PECVD操作手冊(cè)中英文版

PAGE72ofNUMPAGES127PAGEPAGE72操作手冊(cè)SINAL–系統(tǒng)氮化硅沉積系統(tǒng)（人工裝載）制造商:Roth&RauAGGewerbering3D-09337Hohenstein-Ernstthal,OTWuestenbrandGermany目錄1引言....41.1應(yīng)用和使用……41.2硬件和軟件的識(shí)別………………41.2.1硬件…41.2.2軟件…71.3主要元件的安裝介紹…………72一般的操作說明…………82.1射頻按鈕82.2按鈕82.3清單82.4檢驗(yàn)盒92.5輸入和輸出框架………92.6Tooltip93開/關(guān)控制系統(tǒng)103.1打開103.2關(guān)閉104功能描述和操作……114.1標(biāo)題124.2信息線124.3動(dòng)態(tài)菜單134.4靜態(tài)菜單134.5圖象區(qū)域145標(biāo)準(zhǔn)功能………165.1系統(tǒng)165.2工藝參數(shù)……195.3氣體系統(tǒng)235.4參數(shù)265.4.1系統(tǒng)參數(shù)265.4.2工藝參數(shù)305.4.3氣體參數(shù)335.5配方355.6趨向395.7協(xié)議425.8上升率測(cè)試…435.9外蓋控制…445.10控制445.11泵465.12人工傳輸……486維護(hù)506.1測(cè)試點(diǎn)………506.1.1主要分布516.1.2機(jī)械節(jié)點(diǎn)A2546.1.3機(jī)械節(jié)點(diǎn)A3566.1.4等離子源586.1.5傳輸系統(tǒng)596.1.6氣體系統(tǒng)616.2登錄和退出…626.3用戶管理………636.4診斷(只針對(duì)有權(quán)限人員)647信息列表658故障檢修671Introduction引言Applicationanduse應(yīng)用和使用‘SiNALsystem’isacontrolsystemforsurfacecoatingsystems.Itworksasacontinuousflowcontrollerwith5processchambers.Thefollowinglistshowsitsfunctionalityataglance:‘SiNAL系統(tǒng)’是一種表面鍍膜控制系統(tǒng)。有5個(gè)工藝腔室，連續(xù)流動(dòng)控制的工作方式。以下是它的功能列表：Fullgraphicalrepresentationofthesystemlayoutandthecurrentprocesssequenceaswellasdisplayofallaggregateconditionsandprocessstatusconditions.全部圖像表示系統(tǒng)布局、當(dāng)前工藝次序、并顯示所有總體狀況和工藝狀態(tài)。Fullgraphicaltrendfunctionsforpresentvaluesasaprocess-relatedtrend.針對(duì)工藝相關(guān)趨勢(shì)的當(dāng)前數(shù)值，系統(tǒng)具有全部的圖像趨向功能。Charge-baseddatarecording基于裝料的數(shù)據(jù)記錄。Operationinthefollowingmodes:運(yùn)行于以下模式：Processmodeforautomaticoperationwithfullrecipemanagement,onlineparametersettingsandprotocolfunction工藝模式：自動(dòng)操作，帶有全部配方管理，在線參數(shù)設(shè)定和協(xié)議功能。Servicemodeforsupportingsystemstartup,troubleshooting,systemandcontrollerconfigurationusingmachineparameters維護(hù)模式：支持系統(tǒng)啟動(dòng)，故障診斷，使用機(jī)器參數(shù)進(jìn)行系統(tǒng)和控制器布局。1.2Identificationofhard-andsoftware硬件和軟件的識(shí)別1.2.1Hardware硬件ThecontrolsoftwarefortheSiNALsystemisinstalledonanindustrialPC(IntelCeleron2.66GHz,256MBRAM,80GBSeagateHDD,3.5“FD,LGDVDCDROM,AOpengraphicscard,networkinterfacecardonboard,Windows2000English+ServicePack4).ThisPCincludesa15"TFTcolormonitoranda19"keyboardwithtouchpad.SiNAL系統(tǒng)的控制軟件安裝在PC機(jī)上（Intel賽揚(yáng)2.66GHz，256MBRAM，80GB希捷硬盤，3.5寸軟驅(qū)，LGDVDCDROM，圖形卡，網(wǎng)卡，Windows2000English+ServicePack4），15寸TFT液晶顯示器，19寸鍵盤，觸摸墊板。ThecontrolsoftwarehasaccesstothreelocalperipheralunitsofthetypeET200MbyaSI-NECL2controller,CP5613(ProfibusDP),integratedinthePC.TheyareextendedbyI/O-componentsaccordingtotheprocesschannelstoberecorded.Severaldevices(likeEu-rothermheaters,valveblocks,massflowcontrollersandservomotors)aredirectconnectedtotheProfibus.Thisallowsafastdirectaccesstoamassofparametersofeachdevice.ThePC,asmaster,isconnectedtoaTwistedPairline.控制軟件通過一個(gè)SI-NEC控制器和三個(gè)局部外圍單元（ET200M類型）連接。CP5613(ProfibusDP)集成在PC機(jī)上，根據(jù)工藝通道的記錄，擴(kuò)充I/O零件。幾個(gè)裝置（Eu-rotherm加熱器，閥組，質(zhì)量流量計(jì)，伺候電動(dòng)機(jī)）直接連接于Profibus。這允許快速直接訪問每個(gè)裝置的參數(shù)組。PC機(jī)作為主機(jī)，連接于一個(gè)雙絞線。TheplasmasourcesaredriventhroughaCANbusplug-incard(PCI331)inthePC.等離子源通過一個(gè)CAN總線插入式卡（PCI331）驅(qū)動(dòng)。DistributionofprofibusaddressesProfibus地址的分布模塊/節(jié)點(diǎn)Profibus地址PC1電源分配節(jié)點(diǎn)(ET200M)3機(jī)器節(jié)點(diǎn)A2(ET200M)4機(jī)器節(jié)點(diǎn)A3(ET200M)5Eurotherm2408頻率轉(zhuǎn)換器(工藝腔室)12Eurotherm2400加熱器(裝載lock)14Eurotherm2400加熱器(加熱腔室)15Eurotherm2400加熱器(工藝腔室)16閥組1+2(FestoCPVDIO1)18+19MFC1-3(MKS1179As)21-23Lenze馬達(dá)1(裝載腔室r)41Lenze馬達(dá)2(加熱腔室)42Lenze馬達(dá)3(工藝腔室)43Lenze馬達(dá)4(工藝腔室r)44Lenze馬達(dá)5(冷卻腔室)45Lenze馬達(dá)6(冷卻腔室)46Lenze馬達(dá)7(卸載腔室)47Lenze馬達(dá)11(卸載臺(tái))51Lenze馬達(dá)24(裝載臺(tái))64預(yù)處理源(RF-發(fā)生器)66DistributionofCAN-Bus-NodeID’sCAN-Bus-NodeID’s的分布模塊/節(jié)點(diǎn)信息ID信息返回ID微波11191微波21292微波31393微波41494微波51595微波61696微波71797微波81898DecentralizedperipheralET200M分散的外圍設(shè)備ET200MPeripheralnode1(PowerdistributionNode)外圍節(jié)點(diǎn)1(電源分配節(jié)點(diǎn))Designation名稱單元個(gè)數(shù)分散的外圍系統(tǒng)ET200M(IM153)1S7-300數(shù)字輸入SM321,potentialsseparated,16DI3S7-300數(shù)字輸出SM322,16DO2S7-300模擬輸入SM331,potentialsseparated,8AI2S7-300信號(hào)模塊的前端插頭7Peripheralnode2(MachineNodeA2)外圍節(jié)點(diǎn)2(機(jī)器節(jié)點(diǎn)A2)Designation名稱Numberofunits分散的外圍系統(tǒng)ET200M(IM153)1S7-300數(shù)字輸入SM321,potentialsseparated,16DI5S7-300數(shù)字輸出SM322,16DO2S7-300信號(hào)模塊的前端插頭7Peripheralnode2(MachineNodeA3)外圍節(jié)點(diǎn)2(機(jī)器節(jié)點(diǎn)A3)Designation名稱Numberofunits分散的外圍系統(tǒng)ET200M(IM153)1S7-300數(shù)字輸入SM321,potentialsseparated,16DI3S7-300數(shù)字輸出SM322,16DO1S7-300模擬輸入SM331,potentialsseparated,8AI1S7-300信號(hào)模塊的前端插頭51.2.2Software軟件Windows2000EnglishwithServicePack4isusedasoperatingsystemforcontrollingandoperatingPC.采用Windows2000EnglishwithServicePack4操作系統(tǒng)。VisualsystemwithVAC_NT,Version3.0帶VAC_NT的可視化系統(tǒng),3.0版本Graphicvisualizationofalldata,setpoints,processstatesanduserinputs所有數(shù)據(jù)，設(shè)定點(diǎn)，過程狀態(tài)和用戶輸入的圖像可視化Menu-controlledprocessoperatingwithkeyboardandtouchpad.帶鍵盤和觸摸板的菜單控制過程操作Manualoperationforselectedfunctions.已選功能的人工操作Automaticoperationforprocessesusingparameters使用參數(shù)過程的自動(dòng)操作Database-orientedcontrolandmanagementofprocedures數(shù)據(jù)庫導(dǎo)向控制和管理程序Event-controlledmessagelogging事件控制信息的錄入Protocolrecordingduringtheprocessrun工藝運(yùn)行過程的協(xié)議記錄Diagnosisfunction(I/Olist)診斷功能(I/O清單)1.3Installationinstructionforthemaincomponents主要元件的安裝指示FortheinstallationoftheSIMATICperipheralcomponentsseethesectionintheSystemmanual“LocalperipheralequipmentET200M”(OrderNo.:6ES7153-1AA01-8AA0).SIMATIC外圍元件的安裝參見系統(tǒng)手冊(cè)“LocalperipheralequipmentET200M”(OrderNo.:6ES7153-1AA01-8AA0).ForSINEC-L2connectioncomplywiththeTechnicalDescriptionandtheInstallationGuidelinesintheManual“CP5613”.SINEC-L2的連接遵守技術(shù)描述和和安裝向?qū)?，在手?cè)“CP5613”。2Generaloperatinginstructions一般的操作說明Thesystemcanbeoperatedwithkeyboardandmouse(touchpad)inthesamemannerasWINDOWS?.Theusersurfaceusesinputelements(numericalandtextinputframes,tables,…)accordingtotheWINDOWS?-standard.ForfurtherinformationseetheWINDOWS?Manual.系統(tǒng)可以通過鍵盤和鼠標(biāo)（觸摸板）操作，和Windows操作方式一致。根據(jù)WINDOWS?標(biāo)準(zhǔn)，用戶界面采用輸入元件(數(shù)字和文本輸入框架，表格，…)。更多的信息參見WINDOWS?手冊(cè)。2.1Radiobuttons單選按鈕Radiobuttonsalwaysappearingroups.Theyarelikeamultiple-choice-test.Atleastoneofthebuttonsisalwaysactivatedatanytime.Thatmeansaradiobuttoncannotbedisabled,unlessatleastonedifferentradiobuttonhasbeenactivatedtodisablethefirst.單選按鈕總是出現(xiàn)在群groups里面，就像多項(xiàng)選擇測(cè)試一樣。至少有一個(gè)按鈕在任何時(shí)候總是激活的。這意味著一個(gè)單選按鈕不可能是無效的，除非至少有一個(gè)不同的單選按鈕已經(jīng)被激活使前一個(gè)按鈕失效。Clickontheradiobuttonwiththeleftmousekeytoenabletheradiobutton.Or鼠標(biāo)左鍵點(diǎn)擊單選按鈕使之啟用?；蛘逷ress[TAB]repeatedlyuntiltheradiobuttonishighlighted.Afterthispress[Leftarrow]or[Rightarrow]toenabletheradiobutton.重復(fù)按下[TAB]直到單選按鈕為高亮顯示。之后按下[左箭頭]或者[右箭頭]來啟用單選按鈕。2.2Buttons按鈕Buttonsareoperationelements,whichfunctionlikeapushbutton.Thepushbuttonscanbeactuatedintwoways:按鈕是操作基本元件，它的功能就象真實(shí)的按鈕，推進(jìn)按鈕可以通過兩種方式驅(qū)動(dòng)：Clickingonitwiththeleftmousebutton.鼠標(biāo)左鍵點(diǎn)擊，或者Press[Tab]repeatedlyuntilthebuttonishighlightedandthenpress[Space]toactuatethefunction.重復(fù)按下[TAB]直到按鈕為高亮顯示，然后按下[Space]來啟用該功能。2.3Lists列表Theobject“l(fā)ist”isintendedtodisplaylargedataamounts.Itisusedinmanymenus(e.g.controlmenufortechnologyselection).Theoptionsavailableinthelistaredisplayedbeloweachother.對(duì)象“l(fā)ist”用來顯示大量的數(shù)據(jù)。在許多菜單中使用(如工藝選擇的控制菜單)。列表里面可用的選項(xiàng)逐行顯示。Clickonthelistandthelistisopened.Thecurrentpositioninthelistishighlighted.Moveupordownwiththemousecursorwithinthelist.Clickselectiontoconfirmandthelistisclosed.點(diǎn)擊打開list。List里面當(dāng)前的位置是高亮度顯示。鼠標(biāo)向上或向下移動(dòng)來選擇。點(diǎn)擊鼠標(biāo)確認(rèn)選擇對(duì)象，list關(guān)閉?；蛘逷ress[Tab]repeatedlyuntillisthighlighted.Afterthispress[Alt]+[Uparrow]or[Alt]+[Downarrow]toopenthelist.Usethearrowbuttonstochangetheselection.Press[Enter]toconfirmandthelistisclosed.重復(fù)按下[TAB]直到list為高亮顯示。然后按下[Alt]+[Uparrow]or[Alt]+[Downarrow]來打開list。使用指針按鈕來改變選擇。按下[Enter]確認(rèn)，list關(guān)閉。2.4Checkboxes檢驗(yàn)欄AcheckboxislikeanON/OFFswitch.Aselectedcheckboxisenabled,adeselectedcheckboxisdisabled。檢驗(yàn)欄類似ON/OFF開關(guān)。被選定的檢驗(yàn)欄是激活的，被取消選定的檢驗(yàn)欄失效。Simplyclickonthecheckboxwiththeleftmousekeytoenable/disablethecheckbox.使用鼠標(biāo)左鍵點(diǎn)擊來啟用/關(guān)閉檢驗(yàn)欄?；蛘逷ress[TAB]repeatedlyuntilthecheckboxishighlighted.Afterthispress[Space]toen-able/disablethecheckbox.重復(fù)按下[TAB]鍵直到檢驗(yàn)欄高亮度顯示，然后按下[space]鍵啟用/關(guān)閉檢驗(yàn)欄。2.5Inputandoutputframes輸入和輸出框Aframeisarectangularwindowwhichservesforinputand/oroutputoftextandnumbers(e.g.forsetpointsinputinmanualmodeortoinputparametersfortechnologies).Inputframeshaveawhitebackgroundandoutputframesareindicatedbyacoloredbackground.Ithasavarietyoffunctions:該框?yàn)殚L方形窗口，作為文本和數(shù)字（如手動(dòng)模式的輸入設(shè)置或工藝參數(shù)輸入）輸入和/或輸出。輸入框是白色的背景，輸出框由有色的背景顯示。它們有許多不同的功能。Marktext:文本標(biāo)記：Hold[Shift]andmovethecursoracrossthetext.Thetextacrosswhichthecursorhasbeenmovedishighlighted.按住[Shift]鍵同時(shí)在文本上移動(dòng)鼠標(biāo)，被移動(dòng)過的文本高亮度顯示?；蛘逪oldtheleftmousekeyandmovethemouseacrossthetext.按住鼠標(biāo)左鍵同時(shí)在文本上移動(dòng)鼠標(biāo)?；蛘逿ohighlightthecompletecontentofaframepositionmovethemousecursorovertheframeanddoubleclickwiththeleftmousekey.為了高亮度顯示框架位置里面的所有內(nèi)容，在框架上面移動(dòng)鼠標(biāo)，雙擊左鍵。Deletetext:刪除文本Clickontheframe,press[Del]todeletethetexttotherightorpress[←]todeletethetexttotheleft.點(diǎn)擊框架，按下[Del]鍵刪除右邊的文本，或者按下[←]鍵刪除左邊的文本?；蛘逜fterthetexthasbeenhighlighted,inputthenewtext(thetextisoverwritten)orpress[Del]toremovethetext.Afterinputpress[enter]toconfirm.在文本高亮度顯示之后，輸入新的文本（先前的文本被覆蓋）或責(zé)按下[Del]鍵刪除文本，輸入結(jié)束后按[enter]鍵確認(rèn)。Note注釋:Entriesintheframesbecomevalidif:有效登錄進(jìn)入框架的條件：:－theentryhasbeencompletedwith登錄完成并帶有記號(hào)。－thecursorhasbeenclickedintoanotherobject(anotherframeorsymbol).指針點(diǎn)擊在另外的對(duì)象（另一個(gè)框架或符號(hào)）。－theobjectisnolongerhighlighted.該對(duì)象不再高亮度顯示。2.6Tooltip工具提示W(wǎng)henthemousecursormovesacrossanobjectandremainstherelongerthan2seconds,atooltipin-cludingashortmessageisdisplayedifnecessary.當(dāng)鼠標(biāo)在一個(gè)對(duì)象上面移動(dòng)，并停留時(shí)間超過2秒，一個(gè)提示工具包括短信息提示顯示出來（如果有必要）。3SwitchingON/OFFthecontrolsystem控制系統(tǒng)的切換開關(guān)ON/OFF3.1Switchingon打開Simultaneouslywithswitchingon,theoperatingandcontrolcomputerisstarted.ThePCisswitchedonbypressingthepowerbuttonbehindthediskprotection.打開開關(guān)，操作和控制計(jì)算機(jī)同時(shí)啟動(dòng)。按下磁盤保護(hù)裝置后面的電源按鈕，PC機(jī)打開。TheWindows2000?login-windowappearsaftertheoperatingcomputerhasstartedup.Entertheusername“Operator”(withoutpassword)andpress[Enter].Nowthecontrolsoftwarecanbestart(bydouble-clickingthesymbolSystemonthedesktop).Windows2000?的登錄－操作計(jì)算機(jī)啟動(dòng)后，出現(xiàn)window界面。輸入用戶名“Operator”(沒有密碼)，按下[Enter]鍵。這時(shí)可以啟動(dòng)控制軟件(通過雙擊桌面上的System符號(hào))。Assoonastheloadingprocedurehasbeencompleted,thediagramofthesystemappearsandthemessageSystemwasstartedisshowninthemessagelineattheloweredgeofthescreen.Intheforegroundthelogin-windowappearstoentertheusernameandthepassword.一旦完成加載程序，系統(tǒng)的圖表顯示出來并且屏幕下邊的信息欄顯示“Systemwasstarted”。屏幕前臺(tái)出現(xiàn)登錄窗口要求輸入用戶名和密碼。3.2Switchingoff關(guān)閉Theswitchoffbuttonintheservicemenuswitchesofftheapplicationsoftware.Afterpressingthisbuttonthefollowingwindowappears.service菜單里面的switchoff按鈕用來關(guān)閉應(yīng)用軟件。按下該按鈕后，出現(xiàn)下面窗口：.圖1:提示程序關(guān)閉Attention:ByShutdownyouswitchofftherunningprocessesandthepumps!注意：關(guān)閉程序意味著關(guān)閉了正在運(yùn)行的工藝和泵。ThecomputercannowbeshutdownaccordingtotheWindows?standard(Start→Shutdown→Shutdown).現(xiàn)在電腦可以根據(jù)Windows?標(biāo)準(zhǔn)正常關(guān)閉。(啟動(dòng)→關(guān)閉→關(guān)閉).Whenthisprocedurehasbeencompletedamessageappearsthatthecomputercannowbeswitchedofforrestarted.當(dāng)程序完成后，信息提示電腦可以關(guān)閉或重啟。Withthesystemmainswitchyoucanshutdownelectricalequipmentinavoltage-freestate.Seegeneralusermanual.通過系統(tǒng)的主開關(guān)你可以關(guān)閉電器設(shè)備到無電壓狀態(tài)，參見用戶手冊(cè)概要。4Functiondescriptionandoperating功能描述和操作Operatingthesystembykeyboardandmouse(touchpad)canbeperformedinthesamemannerasWINDOWS?.Theusersurfaceusesinputelements(inputframesfornumeralsandtext,tables,…)incompliancewiththeWINDOWS?standardinterface.通過鍵盤和鼠標(biāo)（觸摸板）操作該系統(tǒng)，類似于WINDOWS?操作方式。用戶界面采用輸入單元（數(shù)字、文本、表格的輸入框架），與WINDOWS?標(biāo)準(zhǔn)界面一致。圖像區(qū)域標(biāo)題動(dòng)態(tài)菜單Figure2:屏幕結(jié)構(gòu)信息欄靜態(tài)菜單4.1Header標(biāo)題Theheaderisalwaysvisibleanddisplaysthedate,thetimeandtheactualuserofthesys-tem.Intheleftcornerthereareshownthestatesofpressuresandcoolingwater(blue→ok;yellow→ismissing;red→error).標(biāo)題總是可視的并顯示日期，時(shí)間和當(dāng)前的系統(tǒng)用戶。在左邊區(qū)域顯示壓力和冷卻水的狀態(tài)（藍(lán)色→ok；黃色→缺少、遺漏；紅色→錯(cuò)誤）。圖3:標(biāo)題Thesystemisoperatedintheservicemode,ifthissymbolisshownintheheadline.標(biāo)題欄顯示該圖標(biāo)時(shí)，表示系統(tǒng)運(yùn)行在維護(hù)模式。The‘hand’symbolrepresentedthemanualtransportfunctionisactivated.‘手’圖標(biāo)表示激發(fā)人工傳輸功能。Thecolorofthe‘rotatingflashinglight’ispointingtothestateofthesystem(red→errormessage;yellow→warning;green→serviceswitchisactive).Ifanwarning/errorisoccurred,themessagelinecontainsthemannerofthewarning/error.‘旋轉(zhuǎn)閃光燈’的顏色標(biāo)志系統(tǒng)的狀態(tài)(紅色→錯(cuò)誤信息；黃色→警告；綠色→維護(hù)開關(guān)正起作用)。如果發(fā)生警告/錯(cuò)誤，信息欄會(huì)包含警告/錯(cuò)誤的方式。4.2Messageline信息欄圖4：信息欄Themessagelineextendsacrossthecompletescreenwidthbelowtheimagearea.The“Q”attheendofthelinegivesatooltip,thatthereisatleastonemessagetobeacknowledged.Thisisnotnecessarilytheshownmessage.Amessagecanbeacknowledgedusingthefunc-tionkeysF8(individualacknowledgement)orF9(groupacknowledgement).TodisplayallmessagespressF7ordouble-clickonthemessagelinewiththeleftmousebutton.Toclosethemessagelisteither信息欄在圖像區(qū)域的下面，延伸到整個(gè)屏幕寬度。信息欄末端的“Q”是提示工具，至少可以顯示一個(gè)提示信息。顯示的信息并不都是必須的?？梢酝ㄟ^功能鍵F8（單獨(dú)確認(rèn)）或F9（群確認(rèn)）來確認(rèn)顯示任一信息。要顯示所有信息，按F7鍵或用鼠標(biāo)左鍵雙擊信息欄。要關(guān)閉信息列表可以通過以下任一種方式：－pressF7again,再次按下F7鍵，－press[Alt]+[F4],同時(shí)按下[Alt]+[F4]，－clickwiththemouseonthesymbolintherightuppercorner,鼠標(biāo)點(diǎn)擊右上方的符號(hào)，－clickontheClosebuttonor點(diǎn)擊Close按鈕或者－double-clickonthemessagelist.雙擊信息列表.4.3Dynamicmenu動(dòng)態(tài)菜單Thisscreenareaisusedtodisplaythemenusandsubmenusassociatedwiththeviews.Thestructureofthedynamicmenudependsonthechosendisplayorfunction.Intheillustrationontherightthemenusofstandardfunctionswillbeinserted,aswellasfurthersubmenusinthescreenarea.該屏幕區(qū)域顯示動(dòng)態(tài)菜單和與示意圖相關(guān)的子菜單。動(dòng)態(tài)菜單的結(jié)構(gòu)依賴于所選擇的顯示或功能。右圖將插入標(biāo)準(zhǔn)功能的菜單，以及屏幕區(qū)域的下一層子菜單。圖5:動(dòng)態(tài)菜單4.4Staticmenu靜態(tài)菜單Thestaticmenuisshowninthebottomrightcornerofthescreenanddisplaysthesameoptionsalltimes.Theimageareacanbeswitchedfromsystemviewtoserviceview.Thismenuallowsaccesstothefollowingfunctionsatanytimedependingonthecurrentmodeanduserauthorization.靜態(tài)菜單在屏幕的右下角，任何時(shí)候顯示相同的選項(xiàng)。圖像區(qū)域可以從系統(tǒng)視圖切換到維護(hù)視圖。該菜單允許在任何時(shí)候訪問以下功能，這取決于當(dāng)前模式和用戶的權(quán)限。System系統(tǒng)Showstheoverallviewofthesystemaswellasgeneralchamberfunctions(e.g.transport,trending,covercontrol,…).顯示系統(tǒng)的全部視圖和總的腔室功能（如傳輸，趨向，外蓋控制等等）。Processchamber工藝腔室Showsdetailedgraphicsofthechambersandenablesprocess-specificfunctions(recipe,control,...).顯示該腔室的詳細(xì)圖表，啟用具體的工藝功能（配方，控制等等）圖6：靜態(tài)菜單Gassystem工藝氣體系統(tǒng)Showsadetailedgraphicofthegassupplyandenablespurgingofthegaschambers.顯示工藝氣體供應(yīng)的詳細(xì)圖表，啟用氣體腔室的清洗功能。Service維護(hù)Theservicemenucontainsthefollowingfunctions:Systemdiagnostics,logon,logoff,administrationofaccessrights,turningoffthesystem.維護(hù)菜單包含以下功能：系統(tǒng)診斷，登錄，退出，訪問權(quán)限的管理，關(guān)閉系統(tǒng)。Stop停止TheSTOPfunctionrepresentsanemergency-STOPfunctionforalltechnologicalprocessesandpumps.STOP功能代表所有工藝過程和泵的急停功能。4.5Imagearea圖像區(qū)域Theimageareaisusedtodisplaythevariousoverviewimagesofthesystemaswellastheserviceimages,messagelist,trenddisplay,administration,andalltheinputscreensformachineconfigurationandindividualrecipesforthechambertechnologies.Thefollowingsectionscontainmoredetailedinformationaboutindividualimagesandinputscreens.圖像區(qū)域用來顯示系統(tǒng)不同的全局圖表和維護(hù)圖表，信息列表，趨向顯示，管理。以及所有的輸入屏幕：設(shè)備布局輸入屏幕和腔室工藝單獨(dú)配方的輸入屏幕。以下截面包括關(guān)于單獨(dú)圖像和輸入屏幕的詳細(xì)信息。圖7:圖像區(qū)域Displayelements顯示元素Thestatusofthesystemsisdisplayedusingvariouscolors.Eitherthedisplayedvaluehasacoloredbackgroundorthesystemitself(e.g.symbolforpumps,valves)isshowninvariouscolors:系統(tǒng)的狀態(tài)通過不同顏色來顯示。顯示數(shù)值帶有顏色的背景，或者系統(tǒng)本身（如泵符號(hào)、閥門）以不同顏色顯示出來。Valvesandpumps:閥門和泵：Gray→closed/off/inactive(e.g.valveclosed)灰色→關(guān)閉/斷開/不起作用（如閥門關(guān)閉）Green→open/on/active(e.g.valveopen)綠色→打開/啟用/起作用（如閥門打開）Yellow→transitionbetweenopenandclosed,switchedonandoff黃色→在打開和關(guān)閉之間過渡Red→error(e.g.pumpcannotbeswitchedon)紅色→出錯(cuò)（如泵不能打開）Airandwater:壓縮空氣和冷卻水：White→inactive(e.g.coolingwaterisswitchedoff)白色→不起作用（如冷卻水關(guān)閉）Lightblue→active(e.g.compressedairisok)淺藍(lán)色→起作用（如壓縮空氣正常）Yellow→intervalbetweenswitchonandoff黃色→打開和關(guān)閉之間的間隔Red→error(e.g.N2pressureisnotavailable)紅色→出錯(cuò)（如N2壓力無效的）Button:按鈕：Darkgray→functionisenabled深灰色→功能是激活的Lightgray→functionisdisabled淺灰色→功能是無效的LED’s:LED的顏色：Darkgreen→inactive(.functionisinactive)深綠色→不起作用的（功能不起作用）Lightgreen→active(functionisactive)淺綠色→起作用的（功能起作用）Darkred→noerror深紅色→沒有出錯(cuò)Lightred→errorattherelevantunit淺紅色→相關(guān)單元出錯(cuò)Yellow→intervalbetweentheswitch黃色→開關(guān)切換之間的間隔Framesfornumbers:數(shù)值框架White→inputsetvalues白色→輸入設(shè)置值Lightgreen→displayactualvalues淺綠色→顯示實(shí)際數(shù)值Darkgreen→displaysetvalues深綠色→顯示設(shè)置值5Standardfunctions標(biāo)準(zhǔn)功能5.1System系統(tǒng)Thesystem-overviewisshownwhenstartingthesoftware.Thisoverviewcanalsobereachedbypressingthesystembuttoninthestaticmenu.當(dāng)啟動(dòng)軟件時(shí)，顯示系統(tǒng)的全觀圖。全觀圖也可以通過按下靜態(tài)菜單里面的system鍵獲得。圖8：系統(tǒng)可視化Thesystemoverviewoffersanoperatinghourscounterofsystemaswellaseachpump.系統(tǒng)全觀圖提供了系統(tǒng)和每個(gè)泵的運(yùn)行小時(shí)計(jì)數(shù)器。Operationtimeof-運(yùn)行時(shí)間：apump:clickonpumpsymbolwithrightmousebutton－泵：鼠標(biāo)右鍵點(diǎn)擊泵的符號(hào)-system:clickonbackgroundwithrightmousebutton－系統(tǒng)：鼠標(biāo)右鍵點(diǎn)擊畫面背景ThecountercanbedeletedbythepressingResetintheoperationtimewindow(e.g.changeapump).計(jì)數(shù)器可以通過點(diǎn)擊操作時(shí)間窗口（如更換泵）的“Reset”鍵來清除。Dynamicmenu動(dòng)態(tài)菜單Parameters參數(shù)Displayforchangingthegeneralmachineparameters.顯示更改總體機(jī)械參數(shù)。Trending趨向Onlinetrendforselectedprocessparameters.選中工藝參數(shù)的在線趨向Datalogging數(shù)據(jù)錄入Createanddeleteaprotocol創(chuàng)造和刪除某個(gè)協(xié)議Rateofrisetest上升率測(cè)試Performaleaktestandtrenddisplay.執(zhí)行泄漏測(cè)試和趨向顯示Covercontrol外蓋控制Menuforopeningorclosingthechambers打開或關(guān)閉腔室的菜單Control控制Menuforstartingarecipeoratransport.啟動(dòng)一個(gè)配方或傳輸?shù)牟藛蜳umps泵Thepumpsofallchamberscanbeswitchedonoroff.所有腔室的泵組可以被打開或關(guān)閉。Manualtransport手動(dòng)傳輸Formanualopeningandclosingofthegatesbetweenthechambers.Thecarrierscanbetransportedstepbystep,too.用于手動(dòng)打開或關(guān)閉腔室之間的閘門。載板也可以一步步的傳輸。Processchamberrecipe工藝腔室配方Name:名稱：Displaystheactualrunningrecipe.顯示實(shí)際運(yùn)行的配方。Status:狀態(tài)：Messagesaboutthestatusoftherunningrecipe.與運(yùn)行配方狀態(tài)相關(guān)的信息。Thebargraphdisplaysthestateoftheheatingtimeinpercent.條形圖顯示加熱時(shí)間百分比狀態(tài)。Statusofloadchamber,processchamberandunloadchamber裝載腔室、工藝腔室和卸載腔室的狀態(tài)Therearethreedifferentstatusmessagesforachamber:pumps,transportandrateofrisetest.Clickwiththerightmousebuttononthedisplaypanelandchooseoneofthethreeoptions.對(duì)于一個(gè)腔室，有三個(gè)不同的狀態(tài)信息：泵組、傳輸和上升率測(cè)試。鼠標(biāo)右鍵點(diǎn)擊顯示面板并選擇上述三個(gè)選項(xiàng)之一。Forexample:displaypanelforthepumpsoftheprocesschamber例如：工藝腔室泵的顯示面板Temperature[°C]溫度[°C]Displaystheactualtemperatureofthethreeheaters.Besidethetemperaturedisplaythebargraphshowsthepercentcontrolvalueofheating.顯示三個(gè)加熱器的實(shí)際溫度值。在溫度顯示旁邊的條形圖表顯示加熱控制值的百分率。TPRvacuumgaugeofloadchamberandunloadchamber[mbar]裝載和卸載腔室的TPR真空計(jì)[mbar]RespectivelyoneTPRgaugedisplaysthepressureintheloadchamberandintheunloadchamber.(HV→highvacuum,ATM→atmosphere).一個(gè)TPR真空計(jì)分別顯示裝載腔室和卸載腔室的壓強(qiáng)。（HV→高真空，ATM→常壓）。PKRvacuumgaugeofprocesschamber[mbar]工藝腔室的PKR真空計(jì)[mbar]ThePKRgaugedisplaysthepressureintheprocesschamber.ThedisplayofthePKRgaugedependsonthegastypeandispossiblyinfluencedbytheplasma.(HV→highvacuum,ATM→atmosphere).Whengasletintothechamberthroughthechannels1–3,thePKRoftheprocesschamberisswitchedoff.PKR真空計(jì)顯示工藝腔室的壓強(qiáng)。PKR真空計(jì)的顯示取決于工藝氣體類型，可能受到等離子體的影響（HV→高真空，ATM→常壓）。當(dāng)工藝氣體通過氣體通道1－3進(jìn)入腔室時(shí)，PKR真空計(jì)關(guān)閉。Baratrongauge[mbar]Baratron真空計(jì)[mbar]Displaystheprocesschamberpressureintherangefrom10mbardownto1*10-4mbar.Thisgaugehasahigheraccuracyandisgasindependent.Ifthepressuregetsoutofrange,theBaratronpressuredisplaysnothing.顯示工藝腔室壓強(qiáng)在10mbar到1*10-4mbar范圍內(nèi)的壓強(qiáng)。該真空計(jì)有更高的精度并與工藝氣體無關(guān)。如果壓強(qiáng)超出上述范圍，Baratron壓強(qiáng)沒有任何顯示。Stop/continue(belowtheload/unloadtable)停止/繼續(xù)（在裝載/卸載臺(tái)的下面）TheStopbuttonisshownassoonasacarrierwithintheloadchamberdrivesintotheprocesschamberandgate2isclosed.Bypressingthebuttonthetransportofcarriersintotheloadchamberisstopped.Thecarriersinsidethechambersaredrivenoutofthesystem.一旦裝載腔室里面的載板驅(qū)進(jìn)工藝腔室以及閘門2關(guān)閉，菜單里面顯示“Stop”按鈕。按下該按鈕，載體進(jìn)入裝載室的傳輸停止。在腔室里面的載體傳輸出系統(tǒng)。TheContinuebuttonisshownassoonasthetransportwasstoppedbypressingtheStopbutton.Bypressingthebuttontheuncompletedtransportiscontinuedandanewcarrierdrivesintotheloadchamber.Whenthesystemmessagesatransportfailureanditwasacknowledged,apromptisdisplayedonthescreen:Continueorcancelthetransport?當(dāng)按下“Stop”按鈕，傳輸停止時(shí)，菜單里面顯示“Continue”按鈕。按下該按鈕，那些沒有完成的傳輸繼續(xù)，新的載板傳輸進(jìn)入裝載室。當(dāng)系統(tǒng)提示傳輸失敗的信息，并且該信息得到承認(rèn)時(shí)，屏幕顯示提示：繼續(xù)或者取消該傳輸？Speed[inch/min]傳輸速度[inch/min]Theactualvelocitiesofmotorscanbeshownandremovedwiththeaidoftheconveyersymbolasfollows:ClickwithrightmousebuttononconveyersymbolinsideofthesystemandpresstheSpeedbutton.通過傳送帶標(biāo)記，可以使馬達(dá)的實(shí)際速度顯示和隱藏，方法如下：鼠標(biāo)右鍵點(diǎn)擊系統(tǒng)里面的傳送帶標(biāo)記，再按下“Speed”按鈕。Carrier載板Countsthecarrierswhicharedriventhroughtheprocesschamber.Ifacarrierreachesthepositionsensor11(inthecoolingchamberinfrontofthegate3),onecarrierisadded.Thelowervalueisusedfore.g.countingthecarriersonadayandisdeletedbythepressingReset.計(jì)數(shù)傳輸通過工藝腔室載板的數(shù)量。如果一個(gè)載板到達(dá)傳感器11的位置（位于閘門3前面的冷卻腔室），計(jì)數(shù)器加上1。下面的數(shù)值用來計(jì)算如當(dāng)天的載板數(shù)量，可以通過按下“Reset”鍵來刪除計(jì)數(shù)器。5.2Processchamber工藝腔室Thisoverviewcanbereachedbypressingtheprocessbuttoninthestaticmenu.Theviewpresentstheprocesschamberindetail.通過按下靜態(tài)菜單中的“process”按鈕來獲得工藝腔室的全觀圖。該圖表詳盡描述工藝腔室。圖10：工藝腔室Theoverviewoffersanoperatinghourscounteroftheprocesschamberpumps,microwavesourcesandRF-generator,aswellasofgases.該全觀圖提供了工藝腔室泵組、微波源、RF發(fā)生器以及工藝氣體的運(yùn)行時(shí)間計(jì)數(shù)器。Operationtimeof顯示運(yùn)行時(shí)間的方法：-apump:clickwithrightmousebuttononpumpsymbol－泵組：鼠標(biāo)右鍵點(diǎn)擊泵圖標(biāo)-amicrowave:clickwithrightmousebuttononstatuslineofmicrowave－微波：鼠標(biāo)右鍵點(diǎn)擊靜態(tài)欄上的微波-RF-generator:clickwithrightmousebuttononRFsource－RF發(fā)生器：鼠標(biāo)右鍵點(diǎn)擊RF源-agas:clickwithrightmousebuttonondisplayofactualgasflow－工藝氣體：鼠標(biāo)右鍵點(diǎn)擊實(shí)際氣體流的顯示圖ThecountercanbedeletedbythepressingResetintheoperationtimewindow(e.g.changeapump).計(jì)數(shù)器可以通過按下運(yùn)行時(shí)間窗口（如更換一個(gè)泵）里面的Reset鍵來刪除。Dynamicmenu動(dòng)態(tài)菜單Recipe配方Thisfunctionopensadisplayforcreatingoreditingrecipes.該功能提供了創(chuàng)建或編輯配方的顯示窗口。Parameters參數(shù)Thisfunctionopensadisplayforsettingmachineparametersoftheprocesschamber.該功能提供了設(shè)置工藝腔室機(jī)械參數(shù)的顯示窗口。Pumps泵Thepumpsoftheprocesschambercanbeswitchedonoroff.工藝腔室的泵組可以被打開或關(guān)閉Control控制Menuforstartingarecipeoratransportoperation.啟動(dòng)某個(gè)配方或傳輸操作的菜單圖11：動(dòng)態(tài)菜單Note:Activationofpressurecontrol,microwavesources,RF-generator,heatersandgasesisonlypossiblebystartingarecipe.See5.5Recipe(setup)and5.10Control(start).提示：只有啟動(dòng)某個(gè)配方，才可能激活壓強(qiáng)控制、微波源、RF發(fā)生器、加熱器以及工藝氣體。參見5.5配方（設(shè)置）和5.10控制（啟動(dòng)）Recipe配方Name：名稱：Displaystheactualrunningrecipe.顯示實(shí)際運(yùn)行的配方。Status：狀態(tài)：Messagesaboutthestatusoftherunningrecipe.運(yùn)行中配方狀態(tài)的信息。PKRvacuumgaugeofprocesschamber[mbar]工藝腔室的PKR真空計(jì)[mbar]ThePKRgaugedisplaysthepressureintheprocesschamber.ThedisplayofthePKRgaugedependsonthegastypeandispossiblyinfluencedbytheplasma.(HV→highvacuum,ATM→atmosphere).Whengasletintothechamberthroughthechannels1–3,thePKRoftheprocesschamberisswitchedoff.PKR真空計(jì)顯示工藝腔室的壓強(qiáng)。PKR真空計(jì)的顯示取決于工藝氣體類型，可能受到等離子體的影響（HV→高真空，ATM→常壓）。當(dāng)工藝氣體通過氣體通道1－3進(jìn)入腔室時(shí)，PKR真空計(jì)關(guān)閉。Baratrongauge[mbar]Baratron真空計(jì)[mbar]Displaystheprocesschamberpressureintherangefrom10mbardownto1*10-4mbar.Thisgaugehasahigheraccuracyandisgasindependent.Ifthepressuregetsoutofrange,theBaratronpressuredisplaysnothing.顯示工藝腔室10mbar到1*10-4mbar范圍內(nèi)的壓強(qiáng)。該真空計(jì)有更高的精度并與工藝氣體無關(guān)。如果壓強(qiáng)超出上述范圍，Baratron沒有任何顯示。微波源1－4左邊從上到下：左微波電源的設(shè)定值、左微波電源的實(shí)際值、左微波電源的實(shí)際反射值和左右微波的狀態(tài)（主干線、微波開、聯(lián)鎖、磁控管加熱器開）；正上方：微波源的狀態(tài)；右邊從上到下：右微波電源的設(shè)定值、右微波電源的實(shí)際值、右微波電源的實(shí)際反射值和左右微波的出錯(cuò)信息（通常的、高電壓、磁控管冷卻）、錯(cuò)誤信息復(fù)位。RF源1左邊從上到下：RF發(fā)射器功率設(shè)定值、RF發(fā)生器偏置電壓設(shè)定值、自動(dòng)移動(dòng)電容器來決定匹配位置、錯(cuò)誤信息復(fù)位；正上方：RF發(fā)生器的狀態(tài)；右邊從上到下：RF發(fā)生器的實(shí)際功率、RF發(fā)生器實(shí)際反射功率、RF發(fā)生器偏置電壓實(shí)際值、RF發(fā)生器的狀態(tài)（觸點(diǎn)、遠(yuǎn)程控制、發(fā)生器開、等離子體、出錯(cuò)）。Transportation傳輸Statusline:狀態(tài)欄Displaysactualmessagesaboutthetransport.顯示傳輸?shù)膶?shí)際信息。速度[cm/min]:Displaystheactualtransportspeedofthemotors2-6intheheatingchamber,processchamberandcoolingchamber.Theprocesstransportspeedmustbeenteredintherecipe.顯示加熱腔室、工藝腔室和冷卻腔室里面馬達(dá)2－6的實(shí)際傳輸速度。必須在工藝配方里輸入工藝傳輸速度。Gassystem工藝氣體系統(tǒng)Displaystheactualvaluesofthegaschannels1-3.顯示工藝氣體通道1－3的實(shí)際流量Heater加熱器Time[min:sec]:時(shí)間[min:sec]:Displaysthesetandtheactualvalueofheatingtime.Thebargraphdisplaysthestateoftheheatingtimeinpercent.顯示加熱時(shí)間的設(shè)定值和實(shí)際值，條形圖顯示加熱時(shí)間百分率狀態(tài)。Temperature[°C]:溫度[°C]:Displaysthesetandactualtemperatureofthethreeheaters.Besidethetemperaturedisplaythebargraphshowsthepercentcontrolvalueofheating.顯示三個(gè)加熱器的設(shè)定溫度和實(shí)際溫度，溫度顯示旁邊的條形圖顯示加熱的百分率控制值。Phase[%]:相位[%]:Displaysactualphasecurrent1-3ofthethreeheaters.顯示3個(gè)加熱器實(shí)際相位電流。Pressurecontrol壓強(qiáng)控制Theprocesschamberpressurecanberegulatedbyafrequencyconverter.Thefrequencyconvertercontrolsthespeedoftherootspump.工藝腔室的壓強(qiáng)可以通過頻率轉(zhuǎn)換器來調(diào)節(jié)。頻率轉(zhuǎn)換器控制了羅茨泵的轉(zhuǎn)速。Controlmode:控制模式：Off:Thepressurecontrolisswitchedoffandtherootspumprunswith60Hz(100%).關(guān)閉Off：壓強(qiáng)控制關(guān)閉，羅茨泵以60Hz（100％）運(yùn)轉(zhuǎn)。Pos.:Therootspumpoperateswiththesetspeed.Thespeedmustbesendtothefrequencyconverteraspercentvalue(0%=10Hz,100%=60Hz).Pos.：羅茨泵以設(shè)定的速度運(yùn)行，速度設(shè)定必須以百分比形式（0%=10Hz,100%=60Hz）發(fā)送到頻率轉(zhuǎn)換器。Pres.:Thefrequencyconverterregulatesthespeedoftherootspumptoreachthesetpressure.Pres.：頻率轉(zhuǎn)換器調(diào)節(jié)羅茨泵轉(zhuǎn)速，直到壓強(qiáng)達(dá)到設(shè)定值。Pumps泵組Displaysstatusmessagesofthepumpsandthevalvesattheprocesschamber.顯示泵組和工藝腔室閥門的狀態(tài)信息。Note:IfatechnologyisrunningandtheuserhastheOnlineparameter-right,thesetvaluesoftheunits(microwavepower,transportspeed,heatingtimeandtemperature,frequencyofrootspumpandprocesspressure)canbechanged.Thereforeclickintotheframeofthese