半導體詞匯縮寫表

半導體詞匯縮寫表

A/Danalogtodigital

AAatomicabsorption

AASatomicabsorptionspectroscopy

ABCactivity-basedcosting

ABMactivity-basedmanagement

ACalternatingcurrent;activatedcarbon

ACFanisotropicconductivefilm

ACIafter-cleaninspection

ACPanisotropicconductivepaste

ACTalternativecontroltechniques;actualcycletime

ADCanalog-to-digitaiconverter

ADEadvanceddevelopmentenvironment

ADIafter-developinspection

ADTapplieddiagnostictechnique

ADTSEMApply/DevelopTrackSpecificEquipmentModel

AEatomicemission;acousticemission;absoluteellipsometry

AECadvancedequipmentcontroller

AECSAdvancedEquipmentControlSystem;AutomatedEquipmentControlSystem

AEIafter-etchinspection;automatedequipmentinterface

AEManalyticalelectronmicroscopy

AESAugeremission/electronspectroscopy

AFMatomicforcemicroscopy

AFPabrasive-freepolish

Agsilver

A-GEMTFAdvancedGEMTaskForce

AGVautomatedguidedvehicle

AHFanhydroushydrogenfluoride

AHUairhandlingunit

AIRautomatedimageretrieval

Alaluminum

ALDatomiclayerdeposition

ALEatomiclayerepitaxy;applicationlogicelement

ALSadvancedlightsource;advancedlow-powerSchottky

AMCairbornemolecularcontamination

AMHSautomatedmaterialhandlingsystem

AMTadvancedmanufacturingtechnology

AMUatomicmassunit

ANNartificialneuralnetwork

ANOVAanalysisofvariance

AOVair-operatedvalve

APadhesionpromoter

APAadvancedperformancealgorithm

APCadvancedprocesscontrol

APCDadd-onpollutioncontroldevice

APCFIAdvancedProcessControlFrameworklnitiative

APCVDatmosphericpressurechemicalvapordeposition

APECadvancedprocessequipmentcontrol

APIapplicationprogramminginterface;atmosphericpressureionization

APMatmosphericpassivationmodule;acousticplatemode

APRDLAdvancedProductsResearchandDevelopmentLaboratory

aPSMattenuatingphase-shiftmask

AQIACCESSqueryinterface

AQLacceptablequalitylevel

Arargon

ARaspectratio

ARAMSAutomatedRellability

ARCantireflectivecoating

ARDEaspectratio-dependentetching

ARPAAdvancedResearchProjectsAgency(seeDARPA)

ARSangle-resolvedscattering

Asarsenic

AS/RSautomatedstorageandretrievalsystem

ASAPAdvancedStepperApplicationProgram

ASICapplication-specificintegratedcircuit

ASOautomaticshutoff

ASPadvancedstripandpassivation;advancedstripprocessor

ASRautomatedsendreceive

ATDFAdvancedToolDeve1opmentFacility

ATEautomatictestequipment

ATGautomatictestgeneration

ATLASabbreviatedtestlanguageforallsystems

atmatmosphere

ATPadvancedtechnologyprogram;adenosinetriphosphate;acceptanceandtoolperformance

ATRattenuatedtotalreflectance

Attattenuated

Augold

AVPadvancedverticalprocessor

AVSadvancedvisualizationsystem

AWEasymptoticwaveformevaluation

AWISPMabovewaferinsituparticlemonitoring

AWSadvancedwetstation

Bbi11ion;boron

Babarium

BARCbottomantireflectivecoating

BASEBostonAreaSemiconductorEducation(Council)

BAWbulkacousticwave

BCbiascontrast

BDEVbehavior-leveldeviation

BDSBrownianDynamicsSimulation

Beberyllium

BEOLbackendofline

BESOIbondedandetchbacksilicononinsulator

BFbrightfield

BFGSBroyden-Fletcher-Goldfarb-Shannooptimizationalgorithm

BFLbufferedfield-effecttransistorlogic

BGAballgridarray

BHTBrinellhardnesstest

Bibismuth

BiCMOSbipolarcomplementarymetal-oxidesemiconductor

BIFETbipolarfield-effecttransistor

BIMbinaryintensitymask

BiMOSbipolarmetal-oxidesemiconductor

BISTbuilt-inself-test

BITbulkiontemperature

BITEbuilt-intestequipment

BMCbubb1ememorycontrol1er

BMDbulkmicrodefect

BOEbufferedoxideetchant

BORbottomofrange

BOSSBookofSEMIStandards;binaryobjectstoragesystem

BOXburiedoxide

BPRbeamprofi1ereflectometry;businessprocessreengineering

BPSGboronphosphosilicateglass

BPTEOSBPSGfromaTEOSsource

Brbromine

BSEbackseatteredelectrondetection

BTABbumpedtapeautomatedbonding

BVbreakdownvoltage

Ccarbon

Cacalcium

CACIMarchitecture

CAACIMapplicationsarchitecture

CABCompetitiveAnalysisBenchmarking

CADcomputer-aideddesign

CADTcontrolapplicationdevelopmenttool

CAEcomputer-aidedengineering

CAIcomputer-assistedinstruction

CAMcomputer-aidedmanufacturing

CAPScomputer-assistedproblemsolving

CARchemicallyamplifiedresist

CARRIComputerizedAssessmentofRelativeRiskimpacts

CASEcomputer-aidedsoftwareengineering;computer-aidedsystemsengineering

CATcomputer-aidedtesting

CAWConstruct!onAnalysisWorkgroup

CAWCcryogenicaerosolwafercleaning

CBGAceramicbalIgridarray

CBSchemicalbottlestoragearea

CBTcomputer-basedtraining

CCchipcarrier;clustercontroller

CCCceramicchipcarrier

CCDcharge-coupleddevice

CCSLcompatiblecurrent-sinkinglogic

CCWcounterclockwise

Cdcadmium

CDcriticaldimension

CD/OLcriticaldimensionoverlay

CDAcleandryair

CDEchemicaldownstreametch

CDEMCustomerDeliveryEnterpriseMode1

CDIcollector-diffusionisolation

CDMCommonDeviceMode1forSAB

CDOcontro11eddecomposition/oxidation

CDRchemicaldistributionroom

CDSchemicaldistributionsystem

Cecerium

CEcapillarye1ectrophoresis

CECcellevaluationchip

CEEcontrolexecutionenvironment

CEMcontinuousemissionsmonitoring

CER-DIPceramicdualin-linepackage

CFAcomponentfailureanalysis

CFCchlorofluorocarbon

CFDcomputationalfluiddynamics

CFMcontamination-freemanufacturing

CICcleanroominterfacechamber

CIDcharge-injectiondevice

CIEcomputer-integratedengineering

CIMcomputer-integratedmanufacturing

CIM-OSAcomputer-integratedmanufacturing-opensystemsarchitecture(ESPRITprogram)

CIPContinuousImprovementProgram

CISCenterforlntegratedSystems

CISCcomplexinstructionsetcomputer

Clchlorine

CLCCceramicleadedchipcarrier

CLICclosed-loopintensitycontrol

CMconfigurationmanagement;cassettemodule

CMCcassettemodulecontroller

CMLcurrentmodelogic

CMMcapabilitymaturitymodel

CMOScomplementarymetal-oxidesemiconductor

CMPchemicalmechanicalplanarization

CMRcommon-moderejectionratio;cancelmoverequest

CNCcomputernumericalcontrol;condensationnucleuscounter

CNTcarbonnanotube

Cocobalt

COBchip-on-board

COCcostofconsumables

CODECcoder-decoder

COEDcomputer-optimizedexperimentaldesign

COGScostofgoodssold

CoOcostofownership

CORBAcommonobjectrequestbrokerarchitecture

COREcompositeobjectreference

COSScommonobjectservicesspecification

COTcustomer-ownedtooling

CoVcoefficientofvariance

Cpprocesscapability

CPDconcurrentproductdevelopment

CPECommunications

CPGAceramicpingridarray

Cpkprocesscapabilityindex

CQFPceramicquadflatpack

CQNclosed-queuingnetwork

Crchromium

CRCcyclicredundancycheck

CRMCost/ResourceModel

Cscesium

CSACIMsystemsarchitecture

CSEcontrolsystemsengineering

CSFcriticalsuccessfactor

CSLcurrent-steeringlogic

CSMA/CDcarrier-sense

CSPchip-sealepackage

CSPEDconcurrentsemiconductorproductionandequipmentdevelopment

CSTCIMsystemstechnology

CSTRcontinuouslystirredtankreactor

CSVcomma-separatedvariable

CTCclustertoolcontroller

CTEcoefficientofthermalexpansion

CTIeyeletimeimprovement

CTMCclustertoolmodularcommunications

Cucopper

CUBcentralutilitybuilding

CUBEScapacityutilizationbottleneckefficiencysystem

CUIcommonuserinterface

CUSUMcumulativesum

CVcapacitance-to-voltage

CVCMcollectedvolatilecondensablematerials

CVDchemicalvapordeposition

CWcontinuouswave

CzCzochralskiprocess

D/Adigitaltoanalog

D/Bdiebonding

DACdigital—to—analogconverter

DASdirectabsorptionspectroscopy

DASSLdifferentialalgebraicsystemsolver

DBMSdatabasemanagementsystem

DCdirectcurrent

DCAdirectchipattachment

DCATSdouble-containedacidtransfersystem

DCEdistributedcomputerenvironment

DCLdigitalcommandlanguage;displaycommunicationlog

DCSdichlorosilane

DDLdevicedescriptionlanguage

DDMSdefeetdatamanagementsystem

DEDSdiscrete-eventdynamicsimulation

DESdataencryptionstandard;displayequipmentstatus

DFdarkfield

DFCdensifiedfluidclean

DFEdual-frequencyetch

DFMdesignformanufacturing

DFRdesignforreliability

DFTdesignfortest

DFYdesignforyield

DHFdilutehydrofluoricacid

DIdeionized;dielectricisolation

DIBLdrain-inducedbarrierleakage

DICdifferentialinterferencecontrast

DILdualin-line

DIPdualin-linepackage

DLBIdevice—levelburn—in

DLOCdevelopedsourcelinesofcode

DLSdisplaylotstatus

DLTdevice-leveltest

DLTSdeep-leveltransientspectroscopy

DMAdirectmemoryaccess;dynamicmechanicalanalysis

DMHdisplaymessagehelps

DMLdatamanipulationlanguage;displaymessagelog

DMMdigitalmultimeter

DMOSdiffusedmetal-oxidesemiconductor

DMRdisplaymoverequests

DOdynamicoptimization

DOAdead-onalignment

DOASdifferentialopticalabsorptionspectroscopy

DOEdesignofexperiments

DOFdepthoffocus

DOPdioctylphthalate

DPAdestructivephysicalanalysis

DPMdigitalpanelmeter

DPPdischarge-producedplasma

DPSRAMdual-portstaticrandomaccessmemory

DRAMdynamicrandomaccessmemory

DRAPACDesignRuleandProcessArchitectureCounci1

DRCdesignrulecheck

DREdestructionremovalefficiency

DRIFTSdiffusereflectanceinfraredFouriertransformspectroscopy

DRTdefectreviewtool

DSAdisplaysystemactivity;dimensionallystableanode

DSCdifferentialscanningcalorimetry

DSMCdirectsimulationMonteCarlo

DSQdownstreamquartz

DSSdisplaystockerstatus

DSWdirectstep-on-wafer

DTdynamictest

DTAdifferentialthermalanalysis

DTCdirectthermocouplecontrol

DTLdiodetransistorlogic

DTMdefecttestmonitor;delaytimemultiplier;devicetestmodule;digitalterrainmap

DTMPNdefecttestmonitorphasenumber

DUTdeviceundertest

DUVdeepultraviolet

DVdesignverification

DVERdesignruleverification

DVMdigitalvoltmeter

DVSdisplayvehiclestatus

DWGdomainworkgroup

EAPSMembeddedattenuatedphase-shiftmask

EAROMelectricallyalterableread-onlymemory

EASEequipmentandsoftwareemulator

e-beamelectronbeam

EBHTe1ectron-beamhigh-throughput1ithography

EBICelectronbeam-inducedcurrent

EBRedgebeadremoval

ECengineeringchange;equipmentcontroller

ECAengineeringcapabilityassessment

ECADelectroniccomputer-aideddesign;engineeringcomputer-aideddesign

ECAEelectroniccomputer-aidedengineering

ECLemittercoupledlogic

ECNengineeringchangenotice

ECOengineeringchangeorder

ECQBelectrochemicalquartzcrystalbalance

ECRelectroncyclotronresonance

EDAelectronicdesignautomation

EDSenergy-dispersivespectroscopy

EDUequipment-dependentuptime

EDXenergy-dispersiveX-ray

EDXAenergy-dispersiveX-rayanalysis

EEDFelectronenergydistributionfunction

EELSelectronenergy-lossspectroscopy

EEPROMelectricallyerasableprogrammableread-onlymemory

EFEMequipmentfront-endmodule

EFOCSevanescentfiber-opticchemicalsensor

EFTIRemissionFouriertransforminfraredspectroscopy

EFVexcessflowvalve

EGEethyleneglycolethers

EHSextremelyhazardoussubstance

EIequipmentintegralion

EIDEquipmentInterfaceDevelopment

EIPEquipmentImprovementProgram;EquipmentImprovementProject

EISelectrochemicalimpedancespectroscopy

EKFextendedKalmanfiIter

ELFextremelylowfrequency

EMenterprisemodel;electromagnetic;e1ectromigration

EMAequipmentmaturityassessment

EMCelectromagneticcapability;electromagneticcompatability

EMFelectromagneticfield

EMGelectromigration

EMIelectromagneticinterference

EMMAe1ectronmicroscopyandmicroanalysis

EMPelectromagneticpulse

EMRentermoverequest

EMUelectromagneticunit

EOSelectricaloverstress

EOTendoftransfer;equivalentoxidethickness

EPextremepressure;electropolish

EPLelectronprojectionlithography

EPRelectronparamagneticresonance

EPROMelectricallyprogrammab1eread-onlymemory

EPSSelectronicperformancesupportsystem

EPTequipmentperformancetracking

EQUIPC/Iequipmentcontrolandintegration

EQUIPRTCequipmentreal-timecontrol

ERAMequipmentreliability

ERMenterprisereferencemodel

ERNexternalrecurrentneuralnetwork

ERPextendedrangepyrometer

ERSeventreportingstandard

ERTemergencyresponsetime

ESengineeringspecification;expertsystem

ESCelectrostaticchuck

ESCAelectronspectroscopyforchemicalanalysis

ESDelectrostaticdischarge

ESHenvironment

ESMelectronicservicemanual

ETABExecutiveTechnicalAdvisoryBoard

ETQRExternalTotalQualityandReliability

EUVextremeultraviolet

eVelectronvolt

EWMAexponentiallyweightedmovingaverage

Ffluorine

F/Ifinalinspection

FAfailureanalysis

FABfastatombombardment

FAMOSfloating-gateavalanche-injectionmetal-oxidesemiconductor

FBGAfine-pitchbal1gridarray

FCflipchip

FCMfacilitiescostmodel

FCSfactorycontrolsystem

FDCfaultdetectionandclassification

FDEfrequencydomainexperiments

FDSOIfullydepletedsilicononinsulator

Feiron

FECfabricationevaluationchip

FEMfiniteelementmodel

FEOLfrontendofline

FESEMfieldemissionscanningelectronmicroscopy

FETfield-effecttransistor

FFTfastFouriertransform

FFUfilterfanunit

FIfilterabilityindex;factoryintegration

FIBfocusedionbeam

FIDflameionizationdetector

FIFOfirst-in

FIMSfront-openinginterfacemechanicalstandard

FLfuzzylogic

FLOPCfloatingpointoperationsneededpercycle

FLOTOXfloatinggatetunneloxide

FLRTfactorylayout/relayouttool

FMforeignmaterial

FMEAfailuremodeandeffectsanalysis

FMMCfactorymaterialmovementcomponent

FMVPFrameworkMemberValidationProject

FNNfeed-forwardneuralnetwork

FOCSfiber-opticchemicalsensor

FOSBfrontopeningshippingbox

FOUPfrontopeningunifiedpod

FOVfieldofview

FOXfieldoxide

FPflashpoint

FPDfocalplanedeviation;flatpan