柵極腐蝕在線測量技術項目建議書

1、alta公司柵極腐蝕在線測量系統(tǒng)技術建議書1 introduction 引文1.1 scope 范圍at the end of may 2013 head aerospace has requested alta to provide a formal quotation for an erosion measuring system (ems) to be implemented in a new vacuum chamber of the customer, the lanzhou institute of physics (lip), to be used to assess erosi

2、on of gridded ion engines.2013年5月底和德公司要求alta為可應用于510（lip）所新型真空灌的腐蝕測量系統(tǒng)（ems）給出正式報價，該系統(tǒng)用于評估柵極離子發(fā)動機（gridded ion engines）的腐蝕情況。1.2 applicable documents 適用文件the following is the complete list of documents to be considered applicable to this proposal:下表列出了可適用于該投標的所有文件：1.3 acronyms and abbreviations 首字母縮略詞

3、與縮寫詞首字母縮略詞/縮寫meaning含義atpauthorization to proceed授權進行coclose-out完結daqdata acquisition數(shù)據(jù)采集epelectric propulsion電推進emserosion measuring system腐蝕測量系統(tǒng)ffp firm fixed price固定總價fmeafailure mode and effects analysis失效模式與影響分析fsofull scale output全量程輸出giegridded ion engine柵極離子發(fā)動機hethall effect thruster霍爾效應推進器h

4、whardware硬件i/f,ifinterface接口irinfra red紅外線liplanzhou institute of physics510所maimanufacturing,assembly, integration制造，部裝，集成ndanon-disclosure agreement保密協(xié)議qmqualification model鑒定樣機rparetarding potential analyzer減速電勢分析儀swsoftware軟件tbcto be confirmed/to be clarified留待確定tbdto be determined/defined留待決定tc

5、thermocouple熱電偶vdcvolt direct current直流電壓2 introduction 簡介the present section describes the tele-microscopy and erosion facility implemented in alta iv-4 facility.本章將介紹alta iv-4設備所采用的遠程顯微鏡和腐蝕測量設備。2.1 tele-microscopy system for gridded ion engines 柵極離子發(fā)動機遠程顯微鏡系統(tǒng)alta provides an innovative diagnostics

6、 to measure the erosion of the grid holes in gridded ion engines (gie).alta為柵極離子發(fā)動機網(wǎng)格空腐蝕情況的測量形成了一種新型的診斷方法。the telemicroscopy diagnostic system consists of a special camera mounted on a movable structure placed inside the vacuum facility. the system is maintained in a parking position while the thrus

7、ter is firing (figure 1 - bottom), so that it does not interfere with the plasma plume. when the thruster stops firing, the telemicroscopy system is moved in front of the thruster to perform the erosion measurement. four led lights or a laser line beam illuminate the thruster during the image acquis

8、ition. the motion of the diagnostic system is obtained through two separate stepper motors one governing the arm rotation, the other controlling the arm translation. 遠程顯微診斷系統(tǒng)為一個專用相機固定于可移動結構上，并放置于真空設備內(nèi)部。推進器點火時，該系統(tǒng)保持在一個固定位置（圖1底部），因此不會接觸到等離子羽流。推進器關閉后，遠程顯微鏡系統(tǒng)移動到推進器前方對腐蝕情況進行測量。圖像采集時有四盞led燈或激光線束為推進器照明。診斷系

9、統(tǒng)的移動由兩個分開的步進電機控制，一個控制臂的旋轉(zhuǎn)，一個控制臂的移動。figure 1 diagnostic system for gie erosion measurement: front view (top), system placed in a parking position when the thruster is firing (bottom)圖1 用于gie腐蝕測量的診斷系統(tǒng)，正面圖（上圖），推進器點火時系統(tǒng)處于固定位置（下圖）the system consists of a supporting structure and of an inspection optical

10、head. the supporting structure includes the following main subsystems: 系統(tǒng)由一個支持結構和一個光學探頭組成。支持結構主要由以下分系統(tǒng)夠成：l translation stage移動臺l rotation stage旋轉(zhuǎn)臂l sustaining arm支撐臂l protective box保護箱the optical head consists of a long working distance objective with the following characteristics: 光學探頭具有長工作距離物鏡，其特性

11、如下: parameter參數(shù)unit單位value數(shù)值field of view視場mm5.33resolution分辨率mm0.005depth of field景深mm0.408working distance工作距離mm175the measurement system allows the inspection of the acceleration grid (measurement of the hole diameter variation across a diameter of the grid). 系統(tǒng)也可進行加速極檢測（通過一個網(wǎng)格的直徑測量孔徑的差異）。paramet

12、er參數(shù)unit單位value數(shù)值gie diameter range gie直徑范圍mm50300image resolution圖像分辨率m5field of view視場mm5.3measurement type測量種類-hole diameter孔徑grid deformation網(wǎng)格變形working distance工作距離mm175the tele-microscopy system has been designed with the aim of performing successive erosion measurements during gie tests with

13、no need of re-opening the vacuum chamber. this greatly reduces the risk of contamination and saves a considerable amount of time if multiple measurements are to be taken along an endurance test. the remarkable advantage of performing a series of successive measurements lies in the opportunity of rec

14、ording not only the total erosion after a certain number of firing hours, but also a time-history of the erosion (thus providing information about how the erosion rate varies in time).遠程顯微系統(tǒng)的設計可在gie測試時進行連續(xù)腐蝕測量，而無須再次打開真空灌，這大大減小了污染的風險，并且為耐久試驗的多次測量節(jié)省了大量的時間。連續(xù)測量的最大優(yōu)勢不僅可以記錄工作數(shù)小時后的整體腐蝕情況，也可以記錄隨時間變化的腐蝕情況（因

15、此可以了解隨時間變化的腐蝕速率）。figure 2 calibration images taken on a brand new grid圖2 全新網(wǎng)格的校準圖像2.2 infrared-camera system for het temperature measurement 用于het溫度測量的紅外照相機不要溫度測量的相機可節(jié)省多少成本？我們暫時不需這種功能。by using an infrared camera it is possible to monitor the temperature of the thruster assembly during the test. alta

16、 provides an advanced diagnostic system with the infrared camera installed right inside the vacuum chamber in order to have an optimal view of the item whose temperature has to be monitored. besides, in this way the camera can be placed closer to the thruster (w.r.t. an infrared camera placed outsid

17、e the chamber and operating through one of the available viewports), resulting in a higher spatial resolution of the acquired images. 測試過程中推進器部件的溫度可通過紅外照相機監(jiān)測。alta提供的帶有紅外照相機的診斷系統(tǒng)科直接安裝于真空管內(nèi)部，以獲得被測物體的最佳視圖。此外，相機更加靠近推進器，可獲得較高的空間分辨率（放置在真空罐外部的紅外相機只能通過一個可用視點照射）。the infrared camera has the following characte

18、ristics:紅外相機具有以下特性：parameter參數(shù)value數(shù)值measuring range測量范圍0-800error誤差2%temperature resolution溫度分辨率0.08ccd size ccd尺寸384 x 288 pxwavelength range波長范圍8-14 mas an option, the following more performing camera could be provided: * sensor : microbolometric non-cooled 384 x 288 pixels * spectral range : 814

19、 micron * measurement range(s) : 1) 0 - 200 c 2) 150 - 800 c 3) 200 - 1000 c * temperature resolution: 80 mk (range 1, 30 c, 50hz) * field of view (fov) : 15 x 12* minimal focal distance: 0.75 m * target image: about 280 x 205 mm 1 m distance * pixel measurement spot: 0.8 mm 1 m distance * different

20、 possible acquisition frequencies :selectable between 50hz, 25hz, 12.5hz,. * measure uncertainty: 2k(t 100c) or 2% of the measured value in c * repeatability: 1% of the reading * measuring distance : from 75 cm to “infinity” * working temperature : -1050 c * interface: fast ethernet (real-time 50hz

21、max) * 4 i/o digital ports: digital inputs (trigger), digital output (alarm) * power input : 1036vcc, 5va * weight : about 1.6 kg * dimensions (mm) : 85 x 175 x 107 mm * protection : ip54以下性能較高的相機作為可選項目提供： 傳感器：微測輻射熱 非冷卻382x288pixels 光譜范圍：814 微米 測量范圍：1) 0 - 200 c 2) 150 - 800 c 3) 200 - 1000 c 溫度分變率：

22、80 mk (range 1, 30 c, 50hz) 視場（fov）：15 x 12 最小焦距： 0.75m 靶像：約280x205mm1m距離 像素測量點：0.8mm1m距離 不同采集頻率：可選頻率50hz，25hz，12.5hz 測量不確定度：所測值的2k（t 100c）或2%，單位 可重復性：顯示的1% 測量距離：75mm到無限遠 工作溫度：-1050 c 接口：快速以太網(wǎng)（最大值實時50hz） 種i/o數(shù)字分類：數(shù)字輸入（觸發(fā)），數(shù)字輸出（警報） 電源輸入：1036vcc, 5va 重量：約1.6kg 外形尺寸（mm）：85 x 175 x 107 mm 保護：ip54in figu

23、re 3 a scheme of the infrared-camera system is displayed. the camera is contained in a sealed box, where atmospheric pressure is maintained (since the camera cannot operate in vacuum). 圖3為紅外相機系統(tǒng)示意圖，相機處于密封箱內(nèi)，可保持大氣壓強（相機不能再真空環(huán)境工作）。figure 3: infrared-camera diagnostic system圖3 紅外相機診斷系統(tǒng)the optical window

24、 of the protecting box is made of germanium, a material which is transparent to wavelengths in the range of interest for infrared measurements (8-14 mm). when the camera is turned off, a shutter (actuated by a stepper motor) protects the germanium window from the sputtered particles that could impin

25、ge on it. images acquired with the infrared camera are elaborated via a in-house developed software (a sample screenshot is presented in figure 4). 保護箱的光學窗口由鍺制成，可透過紅外波長測量范圍（8-14m）。相機關閉后，步進電機控制的遮光器可保護鍺窗，以防濺射顆粒的影響。紅外相機采集的圖像通過自主研制軟件分析（圖4是該軟件的一個截圖）。figure 4 software for handling the images acquired with

26、 the infrared camera圖4 紅外相機圖像處理軟件the list of components of the system is: 系統(tǒng)組件清單：1) pressure sensors 壓力傳感器2) glass lenses 玻璃鏡頭3) stepper motors 步進電機4) drivers 驅(qū)動器5) visual camera(s) 可視相機6) ir camera ir相機7) structure (adapted to the chosen vacuum facility diameter) 結構（適用所選真空設備直徑）8) sledge, guides, be

27、arings, gears etc. 拖運器，說明書，軸承，傳動裝置9) cables and connectors 電纜與連接器10) feed-throughs 饋入裝置11) electronics 電子儀器12) control computer 控制計算機13) microswitch 微型開關14) software 軟件2.3 literature overview 文獻查閱a list of papers available in literature on the problem of erosion measurement is given below.以下列出的是關于腐蝕

28、測量的參考文獻。l m.t. domonkos,a.d. gallimore, “thermographic investigation of 3.2 mm diameter orificed hallow cathodes”, aiaa-98-3793l s. mazouffre, j. perez luna, d. gawron, p. echegut, m. dudeck, “an infrared thermography study on the thermal load experienced by a high power hall effect thruster”, 29th

29、iepc, princeton, nj, paper 63 (2005). l r. e. stevens, m. t. domonkos, methodology and feasibility of in-situ erosion measurements in carbon- based ion thruster grids by laser induced fluorescence, iepc-01-311 l m. t. domonkos, r. e. stevens, assessment of spectroscopic, real-time ion thruster grid

30、erosion-rate measurements, aiaa 2000-3815, 36th aiaa/asme/sae/asee joint propulsion conference and exhibit, 2000. l e. j. beiting, “precision measurements of ion-engine grids for erosion studies” l j. e. polk, j .r. anderson, j. r. brophy,v. k. rawlin, m. j. patterson, j. sovey, “in situ, time-resol

31、ved l accelerator grid erosion measurements in the nstar 8000 hour ion engine wear test “, aiaa 97-1114 l l.s. mason, r.s. jankovsky, “1000 hours of testing on a 10 kilowatt hall effect thruster “, aiaa-2001-3773, l 37th aiaa/asme/sae/asee joint propulsion conference and exhibit, , 2001 l r.s. janko

32、vsky, “preliminary evaluation of a 10 kw hall thruster “, aiaa-99-0456 l j. tomaszewski. r. branam, w. hargus, “characterization of a hall effect thruster using thermographic imaging “ . aiaa-2007-0584 3 customer requirements 用戶需求3.1 introduction 引文the lanzhou institute of physics aims at the measur

33、ement of the grid erosion produced on 1 kw-class ion engines to be placed in a dedicated new vacuum chamber and subjected to long duration tests. accuracy, easiness of use, and reliability of the system are the key requirements that will be detailed in the next sections.510所旨在測量其專有的新型真空灌內(nèi)1kw級等離子發(fā)動機所

34、產(chǎn)生的柵極腐蝕，并進行長期測試。操作的精確、可靠、簡易和系統(tǒng)的可靠是關鍵要求，詳見一下章節(jié)。3.2 detailed customer requirements 客戶詳細要求r-01 - target thruster grid dimensions目標推進器柵極尺寸the erosion measure should be made on grids up to 300 mm in diameter. the grids will not be plane, but curved.對直徑達300mm的柵極進行腐蝕測量，柵極不非平面而是曲面。r-02 primary erosion measu

35、rement初始腐蝕測量the primary erosion measurement will be concerned with the hole erosion on the external grid (a dimension change of few percentage points should be considered as target for the minimum detectable erosion).初始腐蝕測量主要涉及的是外部柵極的孔腐蝕（最小可測腐蝕應考慮到幾個百分點的外形變化）。r-03 secondary erosion measurement 二次腐蝕測

36、量pit-groove erosion should also be measured, if possible (if compatible with resolution and illumination). 如可以也應測量坑槽腐蝕（如果符合分辨率與光照條件）r-04 additional feature附加特性if possible, the esm software should allow a posteriori reconstruction of a 3d image from two separate pictures taken with slightly different

37、 angle of the camera(s).如果可以，esm軟件通過兩張角度略有差別的圖像可后期合成3d圖像。r-05 - type of thruster推進器類型the used thruster will be a gridded ion engine. 柵極離子發(fā)動機r-06 thruster dimensions and weight推進器尺寸與重量the thruster diameter will be less or equal to 300 mm. the thruster weight will be less or equal to 10 kg.尺寸300mm重量10

38、kgr-07 environmental requirements環(huán)境要求the ems should be compatible with the ipl laboratory environmental requirements, summarized below: ems應滿足510所實驗室的環(huán)境要求：o vacuum degree: 1x10-3 pa to1x10-2 pa; o cleanliness level: laboratory; o temperature: 0-40 c; o humidity: 10-60 %; o available power: 220 v ac真

39、空度：1x10-3 pa to1x10-2 pa；潔凈度：實驗室；溫度： 0-40 c；濕度：10-60 %；可用電源：220v acr-08 vacuum chamber requirements真空罐要求不是這臺設備用，請與楊俊泰在溝通一下。the ems should be used in a new vacuum chamber, 2 m in diameter for about 5 m in length, described in the scheme of figure 5 and figure 6.真空罐直徑2m，長約5m，見圖5，6。figure 1 top view: t

40、he two dn100 flanges in the red box can be used by alta圖1 頂視圖：alta可利用紅框內(nèi)的2個dn100凸緣1 液氮儲供系統(tǒng)2 副艙真空容器3 推力器熱控裝置4 安裝電源專用副艙5 主艙真空容器6 真空抽氣系統(tǒng)7 地面氙供氣單元8 離子推力器地面供電電源9 電推進控制系統(tǒng)10 真空抽氣和推力器溫控控制系統(tǒng)11 冷卻水系統(tǒng)12 氣動元件供氣系統(tǒng)figure 2 side view: the three dn100 flanges in the red box can be used by alta圖2 側視圖：alta可利用紅框內(nèi)的3個dn

41、100凸緣13 液氮進出接口14 推力器安裝架15 主艙電、氣接口16 主艙真空容器17 真空規(guī)接口18 鞍座19 離子束靶r-09 mechanical interface with the vacuum chamber與真空罐機械接口alta should clarify the required mechanical interface between the ems and the vacuum facility.alta確定ems與真空罐之間的機械接口。r-10 electrical interfaces電接口the electrical components, including

42、wires and cables, should be compatible with high voltage operation. in particular, the expected peak voltage is about 1500 v and the max peak current is 12a. the electrical components should be certified for at least 2500 v operation.電組件，含電線電纜，應能適應高壓工作。最高電壓約為1500v，最大電流12a，電組件應至少能承受2500v的電壓。r-11 feed

43、-throughs, connectors, and flanges饋入裝置，連接器和凸緣the feed-throughs for the erosion measuring system stand should be realized in compatibility with the available flanges (figure 6).腐蝕測量系統(tǒng)的饋入裝置應符合可用凸緣（圖6）。r-12 control software requirements控制軟件要求the control software provided with the ems, should be capable

44、 of: o perform atmospheric and in-vacuum preliminary setup (“calibration”) o provide measurement of erosion in terms of circle diameters, linear length, depth of grooves/pits (not in real-time). o provide alarms and possible information on recovery actions in case of ems failures. o being provided w

45、ith highly automated procedures. o being provided with extensive user manual. o being realized with easiness of use as key requirement.ems配有的控制軟件應： 可在大氣壓下和真空中進行初始安裝（“校準”）。 可測量腐蝕的圓圈直徑，線性長度，坑/槽處深度（非實時）。 ems一旦故障，發(fā)出警報，提供修復相關信息。 程序高度自動化。 全面的用戶手冊。 操作簡便。r-13 control software source code控制軟件源代碼an option in

46、the quotation should be present concerning the possibility of purchasing the control software source code, to be able to independently modify it in the future.可購買控制軟件源代碼，以便日后可自行修改。r-14 operation requirements運行要求the ems should be capable to operate and withstand the thruster derived temperature level

47、, incoming heat flux, and back-sputtered particles when placed in safe position. the ems calibration procedures should be rapid.ems不受推進器引起的溫度升高，熱流和回濺的影響，仍可正常運行。ems校準程序迅速。r-15 reliability and service life可靠性與使用壽命the ems should be capable of withstanding very long times in vacuum (several consecutive

48、months) with sporadic operation. the ems expected service life should be 8 years, if possible, including options for regular maintenance and availability of spare parts. a set of basic failure modes should be defined and agreed with lip and their corrective actions and alarms inserted, if possible,

49、in the control software.ems可經(jīng)受長期在真空中（連續(xù)數(shù)月）不定時的運行。ems的預計壽命應為8年，包括定期維護和可用的備用件。與510所協(xié)商確認一組基本的失效模式，如可能，將其正確的處理方式和警報嵌入控制軟件中。r-16 maintenance, training, and spare parts維護，培訓和備用件an extensive training in use of the esm should be given by alta personnel to lip personnel during the system commissioning. two y

50、ears of free maintenance with a total of 2 visits to china should be included in the offer. a list of components and spare parts should be provided with the system, with detailed information on the procurement. remote support for operation of the system should be included as part of the offer. an op

51、tion concerning a longer maintenance period including spare parts should be included.針對ems使用，alta應對510所人員進行培訓。報價中應含有兩年的免費維護和2次到中國的上門服務。組件與備用件清單應同系統(tǒng)一起提供，并有詳細的采購信息。報價中應含有系統(tǒng)運行的遠程支持。延長維護期，包括備用件，應作為可選項包含在報價內(nèi)。r-17 delivery time 交付時間the desired delivery time would be 6 months, if possible. alternative poss

52、ibilities should be detailed in the offer. 如有可能，交付時間為6個月。報價應對其它可能性做出詳細說明。4 technical implementation 技術實現(xiàn)in order to positively answer to all the previous requirements by lip, the following technical implementation will be used. additional interaction with the customer might be required. important el

53、ements are presented inside boxes within the text.以下的技術實現(xiàn)將對510所上述的所有要求做出正面解答。與客戶需進行額外溝通。文中方框內(nèi)的文字為重要原理。4.1 erosion measurement features 腐蝕測量特點4.1.1 linear measurement線性測量as described in section 3.1, the typical working distance of the system is supposed to be around 175 mm from the target surface. in

54、 this case, the field of view of the cameras will be around 5.3 mm with a resolution of 5 m. it is therefore expected, in case of nominal illumination, to be able to measure linear distance variations of minimum 2-3 pixels (corresponding to 10-15 m).如3.1所述，系統(tǒng)的典型工作距離設為距離目標表面175mm，因此相機的視場約5.3mm，分辨率5m請

55、落實單位？是m?分辨率是5的話，測量精度是多少？怎么驗證測量精度？，所以在標準照明條件下，可測量的最小線性距離變量為2-3pixels（對應10-15m）單位？。the system will take (automatically or manually) one or more pictures in a given set of positions. after that the software will determine the variation between two successive pictures of some defined linear pattern (i.e. a hole diamete