??11?

4

9??13?

510??14?

5a14??19?

2.0mm??

2a18??21?

324??33?

431??43?

537??52?

5a48??68?[MSLLEVEL][BAKING???]13ESD????????????Mechanism

.HBM(HumanBodyModel)

?????????????~??V????????????????????????????????KW????????????????

.CDM(ChargedDeviceModel)

????????????????,??,?????????????????????????

??????????????????????????????.2.?????????????????

14ESD????????????Mechanism

.FIM(FieldInducedModel)

??????????????,???????????IC??????IC???????IC???Data???????????????.??Q???????????????

E=Q/4πε。r2[V/m]??

?????????Q????????,???????????.

.MM(MachineModel)

???????????????

Ex)ICMount???????????IC????????.2.???????15??????(ESD??)

?????????:CondenserCharge?????

2.??????????HBMMMCDMESDAssociationStandardESDSTM5.1Ds.5.2Ds.5.3MILStandardMIL-STD-883D--EIAJStandardA114-BA115-A-JEDECStandardA114-BA115-AC101-A16Ground(??)????????,????????????????????????????????????????????????????????????????:2?????

2.????????????????1??????,?????????????10?2????????????????????150/I3???????????????????100???3??????????????10?17????????

2.???????18???????3.????????????????????????/??????????Glass????/???

1)???????????????Class1~3???

2)??????????????????

??,?????????

3)????????????

??????????????LayOut??

4)CheckList???????????????

????,LevelCheck,????,Main???????????19?????Point3.???????

?

?

????????????????

CHIP?

???

??

?

?????TEST??????????

?????????A/S

????

●

●

●

●

●

●

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???(???

??)

●

●

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●

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???

MAT

●

●

●

●

●

●

●

●

●

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●

FLOOR

MAT(????)

●

●

●

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●

●

●

●

●

???/???

●

●

●

●

●

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●

●

●

???

??/??/??

●

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●

●

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SHIELD

BAG

●

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●

●

●

●

●

???

??

●

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●

●

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●

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??

●

●

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????

●

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???

????

●

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ANTI-STATIC

???

●

●

●

●

●

20EOS/ESD????

.ACLeak(????)????3.???????1.Tester(DVM)?AC????????.2.????????????,????????????????????????.※???????????????????????????????.3.????:AC5V????4.????:1?/???5.????:PBA(???)??????????,???,JIG,???,????21EOS/ESD????

.Earth-Ring????3.???????1.???????????????.2.??????????????????,???????.3.????:??(???)/??(???)4.????:1?/???5.????:????????Earth-Ring???DVM???1.Tester(DVM)??????????.2.???????(??)??????.3.??????(??)???????????????????.3.????:1.0?±10%4.????:1?/???5.????:????????22EOS/ESD????

.???????3.???????1.???????ON???.(Shied?????)2.ZeroSetting?????,???????Point???????????3.????:100V??4.????:1?/???5.????:??IC?,????,??,??/???6.?????????????????????(ex.???)?????(1)?????(2)1.???????ON???,ZeroSetting?????.2.??Shied?????,?????20cm????????3.????:20V??4.????:1?/???5.????:?????6.??:??????????Filter?Clean??????23EOS/ESD????

.????????3.???????1.??Mat???Tile??Point??????????????.2.3??,?????????.3.????:10^6~10^9?/?4.????:1?/?,?????????(??Mat,??Tile)24EOS/ESD????

.????????3.???????1.???????????ON???.2.????Out/GND?????Ground??????.3.?????????????????????????.4.???,M???????????5.????:5V??6.????:1?/?????????25EOS/ESD????

.???????3.???????1.Tester(DVM)??????????.2.????(??)???GND??????.3.??????(??)??????????.3.????:10???/AC5V??4.????:1?/???5.????:?????ON?,5??????????????????????????1.???????????ON???.2.????5???????.3.??????????,??????4.???????????????.(3~10S??)5.????????.6.????:350±10℃(??)7.????:1?/???26EOS/ESD????

.GND????????3.???????1.Tester(DVM)??????????.2.????(??)???GND?

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