SZT-2C 四探針測試儀使用說明書

1、SZT-2c四探針測試儀 使用說明書 一概述SZT-2C型數(shù)字式四探針測試儀是運用四線法測量原理的多用途 綜合測量裝置，配上專用的四探針測試架，即可以測量片狀，塊狀或 柱狀半導體材料的徑向和軸向電阻率， 測量擴散層的薄層電阻（亦稱 方塊電阻）。四探針測試架有電動，手動，手持三種可以選配，另外 還配有四個夾子的四線輸入插頭用來作為測量線狀或片狀電阻的 中，低阻阻值。儀器由主機，測試架等部份組成，測試結果由液晶顯示器顯示， 同時，液晶顯示器還顯示測量類型（電阻率，方塊電阻和電阻）；探頭修正系數(shù)和溫度值，用來監(jiān)測儀器使用時的環(huán)境溫度。主機由開關電源，DC/D廢換器，高靈敏度電壓測量部份，高穩(wěn) 定度恒

2、流源，和微電腦控制系統(tǒng)組成。由於采用大規(guī)模集成電路，所 以儀器可靠性高，測量穩(wěn)定性好。測試探頭采用寶石導向軸套和高硬度鋼針， 定位準確，游移率小， 使用壽命長。儀器適用於半導體材料廠，半導體器件廠，科研單位，高等院校對半 導體材料電阻性能的測試。本儀器工作條件為：使用溫度： 23c ±3C相對濕度:50%70%工作室內(nèi)應無強磁場干擾，不與高頻設備共用電源，二，技術參數(shù)1,測量范圍電阻率：10 7-106?-cm方塊電阻10 ? 10 6?/電阻 10-? - 10 6 ?2 ,可測半導體材尺寸直徑： 5-250mm長(或高)度：w 400mm如配探筆可以測量任意長度)3,測量方位軸向

3、，徑向均可4, 數(shù)字電壓表：(1)量程：20mV,200mV,2V(2)誤差：士 0.1%讀數(shù)士 2字(3)輸入阻抗:>10?(4)最大分辨率：10pV(5)點陣液晶顯示，過載顯示。5,恒流源：(1)電流輸出：共分 10p A,100uA,1mA,10mA,100m縱擋可 通過按鍵選擇，各擋均為定值不可調(diào)節(jié)，電阻率探頭修正系和擴散層方塊電阻修正系數(shù)均由機內(nèi)CPU運算后，直接顯示修正后的結果。(2)誤 差：±0.5%士 2字，在使用1p A恒流電流輸出時為士 0.5%士 5字6,四探針測試頭；(1) 探針間距： 1mm(2) 探針機械游移率：±1.0%(3) 探針材料：

4、 碳化鴇，0.5mm(4) 0-2Kg 可調(diào)，最大壓力約2Kg7 ,溫度傳感器；本儀器增加了高精度的溫度傳感器，以監(jiān)測儀器使用時的環(huán)境 溫度。溫度測量的范圍；+99C -55 C溫度測量的精度；士 0.5 C8,電 源：交流 220V ±10%功耗 <35W本儀器可以選配電動測試架，手動測試架，手持探險頭或四夾子電阻 測量輸入線。1,電動測試架；電動測試架是用步進電機驅(qū)動測試頭升降，只要將被測工件放在測試 平臺中心位置，按一次啟動按鈕，測試頭自動下降，直到針頭和被測 工件接觸，探頭將自動以慢速下降一段距離壓緊探針使針與工件接觸良好并等待測量，稍候測量結束，探頭上行并恢復到原來位

5、置。所以 電動測試架的操作簡便，探針對被測工件所施壓力恒定，測量結果穩(wěn) 定，建議優(yōu)先選配。2,手動測試架以其結構簡單不用電源見長，只要操作熟練，測量精度和穩(wěn)定性也很 好。3,手持式四探針測試頭，使用靈活可以對任意形狀的半導體材料進 行測試，而且脫離了測試架尺寸的限止，可以對大尺寸單晶硅柱的任 意部位進行單點或多點測試，但由於探針對被測材料的壓力是由手感 控制的，因此，測量時必須將探頭持穩(wěn)壓緊，保證探針和被測工件接 觸良好。4帶夾四線測試頭，是必配件，可以用四線法測量低阻值電阻。三，工作原理；1, 測試原理；直流四探針法測試原理簡介如下；(1)電阻率測量；(圖一)：當1, 2, 3, 4四根金屬

6、針排成一直線時體材料上時，在 1, 4兩根探針間通過電流I ,則在2, 3探針間產(chǎn)生電位差V,材料電阻率p =CV ( ?-cm)(3-1)式中C為探針修正系數(shù)，由探針的間距決定。當試樣電阻率分布均勻，試樣尺寸滿足半無窮大條件時2C= 111 (cm)Si S2 S1 S2 S2 S3(3-2)式中：S, S2 4 分別為探針對1與2, 2與3, 3與4之間的距離，探頭系數(shù)由制造廠對探針間距進行測定后確定，并提供給用戶。每個探頭都有自已的系數(shù)。C=6.28 ±0.05,單位為 cm(a)塊狀或棒狀樣品體電阻率測量：由於塊狀或棒狀樣品外形尺寸遠大於探針間距，符合半無窮大的邊界條件，電阻

7、率值可直接由(3-1)式求出。(b)薄片電阻率測量：薄片樣品因為其厚度與探針間距相近，不符合半遠窮大邊界條件, 測量時要附加樣品的厚度，形狀和測量位置的修正系數(shù)。其電阻率值可由下面公式得出p =CV G (W ) D (d) =p 0 G (W-) D (d)(3-3)式中P o 為塊狀體電阻率測量值G (W)為樣品厚度修正系數(shù)，可由附錄1A或附錄1B查得SW樣品厚度(pm) ;S探針間距(mrjnD： (d)為樣品形狀與測量位置的修正函數(shù)可由附錄 S2查得。當園形硅片的厚度滿足 W<0.5條件時，電阻率為S_ W 1 d、p = p 0D (一)(3-4)S 2Ln2 S式中L n2為

8、2的自然對數(shù)。當忽略探針幾何修正系數(shù)時，即認為C=2兀S時,(3-5)VWdVWd、D(-) 4.53 D(-)ILn2SIS(?)擴散層的方塊電阻測量當半導體薄層尺寸滿足于半無窮大平面條件時R 而中 453T（3-6）SZT-2B型四探針測試儀電氣部分原理框圖：（圖二）恒流源液晶顯派控制單元隔離電漉開關電源測試架4 / 變換器儀器主體部分由單片計算機，液晶顯示器、鍵盤、高靈敏度，高輸入阻抗的方大器、雙積分式A/D變換器、恒流源、，開關電源， DC-DC變換隔離電源。電動，手動或手持式四探針測試架（頭） 等組成。三.使用方法本儀器適配三種測試架（電動，手動，手持測試頭），還可使用 帶有四個夾子

9、的，四線法電阻測試輸入插頭，這四種輸入插頭雖然外 形相同，使用同一個輸入插座，但使用方法略有不同，以下將分別于 以說明。1, 主機；A:面板：面板左側為液晶顯示器，顯示器的第一行顯示測量結果， 阻單位（K?, ?, m?）和測量方式的符號（“-cm”電阻率，“- 口”方塊電阻，“一”電阻）-在正常測量時第二行將以較小的字 號顯示和第一行相同的數(shù)值，只有在超程時第一行顯示四個橫杠（-）,第二行則顯示一個正在使用的測量方式可以顯示的最大 數(shù)值，例如電阻率測量可以顯示的最大值為1256,方塊電阻可以顯示的最大值為9060,而電阻測量則可以顯示的最大顯示值為 1999,（以上所示的值中小數(shù)點和單位均視

10、測量當時所設量程而 定，這里不作詳述）。指示燈下面為二行二列功能設置鍵，上面一行左邊那個為左移鍵，右邊那個為右移鍵，恒流源在開機時優(yōu)先設定為1mA,應該是左起第三個指示燈被點亮，恒流源輸出電流為 1mA第二列 為電壓量程設置鍵和測量方式設置鍵， 每組都只有一個鍵，采用 單鍵循環(huán)操作方式。最下面一個鍵為往復鍵，重復按鍵可以選擇 測量或保持二個狀態(tài)，（必須注意！當使用電動測試架時，只能 設定在測量狀態(tài)）。2, 電動測試架；電動測試架是一個完整的組件，由步進電機和驅(qū)動電路，活 動架，四探針測頭等組成，用九芯電纜和主機連接。3, 手動測試架手持測試頭，四端子電阻測試夾使用比較簡單，只要將七芯輸入插頭插

11、入輸入端，儀器就會連續(xù)測量，將探針和工件保持良好接觸，就可在顯示器上讀出測量結果C,操作步驟；儀器在第一次使用前必須首先檢查所使用的電源是否符合規(guī)定要求， 各種線纜是否連接妥當。接通電源并開機后，必須預熱30分鐘，并注意觀察儀器的溫度指值，是否符合要求，主機在接通電源后，測試架的探頭就會復位，上升到規(guī)定位置。同 時主機運行自檢程序，液晶顯示器顯示公司名稱，網(wǎng)址，聯(lián)系電話， 指示燈循環(huán)點亮一次，最后電流指燈停在 1mA位置上，電壓量程指 示燈停在2V位置，測量模式指示燈停在電阻率測量模式， 測量/保持 鍵則選在測量位置，液晶顯示器顯示單位為 K?-cm,（電阻率測量） 在液晶顯示器的下面顯示的二

12、行數(shù)字上面一行是現(xiàn)場溫度，下面一行 是修整系數(shù)，0.628是探頭的修正系數(shù)。這是儀器在開機后的優(yōu)先先 選擇。此時液晶顯示器的第一行還沒有顯示任何數(shù)值，因為現(xiàn)在測量還沒有開始，接下來可以將被測半導體材料放在測試架的園形絕緣板 的園心上，把探針保護套取下并保存好，按一下測試架上的啟動按鍵 （小紅鍵），隨即測試頭下降探針和被測工件接觸稍后顯示測量結果，測試頭上升。如果測量結果顯示“-”則為超 量程，可以減小恒流源的設置值，如果電壓量程置于最高，恒流電流 置于最小，仍顯示超量程則可能是被測工件電阻太大，已超出了本儀器的測量范圍，當測量的結果為0則可以增大恒流電流或減小電壓量程，調(diào)整電流或電壓量程，直至

13、測量結果可以顯示三位以上的讀數(shù)為 最好的量程組合。在選擇量程時必須注意的是，如已知被測工件是半 導體材料并且阻值大于10?時，建議不要使用10mA以上的恒流源， 原因是10mA以上的恒流源使用較低的工作電壓，而半導體材料表面 接觸電阻又較大，會使恒流源工作不正常。附錄: 測量時，預估的樣品阻值范圍應該選擇相對應的電流范圍， 關系如下表：電阻率范圍（Q cm）電流檔<0.012100mA0.080.610mA0.4601mA401200100uA>120010uA1uA附錄1A樣品厚度修正系數(shù)G （m）樣品厚度較薄： § =0.0011 見表5W:樣品厚度（m） : S:探

14、針間距（mm）W/SW01234567890.000.000.001.001.002.003.004.004.005.006.0060.0110.007.008.009.009.010.011.012.012.013.0140.0220.014.015.016.017.017.018.019.019.020.0210.0330.022.022.023.024.025.025.026.027.027.0280.0440.029.030.030.031.032.032.033.034.035.0350.0550.036.037.038.038.039.040.040.041.042.0430.06

15、60.043.044.045.045.046.047.048.048.049.0500.0770.051.051.052.053.053.054.055.056.056.0570.0880.058.058.059.060.061.061.062.063.063.0640.0990.065.066.066.067.068.069.069.070.071.0710.10100.072.073.074.074.075.076.077.077.078.0790.11110.079.080.081.082.082.083.084.084.085.0860.12120.087.087.088.089.08

16、9.090.091.092.092.0930.13130.094.095.095.096.097.097.098.099.100.1000.14140.101.102.102.103.104.105.105.106.107.1070.15150.108.109.110.110.111.112.113.113.114.1150.16160.115.116.117.118.118.119.120.120.121.1220.17170.123.123.124.125.126.126.127.128.128.1290.18180.130.131.131.132.133.133.134.135.136.

17、1360.19190.137.138.139.139.140.141.141.142.143.1440.20200.144.145.145.146.147.148.149.149.150.1510.21210.151.152.153.154.154.155.156.157.157.1580.22220.159.159.160.161.162.162.163.164.164.1650.23230.166.167.167.168.169.170.170.171.172.172W/SW01234567890.24240.173.174.175.175.176.177.177.178.197.1800

18、.25250.180.181.182.183.183.184.185.185.186.1870.26260.188.188.189.190.190.191.192.193.193.1940.27270.195.195.19.197.198.199.199.200.201.2010.282803202.203.203.204.205.205.206.207.208.2080.29290.209.210.211.211.212.213.214.214.215.2160.30300.216.217.218.219.219.220.221.221.222.2230.31310.224.224.225.

19、226.227.227.228.229.229.2300.32320.231.232.232.233.234.234.235.236.237.2370.33330.238.239.239.240.241.242.242.243.244.2450.34340.245.246.247.247.248.249.250.250.251.2520.35350.252.253.254.255.255.256.257.257.258.2590.36360.260.260.261.262.263.263.264.265.265.2660.37370.267.268.268.269.270.270.271.27

20、2.273.2730.38380.274.275.275.276.277.278.278.279.280.2810.39390.281.282.283.283.284.285.286.286.287.2890.40400.288.289.290.291.291.292.293.293.294.2950.41410.296.296.297.298.298.299.300.301.301.3020.42420.303.303.304.305.306.306.307.308.308.3090.43430.310.311.311.312.313.314.314.315.316.3160.44440.3

21、17.318.319.319.320.321.321.323.323.3240.45450.324.325.326.326.327.328.329.329.330.3310.46460.331.332.333.333.334.335.336.336.337.3380.47470.338.339.340.341.341.342.343.343.344.3450.48480.346.346.347.348.348.349.350.351.351.3520.49490.353.353.354.355.355.356.357.358.358.3590.50500.360.360.361.362.363

22、.363.364.365.3653.68W/SW01234567890.51510.367.368.368.369.370.370.371372372.3730.52520.374.375.375.376.377.377.378.379.379.3800.53530.381.382.382.383.384.384.385.386.386.3870.54540.388.389.389.390.391.391.392.393.393.3940.55550.395.396.396.397.398.398.399.400.400.401056560.402.402.403.404.405.405.40

23、6.407.407.4080.57570.409.409.410.411.411.412.413.414.414.4150.58580.416.416.417.418.418.419.420.420.421.4220.59590.422.423.424.425.425.426.427.427.428.4290.60600.429.430.431.431.432.433.433.434.435.4350.61610.436.437.437.438.439.439.440.441.442.4420.62620.443.444.444.445.446.446.447448.448.4490.6363

24、0.450.450.451.452.452.453.454454.455.4560.64640.456.457.458.458.459.460.460461.462.4620.65650.463.464.464.465.466.466.467468.468.4690.66660.470.470.471.472.472.473.474.474.475.4760.67670.476.477.477.478.479.479.480.481.481.4820.68680.483.483.484.485.485.486.487.488.488.4890.69690.489.490.491.491.492

25、.492.493.494.494.4950.70700.496.496.497.498.498.499.500.500.501.5010.71710.502.503.503.504.505.505.506.507.507.5080.72720.508.509.510.510.511.512.512.513.514.5140.73730.515.516.516.517.517.518.519.519.520.5200.74740.521.522.522.523.524524.525.525.526.5270.75750.527.528.529.529.530.530.531.532.532.53

26、30.76760.533.534.535.535.536.537.537.538.538.5390.77770.540.540.541.541.542.543.543.544.544.545W/SW01234567890.78780.546.546.547.547.548.549.549.550.550.5510.79790.552.552.553.553.554.555.555.556.556.5570.80800.558.558.559.559.560.561.561.562.562.5630.81810.564.564.565.565.565.567.567.568.568.5690.8

27、2820.569.570.571.571.572.573.573.573.574.5750.83830.575.576.576.577.577.579.579.579.580.5800.84840.581.581.582.583.583.584.584.585.585.5860.85850.587.587.588.588.589590.590.591.591.5920.86860.592.593.593.594.594.596.596.596.597.5970.87870.598.598.599.599.600.601.601.602.602.6030.88880.603.604.604.60

28、5.605.607.607.607.608.6080.89890.609.609.610.610.611.612.612.613.613.6140.90900.614.615.615.616.616.617.617.618.618.6190.91910.619.620.621.621.622.623.623.623.624.6240.92920.625.625.626.626.627.628.628.628.629.6290.93930.630.630631.631.632.633.633.634.634.6350.94940.635.636.636.637.637.638.638.639.6

29、39.6400.95950.640.641.641.642.642.643.643.644.644.6450.96960.645.646.646.647.647.648.648.649.649.6500.97970.650.651.651.652.652.653.653.654.654.6550.98980.655.656.656.657.657.658.658.658.658.6590.99990.660.660.661.661.662.663.663.663.664.6641.001000.665附錄1B樣品厚度修正系數(shù)G （意）樣品厚度較厚：WS =0.013.49見表W:樣品厚度m）:

30、 S:探針間距（mm）W/S0.000.010.020.030.040.050.060.070.080.090.000.00000.00720.01440.02160.02890.03610.04330.05050.05770.06490.100.07210.07940.08660.09380.10100.10820.11540.12260.12980.13710.200.14430.15150.15870.16590.17310.18030.18750.19480.20200.20920.300.21640.22360.23080.23800.24520.25240.25960.26680.

31、27400.28120.400.28840.29560.30270.30990.31710.32420.33130.33850.34560.35260.500.35970.36680.37380.38080.38780.39480.40180.40870.41560.42240.600.42930.43610.44290.44960.45630.46300.46960.47620.48270.48920.700.49570.50210.50850.51480.52100.52730.53340.53960.54560.55160.800.55760.56350.56940.57510.5809

32、0.58660.59220.59780.60330.60870.900.61410.61940.62470.62990.63510.64020.64520.65010.65510.65991.000.66470.66940.67410.67870.68330.68770.69220.69650.70090.70511.100.70930.71340.71750.72150.72550.72940.73330.73710.74080.74451.200.74820.75180.75530.75890.76220.76660.76890.71220.77540.77861.300.78170.78

33、480.78790.79080.79380.79670.79960.80240.80520.80791.400.81060.81320.81580.81840.82090.82340.82580.82820.83060.83291.500.83520.83750.83970.84190.84410.84620.84830.85030.85240.85441.600.85630.83820.86010.86200.86390.86570.86750.86920.87090.87261.700.87430.87600.87760.87920.88080.88230.88380.88530.8868

34、0.88831.800.88970.89110.89250.89390.89520.89650.89780.89910.90040.90161.90 0.9029 0.9041 0.9053 0.9064 0.9076 0.9087 0.9099 0.9110 0.9121 0.9131W/S0.000.010.020.030.040.050.060.070.080.092.000.91420.91520.91620.91720.91820.91920.92020.92110.92210.92302.100.92390.92480.92570.92660.92740.92830.92910.9

35、2990.93070.93152.200.93230.93310.93380.93460.93530.93610.93680.93750.93820.93892.300.93960.94020.94090.94150.94220.94280.94350.94410.94470.94532.400.94590.94020.94700.94760.94820.94870.94930.94980.95030.95092.500.95140.95190.95240.95290.95340.95380.95430.95480.95530.95572.600.95620.95660.95710.95750

36、.95790.95830.95880.95920.95960.96002.700.96040.96080.96120.96160.96190.96230.96270.96300.96340.96372.800.96410.96440.96480.96520.96550.96580.96610.96640.96670.96712.900.96740.96770.96800.96830.96860.96890.96920.96940.96970.97003.000.97030.97050.97080.97110.97130.97160.97180.97210.97240.97263.100.972

37、80.97310.97330.97360.97380.97400.97420.97450.97470.97493.200.97510.97530.97560.97580.97600.97620.97640.97660.97680.97703.300.97720.97740.97760.97780.97790.97810.97830.97850.97870.97883.400.97900.97920.97940.97950.97970.97990.98000.98020.98030.9805如需所測值更精確，請查下表附錄2樣品形狀和測量位置的修正系數(shù) D (2)(1)圓形薄片探針5 mm位置直徑

38、d (mm)距圓心位置距邊緣位置2 mm0mm1/4 d4 mm3 mm200.97880.96330.96330.95080.92630.8702230.98390.97190.96620.95380.92950.8739250.98630.97610.96770.95530.93120.8758270.98820.97940.96880.95650.93250.8773300.99040.98320.97020.95800.93420.8793320.99160.98520.97090.95880.93510.8804350.99290.98760.97180.95980.93620.88

39、17380.99400.98940.97250.96060.93710.8829400.99460.99040.97290.96100.93770.8835420.99510.99130.97330.96140.93820.8841450.99570.99240.97380.96200.94880.8849500.99650.99380.97440.96270.94970.8859550.99710.99190.97490.96330.94030.8868570.99730.99520.97510.96350.94060.8871600.99760.99570.97520.96380.9409

40、0.8875630.99780.99610.97550.96400.94120.8879650.99790.99630.97570.96410.94140.8881700.99820.99680.97600.96450.94180.8886750.99850.99720.97620.96480.94210.8891800.99860.99760.97640.96500.94240.8895900.99890.99810.97680.96540.94290.89011000.99910.99840.97700.96570.94330.8904(2)矩形薄片止方形矩形d/sa/d=1a/d=2a/d=3a/d> 41.00.22040.22051.25