Ansys熱分析實(shí)例多芯片組件加散熱器熱沉的冷卻分析0001

1、三.MCM溫度場(chǎng)穩(wěn)態(tài)分析多芯片組件加散熱器(熱沉)的冷卻分析圖1(a)、圖1(b)所示分別為大功率球柵陣列 MCM的截面圖和俯視圖， 五個(gè)芯片采用倒裝焊方式置于有機(jī)基板上， 為了增加模塊的散熱能力，在芯片背 面上加一熱擴(kuò)展面。表1所示為各材料的物理屬性。MvtmvJdJ rihfnzlHu. 口周圍的環(huán)境溫度設(shè)為250 °C,其中大芯片的功率為25W，熱流密度為60X106W/m3;周圍四個(gè)小芯片的功率為10W,熱流密度為61.54 X06W/m3;對(duì)流換熱系數(shù)為10W/(mK)。MCM結(jié)構(gòu)參數(shù)和材料屬性模型組件材料尺寸(mm)導(dǎo)熱系數(shù)(W/(m k)-H- LJL 心片硅8*8*0

2、.65,5*5*0.6582芯片凸點(diǎn)5Sn/98Pb10*10*,6*6, ?0.3,Height:0.2,Pitch:0.7536基板聚酰亞胺40*40*1.50.2焊料球96.5S n3.5Ag26*26, ?0.6, Height:0.4,Pitch:1.2750PCBFR4100*100*1.58.37,8.37,0.32熱介質(zhì)材料導(dǎo)熱脂Thick:0.151粘接劑粘接劑Thick:0.151.1熱擴(kuò)展面銅40*40*1.5390熱沉鋁Base:46.5*45.6*1.5,Pin nu mber:16,Pin240height:8分析從而導(dǎo)致器件性能變化和可靠性的下降。熱場(chǎng)分析和設(shè)計(jì)是

3、MCM設(shè)計(jì)中一個(gè)重要的環(huán)節(jié)。MCM器件中的熱應(yīng)力來(lái)自兩個(gè)方面，即來(lái)自 MCM模塊內(nèi)部和MCM模塊 所處的外部環(huán)境所形成的熱應(yīng)力，這些熱應(yīng)力都會(huì)影響到器件的電性能、 工作頻 率、機(jī)械強(qiáng)度和可靠性。隨著 MCM集成度的提高和體積的縮小，尤其是對(duì)于集 成了大功率芯片的MCM ,其內(nèi)部具有多個(gè)熱源，熱源之間的熱耦合作用較強(qiáng)， 單位體積內(nèi)的功耗很大，由此帶來(lái)的芯片熱失效和熱退化現(xiàn)象突出。有資料表明, 器件的工作溫度每升高10°C,其失效率增加1倍。因此,準(zhǔn)確模擬大功率MCM 模塊的三維溫度場(chǎng)分布，并分析掌握其熱特性，有利于指導(dǎo)MCM熱設(shè)計(jì)方案的選擇，對(duì)提高大功率 MCM的可靠性具有重要意義。本

4、文針對(duì)某球柵陣列封 裝的大功率MCM，提出了一種簡(jiǎn)化的熱學(xué)模型，并利用有限元方法 ，借助有限 元通用程序ANSYS，對(duì)其進(jìn)行三維溫度場(chǎng)的穩(wěn)態(tài)模擬和分析。方案步驟如下:1、建模MC幾何模型圖MCM網(wǎng)格劃分圖2、施加載荷計(jì)算a、初始溫度及對(duì)流系數(shù)（施加于模型外表面，即與空氣接觸的部位）POINTSTYPE NUMCOMVHCOE10ANDEC 2 200919:48:11DEC 2 200919:50:46POINTSTYPE NUMCOW-H 匚 DE10b、分析處理（溫度云圖）結(jié)果如下:NODAL SOLUTIONANSTEP=1TIME “DEC S 2009TTMP (A¥G)2

5、973752 64575 553死.46112 1.3 6964.099B7.007109-91S132 B2 3AN3、后處理:HODAL SOLUTIOMDEC 6 200952,64564.0997£55398.461S7.007121 蓉 69109B9IS132.623熱沉的芯片內(nèi)部溫度分布云圖Z9.73752,52375.30990*095120.8011.1363.91686.702109-498132+274芯片凸點(diǎn)（5Sn/98Pb）溫度分布HODAL S0LUTIDMSTEP=1SUB -iTIME=1TEMP (AViRST3-0SHU =45.02SMX =1

6、31.554DEC 6 200922:09:06r*5匚它102.70912193993.094112.32464.25£?479131.SS4基板（聚酰亞胺）溫度分布云圖DEC 6 200922:13:21ose®e©eQee 0S03OQ0®«9©eEos03063e e©®®99 eeeQoeee ee93089«r 0 ®e83 s99®000 eseeeoe4*es0®aee0oQ9ea9eegseo0O69E9NODAL SOLUTIONSTEP-1SU

7、B =1TIME工丄TEMPRSYS=O(AVG)SHN 44.52457.66549.52752.86356.19B59.533焊料球(37Sn/63Pb)溫度分布云圖29.7373 6.27742.81649.35655.8963300739,54746,066S2.62659,166PCB(FR4)溫度分布云圖NODAL SOLUTION(AVG)DEC 6 2009 22:13:2811636116117558118.157118756116 659117 25 呂117 呂 57118 嗎 56119 CI55STEP = 1SUE： =1TIME=1TEMPRSYS=OSI

8、4;I =116.36SI£< =119 055熱擴(kuò)展面（銅）溫度分布云圖4簡(jiǎn)要分析從以上的分析結(jié)果可以得出：最高溫度出現(xiàn)在中間大芯片區(qū)域，MCM內(nèi)部有源功率芯片是熱源的主要貢獻(xiàn)者，芯片產(chǎn)生的熱量主要沿芯片背面 方向傳遞；加散熱裝置來(lái)對(duì)大功率MC進(jìn)行降溫是一種直接有效的方式；另外，在相同條件下，合理的結(jié)構(gòu)布局，如避免大功率器件過(guò)分集中不僅 能降低結(jié)點(diǎn)溫度最大值，而且能避免熱集中現(xiàn)象，提高M(jìn)C組件的可靠性。針對(duì)球柵陣列封裝的大功率MCM其內(nèi)部具有多個(gè)熱源、耦合作用強(qiáng)、內(nèi)部發(fā)熱 量大、溫度高的特點(diǎn)，建立其熱學(xué)模型，在 ANSYS平臺(tái)下對(duì)其進(jìn)行了穩(wěn)態(tài)模擬 分析；結(jié)果表明，增加外部散熱

9、裝置可以大大降低 MCM的溫度，是對(duì)其進(jìn)行降 溫最直接有效的一種方式；合理布局可以避免熱集中現(xiàn)象。5結(jié)論在MCM器件內(nèi)部，熱場(chǎng)對(duì)器件的性能和可靠性有嚴(yán)重的影響，熱場(chǎng)分析是 MCM設(shè)計(jì)中的重要環(huán)節(jié)。利用 ANSYS軟件對(duì)一球柵陣列的MCM進(jìn)行了模擬分 析，結(jié)果表明：1）多芯片組件中，大功率芯片為模塊中熱源的主要貢獻(xiàn)者，芯片內(nèi)最高溫度點(diǎn) 位于中間大芯片區(qū)域。2）MCM幾種降低溫度的方法：加外部散熱裝置是一種直接有效的對(duì) MCM進(jìn)行降溫方式（有散熱裝置的最高溫度是132.823 °C,沒有散熱的布局溫度大概達(dá) 350°C）;在相同條件下，合理的結(jié)構(gòu)布局，能降低結(jié)點(diǎn)溫度最大值，提高

10、MCM組件的可靠性 參考文獻(xiàn)：1 楊邦朝，張經(jīng)國(guó)多芯片組件技術(shù)及其應(yīng)用 電子科技大學(xué)出版社 M 2001：40 422 李川.MCM的熱分析及復(fù)合SnPb焊點(diǎn)的應(yīng)力應(yīng)變分析D.電子科技大學(xué).四 川：成都， 20053 陳云，徐晨.有限元分析軟件ANSYS在多芯片組件熱分析中的應(yīng)用J 電子 工程師 2007(2)；4 張洪信 主編 有限元基礎(chǔ)理論與 ANSYS 應(yīng)用機(jī)械工業(yè)出版社， 2006.2 (2007.1重印)：5 徐步陸電子封裝可靠性研究 D 中國(guó)科學(xué)院上海微系統(tǒng)與信息技術(shù)研究所， 博士學(xué)位論文 2002命令代碼/BATCH02,-0.0006,VGEN,5,P51XDE,2/SOL/i

11、n put,me nu st,tFLST,3,2,6,OR,0.00075,FITEM,3,219FINISHmp'' h* JJJJJJJJJJJJJJJJJDE,20FITEM,3,-224/PREP71FITEM,3,8FLST,3,5,6,ORVGEN,3,P51XFLST,2,9,6,ORWPSTYLE,FITEM,3,-9DE,2,0.00075,DE,2,0VSBV,FITEM,3,1760FITEM,2,242/PREP77,P51XFITEM,3,-180BLOCK,0.017,FITEM,2,-250BLOCK,0,0.05NUMCMP,VOVGEN,5,P

12、51X0.02,0,0.017,-0VADD,P51X,0,0.05,0,0.001LU,0.00075,.0001,0.00005,VSEL,S, LOC,5,FLST,3,1,6,OR0BLOCK,0,0.02Z,0.0034,0.004BLOCK,0,0.02DE,1FLST,3,1,6,OR,0.017,0.02,-0.25,0,0.02,0.0019,FITEM,3,7DE,10001,0.00005,VSEL,U,0.0034,VGEN,13,P51FITEM,3,179wpoff,0,0,0.005BLOCK,0,0.02X, , ,0.00127,VGEN,2,P51X075F

13、LST,2,2,6,OR,0,0.02,0.00355,0,0.00875,BLOCK,0,0.00DE,2,0.00505,FLST,3,13,6,O04,0,0.004,0,0.0FITEM,2,195BLOCK,0,0.01RDE,2FLST,3,1,6,OR0015,FITEM,2,2167,0,0.017,0.003FITEM,3,7DE,1BLOCK,0.008VDELE,P51X,55,0.0044,FITEM,3,-19FITEM,3,2015,0.0135,0,0.00,1VSBV,VGEN,13,P51VGEN,6,P51X25,0,0.00015,ALLSEL,ALL3,

14、4X, , , ,0.00127,0.00075,BLOCK,0,0.00FLST,2,240,6,BLOCK,0,0.00,0025,0.0085,0.01ORDE,74,0,0.004,0.003wpoff,0,0,0.00FLST,3,6,6,OR35,0,0.00015,FITEM,2,16,0.00425,18DE,2WPAVE,0,0,0FITEM,2,-194BLOCK,0,0.00SPH4,0.00027FITEM,3,201CSYS,0FITEM,2,19625,0.0085,0.015,0.000275,0.0FITEM,3,-206wpoff,0,0,0.00FITEM,

15、2,-21535,0.0036,0.000015VGEN,3,P51X505FITEM,2,217425,BLOCK,0,0.00,0.00075,BLOCK,0,0.02FITEM,2,-241BLOCK,0.0081,0,0.001,0.0000325,0,0.02325,FITEM,2,2515,0.0135,0,0.001,0.0006,FLST,3,1,6,OR0,0.0015,VGLUE,P51X25,0.0036,0.00BLOCK,0,0.00DE,1BLOCK,0.021ET,1,SOLID70425,1,0,0.001,-0.00FITEM,3,17975,0.02325,

16、0,0.MPTEMP,wpoff,0,0,0.0001,-0.0006,VGEN,2,P51X02325,0.0015,0MPTEMP,1,017FLST,3,2,6,OR,0.00875,.0085,MPDATA,KXSPH4,0.00063DE,20FLST,3,1,6,ORX,1,825,0.000635,0.0FITEM,3,177FLST,3,1,6,ORDE,1MPTEMP,003FITEM,3,178DE,1FITEM,3,243MPTEMP,1,0BLOCK,0,0.00VSBV,FITEM,3,219VGEN,8,P51XMPDATA,KX1,0,0.001,0.000176

17、,P51XVGEN,6,P51X,-0.003, , , ,0X,2,362,0.0006,FLST,3,1,6,OR,0.00075,VSEL,S, LOC,MPTEMP,BLOCK,0,0.00DE,10Z,0.00505,0.02MPTEMP,1,01,0,0.001,-0.00FITEM,3,179FLST,3,6,6,ORFINISHMPDATA,KXX,3,0.25,1,VSEL,S ,L OC,CMSEL,S,_YFITEM,5,242MPTEMP,0Z,0.0034,0.003CMDELE,_YFITEM,5,-243MPTEMP,1,0CMSEL,S,_Y6CMDELE,_Y

18、1CM,_Y,VOLUMPDATA,KXCMDELE,_YFLST,5,2,6,ORVSEL,S, LOC,VSEL, , , ,P51X,4,50CMDELE,_Y1DE,2Z,0.0036,0.004XMPTEMP,VSEL,S, LOC,FITEM,5,19525CM,_Y1,VOLMPTEMP,1,0Z,0.0015,0.001FITEM,5,244FLST,5,3,6,ORUMPDATA,KX9CM,_Y ,VOLUDE,2CMSEL,S,_YX,5,8.37FLST,5,169,6,VSEL, , , ,P51FITEM,5,246CMSEL,S,_Y1MPDATA,KYORDE,

19、2XFITEM,5,-248VATT,Y,5,8.37FITEM,5,7CM,_Y1,VOLCM,_Y,VOLU6, , 1,MPDATA,KZZFITEM,5,-175UVSEL, , , ,P510,5,0.32CM,_Y,VOLUCMSEL,S,_YXCMSEL,S,_YMPTEMP,VSEL, , , ,P51CMSEL,S,_Y1CM,_Y1,VOLCMDELE,_YMPTEMP,1,0XVATT,UCMDELE,_Y1MPDATA,KXCM,_Y1,VOL7,1,CMSEL,S,_YVSEL,S, LOC,X,6,1U0CMSEL,S,_Y1Z,0.00505,0.02MPTEMP

20、,CMSEL,S,_YCMSEL,S,_YVATT,CM,_Y,VOLUMPTEMP,1,0CMSEL,S,_Y1CMDELE,_Y1, , 1,VSEL,MPDATA,KXVATT,CMDELE,_Y10249X,7,1.14,1,FLST,5,2,6,ORCMSEL,S,_YCM,_Y1,VOLMPTEMP,0DE,2CMDELE,_YUMPTEMP,1,0CMSEL,S,_YFITEM,5,195CMDELE,_Y1CMSEL,S,_YMPDE,KXX,6CMDELE,_YFITEM,5,244VSEL,S, LOC,CMSEL,S,_Y1MPDATA,KXCMDELE,_Y1VSEL,

21、U, , ,P51Z,0.00425,0.00VATT,X,6,1VSEL,S, LOC,X5059,1,MPTEMP,Z,0.0019,0.003FLST,5,59,6,OCM,_Y,VOLU0MPTEMP,1,04RDE,6VSEL,CMSEL,S,_YMPDATA,KXCM,_Y,VOLUFITEM,5,176245CMDELE,_YX,8,390VSEL,FITEM,5,-194CM,_Y1,VOLCMDELE,_Y1MPTEMP,252FITEM,5,196UVSEL,S, LOC,MPTEMP,1,0CM,_Y1,VOLFITEM,5,-215CMSEL,S,_YZ,0.0036,

22、0.004MPDATA,KXUFITEM,5,217CMSEL,S,_Y125X,9,240CMSEL,S,_YFITEM,5,-236VATT,SMRT,6VSEL,S, LOC,CMSEL,S,_Y1CM,_Y ,VOLU8, , 1,SMRT,7Z,0,0.0015VATT,VSEL, , , ,P510MSHAPE,1,3DCM,_Y,VOLU3,1,XCMSEL,S,_YMSHKEY,0VSEL,0CM,_Y1,VOLCMDELE,_YFLST,5,3,6,OR250CMSEL,S,_YUCMDELE,_Y1DE,2CM,_Y1,VOLCMDELE,_YCMSEL,S,_YVSEL,

23、U,FITEM,5,246UCMDELE,_Y1CMSEL,S,_Y1245FITEM,5,-248CMSEL,S,_YVSEL,S, LOC,VATT,FLST,5,3,6,ORCM,_Y,VOLUCMSEL,S,_Y1Z,0.0034,0.0042, , 1,DE,3VSEL, , , ,P51VATT,250FITEM,5,216XCM,_Y1,V0LUCM,_Y ,VOLUCM,_Y,VOLUFITEM,5,30UCHKMSH,'VOVSEL,VSEL, , , ,P51FITEM,5,32CHKMSH,'VOLU'245XFITEM,5,36LU'CM

24、SEL,S,_YCM,_Y1,VOLCM,_Y1,VOLFITEM,5,38CMSEL,S,_YVMESH,_Y1UUFITEM,5,719VMESH,_Y1CMDELE,_YCHKMSH,'VOCHKMSH,'VOFITEM,5,723CMDELE,_YCMDELE,_Y1LU'LU'FITEM,5,727CMDELE,_Y1CMDELE,_Y2CMSEL,S,_YCMSEL,S,_YFITEM,5,730CMDELE,_Y2VSEL,S, LOC,VMESH,_Y1VMESH,_Y1FITEM,5,735VSEL,S, LOC,Z,0,0.0015CMDEL

25、E,_YCMDELE,_YFITEM,5,739乙 0.0034,0.003CM,_Y,VOLUCMDELE,_Y1CMDELE,_Y1FITEM,5,74355VSEL,CMDELE,_Y2CMDELE,_Y2FITEM,5,747SMRT,8250VSEL,S ,L OC,VSEL,S, LOC,FITEM,5,751CM,_Y,VOLUCM,_Y1,VOLZ,0.00505,0.02Z,0.0015,0.001FITEM,5,755VSEL,UCM,_Y ,VOLU9FITEM,5,759244CHKMSH,'VOVSEL,SMRT,7FITEM,5,763CM,_Y1,VOLL

26、U'249FLST,5,169,6,FITEM,5,767UCMSEL,S,_YCM,_Y1,VOLORDE,2FITEM,5,771CHKMSH,'VOVMESH,_Y1UFITEM,5,7FITEM,5,775LU'CMDELE,_YCHKMSH,'VOFITEM,5,-175FITEM,5,779CMSEL,S,_YCMDELE,_Y1LU'CM,_Y,VOLUFITEM,5,783VMESH,_Y1CMDELE,_Y2CMSEL,S,_YVSEL, , , ,P51FITEM,5,787CMDELE,_YVSEL,S, LOC,VMESH,_Y1

27、XFITEM,5,791CMDELE,_Y1Z,0.00425,0.00CMDELE,_YCM,_Y1,VOLFITEM,5,799CMDELE,_Y244CMDELE,_Y1UFITEM,5,803CM,_Y,VOLUSMRT,7CMDELE,_Y2CHKMSH,'VOFITEM,5,807VSEL,FLST,5,3,6,ORVSEL,S ,L OC,LU'FITEM,5,811195DE,3Z,0.0034,0.003CMSEL,S,_YFITEM,5,815CM,_Y1,VOLFITEM,5,2166VMESH,_Y1FITEM,5,819UFITEM,5,242FLST

28、,5,2,6,ORCMDELE,_YFITEM,5,823CHKMSH,'VOFITEM,5,-243DE,2CMDELE,_Y1FITEM,5,827LU'CM,_Y,VOLUFITEM,5,195CMDELE,_Y2FITEM,5,831CMSEL,S,_YVSEL, , , ,P51FITEM,5,244ALLSEL,ALLFITEM,5,835VMESH,_Y1XVSEL,U, , ,P51VSEL,S, LOC,FITEM,5,839CMDELE,_YCM,_Y1,VOLXZ,0.0035,FITEM,5,843CMDELE,_Y1USMRT,60.00425FITE

29、M,5,847CMDELE,_Y2CHKMSH,'VOFLST,5,59,6,OVSEL,S, LOC,FITEM,5,851VSEL,S, LOC,LU'RDE,6Z,0.0036,0.004FITEM,5,855Z, 0.0019,0.003CMSEL,S,_YFITEM,5,17625FITEM,5,8594VMESH,_Y1FITEM,5,-194ASEL,S,EXTFITEM,5,863CM,_Y,VOLUCMDELE,_YFITEM,5,196FLST,5,65,5,OFITEM,5,867VSEL,CMDELE,_Y1FITEM,5,-215RDE,65FITEM

30、,5,871252CMDELE,_Y2FITEM,5,217FITEM,5,17FITEM,5,875CM,_Y1,VOLSMRT,8FITEM,5,-236FITEM,5,21FITEM,5,883FITEM,5,887ONV,250,250FITEM,2,-103FITEM,2,1072FITEM,5,92FITEM,5,891VSEL,S, LOC,1/GOFITEM,5,96FITEM,5,895Z,0.00505,0.02FITEM,2,1033SFA,P51X,1,CFITEM,5,100FITEM,5,899ALLSEL,ALLFITEM,2,-103ONV,10,25FITEM

31、,5,104FITEM,5,903VSEL,S, LOC,7VSEL,S, LOC,FITEM,5,108FITEM,5,907Z,0.00505,0.02FITEM,2,1039Z,0,0.0015FITEM,5,112FITEM,5,911ASEL,S,EXTFITEM,2,-105ALLSEL,ALLFITEM,5,116FITEM,5,915FLST,5,2,5,OR5VSEL,S, LOC,FITEM,5,120FITEM,5,919DE,2/GOZ,0,0.0015FITEM,5,124FITEM,5,923FITEM,5,1045SFA,P51X,1,CASEL,S,EXTFIT

32、EM,5,128FITEM,5,927FITEM,5,1069ONV,10,25FLST,5,2,5,ORFITEM,5,132FITEM,5,931ASEL,U, , ,P51ALLSEL,ALLDE,2FITEM,5,136FITEM,5,935XVSEL,S ,L OC,FITEM,5,3FITEM,5,140FITEM,5,939ALLSEL,ALLZ,0.0019,0.003FITEM,5,5FITEM,5,144FITEM,5,943VSEL,S, LOC,4ASEL,U, , ,P51FITEM,5,148FITEM,5,947Z,0.00505,0.02ASEL,S,EXTXF

33、ITEM,5,152FITEM,5,951ASEL,S,EXTWPSTYLE,ALLSEL,ALLFITEM,5,156FITEM,5,955FLST,5,3,5,OR,1VSEL,S, LOC,FITEM,5,160FITEM,5,959DE,3FLST,5,3,5,ORZ,/0.0015FITEM,5,164ASEL,U, , ,P51FITEM,5,14DE,3VSEL,S, LOC,FITEM,5,168XFITEM,5,1067FITEM,5,1071Z,0,0.0015FITEM,5,172/SOLUFITEM,5,1069FITEM,5,1073ASEL,S,EXTFITEM,5

34、,176FLST,2,4,5,ORASEL,U, , ,P51FITEM,5,1075FLST,5,2,5,ORFITEM,5,180DE,4XASEL,R, , ,P51DE,2FITEM,5,184FITEM,2,15ASEL,U,XFITEM,5,3FITEM,5,188FITEM,2,191068FLST,2,1,5,ORFITEM,5,5FITEM,5,192FITEM,2,23FLST,2,50,5,ODE,1ASEL,U, , ,P51FITEM,5,196FITEM,2,1066RDE,17FITEM,2,1075XFITEM,5,200/GOFITEM,2,995/GO/SO

35、LUFITEM,5,204SFA,P51X,1,CFITEM,2,997SFA,P51X,1,CFLST,5,169,5,FITEM,5,208ONV,240,240FITEM,2,1000ONV,10,25ORDE,169FITEM,5,212FLST,2,8,5,ORFITEM,2,1003VSEL,S ,L OC,FITEM,5,40FITEM,5,216DE,8FITEM,2,-100Z,0.0019,0.003FITEM,5,44FITEM,5,220FITEM,2,2974FITEM,5,48FITEM,5,224FITEM,2,31FITEM,2,1009ASEL,S,EXTFI

36、TEM,5,52FITEM,5,228FITEM,2,33FITEM,2,-101FLST,5,2,5,ORFITEM,5,55FITEM,5,232FITEM,2,353DE,2FITEM,5,60FITEM,5,236FITEM,2,37FITEM,2,1015FITEM,5,10FITEM,5,64FITEM,5,240FITEM,2,39FITEM,2,-101FITEM,5,1072FITEM,5,68FITEM,5,244FITEM,2,10649ASEL,R, , ,P51FITEM,5,72FITEM,5,248FITEM,2,-106FITEM,2,1021XFITEM,5,

37、76FITEM,5,2525FITEM,2,-102FLST,2,2,5,ORFITEM,5,80FITEM,5,256/GO5DE,2FITEM,5,84FITEM,5,260SFA,P51X,1,CFITEM,2,1027FITEM,2,10FITEM,5,88FITEM,5,264FITEM,5,268FITEM,5,376FITEM,5,484FITEM,5,592FITEM,5,700FITEM,5,272FITEM,5,380FITEM,5,488FITEM,5,596FITEM,5,704FITEM,5,276FITEM,5,384FITEM,5,492FITEM,5,600FIT