Ticer埋阻材料測試結(jié)果匯總ppt課件

1、Ticer埋阻資料測試結(jié)果匯總SME P&D: 劉涌，時(shí)睿智SMST R&D:羅永紅，宗澤源Update：2021-2-3;目錄 方阻率測試板第一次SES后電阻值和尺寸丈量結(jié)果 方阻率測試板棕化后電阻值丈量結(jié)果 ESD測試板SES后電阻值和尺寸丈量結(jié)果 方阻率測試板層壓后電阻值丈量結(jié)果 ESD測試板方阻率隨電阻設(shè)計(jì)變化趨勢增補(bǔ)實(shí)驗(yàn) 方阻率測試板過熱沖擊后電阻值丈量結(jié)果 ESD測試板阻焊前處置后電阻值丈量結(jié)果 ESD測試板電測試結(jié)果相對(duì)阻焊前處置后電阻值該變量 ESD初步測試結(jié)果 ESD測試板電阻制程才干和分布 ESD測試結(jié)果;方阻率測試板第一次SES后電阻值和尺寸丈量結(jié)果2021-12-18;

2、實(shí)驗(yàn)?zāi)康恼闪縏icer埋阻資料方阻率穩(wěn)定性。測試工程方阻大小為0.5、1、5cm，丈量埋阻資料在經(jīng)過SES一遍/兩遍后的阻值以及長/寬、經(jīng)過棕化后的阻值以及長/寬、經(jīng)過層壓后阻值、經(jīng)過熱沖擊后阻值。測試圖形背景方阻率測試單個(gè)Unit測試圖形5cm*5cm1cm*1cm0.5cm*0.5cm1829310411512613714方阻率測試Panel：因銅箔較小，舍棄兩邊各一列Unit，Unit編號(hào)如左圖所示當(dāng)前形狀4塊方阻率測試板，兩塊進(jìn)展了第一次SES，兩塊只進(jìn)展了一次銅箔蝕刻留用。測 試了兩塊進(jìn)展SES板的阻值和電阻尺寸。;測試設(shè)備電阻值：日置HIOKI 3541電阻計(jì)尺寸：三維丈量儀實(shí)驗(yàn)結(jié)

3、果編號(hào)電阻值（）尺寸（mm）方阻率（）panelUnit號(hào)0.5cm1cm5cm0.5cm1cm5cm0.5cm1cm5cmLWLWLWpanel1151.738 50.872 48.358 5.0693 4.9498 10.0761 9.9931 50.0622 49.9901 50.52 50.45 48.29 251.108 50.852 48.395 5.0432 4.9778 10.0506 9.9566 50.0698 49.9662 50.45 50.38 48.29 351.857 50.977 48.087 5.0512 4.9958 10.0664 10.0007 50.0

4、679 49.9672 51.29 50.64 47.99 452.703 51.682 47.960 5.0549 4.9748 10.0509 9.9802 50.0540 49.9836 51.87 51.32 47.89 552.023 51.925 48.485 5.0489 5.0119 10.0673 10.0032 50.0680 49.9782 51.64 51.59 48.40 653.163 51.646 48.250 5.0509 5.0524 10.0418 9.9777 50.0506 50.0081 53.18 51.32 48.21 752.022 51.208

5、 48.538 5.0692 4.9859 10.0634 10.0108 50.0594 49.9750 51.17 50.94 48.46 852.737 52.201 49.860 5.0594 4.9784 10.0333 9.9953 50.0656 49.9767 51.89 52.00 49.77 952.054 52.042 49.933 5.0247 4.9829 10.0418 9.9618 50.0612 49.9830 51.62 51.63 49.86 1051.702 52.831 49.517 5.0502 4.9759 10.0523 9.9793 50.065

6、7 50.0012 50.94 52.45 49.45 1152.875 52.300 49.772 5.0509 4.9674 10.0613 9.9648 50.0727 49.9849 52.00 51.80 49.68 1252.576 52.465 49.843 5.0489 4.9654 10.0689 9.9687 50.0581 50.0065 51.71 51.94 49.79 1351.854 52.052 50.076 5.0430 4.9752 10.0530 9.9781 50.0590 49.9985 51.16 51.66 50.02 1452.687 51.74

7、3 49.800 5.0509 4.9774 10.0467 9.9829 50.0636 49.9861 51.92 51.41 49.72 panel2151.318 51.492 48.452 5.0456 4.9799 10.0445 9.9748 50.0554 49.9870 50.65 51.13 48.39 252.047 57.094 48.221 5.0406 4.9802 10.0529 9.9768 50.0533 49.9811 51.42 56.66 48.15 351.045 51.482 47.965 5.0403 4.9789 10.0449 9.9773 5

8、0.0509 49.9824 50.42 51.14 47.90 452.333 51.434 48.158 5.0407 4.9782 10.0509 9.9795 50.0525 49.9915 51.68 51.07 48.10 551.325 51.705 48.430 5.0471 4.9786 10.0520 9.9762 50.0529 49.9805 50.63 51.32 48.36 652.974 51.233 48.362 5.0421 4.9766 10.0469 9.9751 50.0520 49.9930 52.29 50.87 48.30 752.744 52.0

9、97 48.624 5.0500 4.9797 10.0445 9.9764 50.0545 49.9899 52.01 51.74 48.56 851.567 50.020 48.942 5.0432 4.9772 10.0465 9.9752 50.0556 49.9863 50.89 49.67 48.87 950.430 50.629 48.835 5.0416 4.9787 10.0551 9.9770 50.0550 49.9800 49.80 50.24 48.76 1051.508 50.765 48.675 5.0413 4.9734 10.0478 9.9759 50.05

10、18 49.9786 50.81 50.40 48.60 1151.278 50.561 48.752 5.0439 4.9744 10.0485 9.9764 50.0559 49.9925 50.57 50.20 48.69 1250.871 50.837 48.980 5.0422 4.9755 10.0486 9.9763 50.0553 49.9851 50.20 50.47 48.91 1351.737 50.994 49.192 5.0434 4.9740 10.0485 9.9777 50.0562 49.9956 51.03 50.63 49.13 1450.477 50.1

11、64 49.236 5.0469 4.9772 10.0435 9.9761 50.0553 49.9861 49.78 49.83 49.17 Note: 紅字部分電阻值異常;實(shí)驗(yàn)結(jié)果0.5、1、5cm方阻的方阻率平均值分別為51.20、51.25、48.78。從圖中能看出0.5和1cm方阻率整體偏上限；5cm的方阻率偏下限，分布上呈現(xiàn)異常。;Ticer resistance material Evaluation ResultUpdate with 28 samples;7The sheet resistances after SES are shown in the table. It

12、is very close to spec from the suppler.Other test items are on going.No.SupplierSpec. /Resistor size(Length Width)Sheet resistanceAverage /MAX /MIN /RStdev3stdev/Aver(Aver-Spec)/SpecSample size1TCR50.005%5mm 5mm51.19853.17949.7803.3990.7874.61%2.40%28210mm 10mm51.24656.66249.6656.9971.2657.41%2.49%2

13、8350mm 50mm48.77650.01547.8932.1220.6644.08%-2.45%28方阻率測試板棕化后電阻值丈量結(jié)果2021-12-23;編號(hào)SES后電阻值（）棕化后電阻值（）(棕化后-SES后)/SES后panelUnit號(hào)0.5cm1cm5cm0.5cm1cm5cm0.5cm1cm5cmpanel1151.73850.87248.35852.03951.0848.7850.58%0.41%0.88%251.10850.85248.39551.49851.11648.8820.76%0.52%1.01%351.85750.97748.08752.12151.18548.6

14、720.51%0.41%1.22%452.70351.68247.9652.95651.96448.270.48%0.55%0.65%552.02351.92548.48552.34552.15548.7660.62%0.44%0.58%653.16351.64648.2553.4851.91548.5290.60%0.52%0.58%752.02251.20848.53852.4251.44448.8820.77%0.46%0.71%852.73752.20149.8653.00452.46350.2850.51%0.50%0.85%952.05452.04249.93352.32452.2

15、8950.5590.52%0.47%1.25%1051.70252.83149.51752.08152.47449.8150.73%-0.68%0.60%1152.87552.349.77253.17552.59150.3310.57%0.56%1.12%1252.57652.46549.84352.86752.80750.3120.55%0.65%0.94%1351.85452.05250.07652.31452.30950.510.89%0.49%0.87%1452.68751.74349.853.01952.10250.4780.63%0.69%1.36%panel2151.31851.

16、49248.45251.89151.92849.1471.12%0.85%1.43%252.04757.09448.22152.3958.3349.0770.66%2.16%1.78%351.04551.48247.96551.31451.72248.2830.53%0.47%0.66%452.33351.43448.15852.59651.67748.4220.50%0.47%0.55%551.32551.70548.4351.59751.97248.6680.53%0.52%0.49%652.97451.23348.36253.27351.46748.7180.56%0.46%0.74%7

17、52.74452.09748.62453.00552.3749.9150.49%0.52%2.66%851.56750.0248.94252.15750.33449.5611.14%0.63%1.26%950.4350.62948.83550.66650.85849.2390.47%0.45%0.83%1051.50850.76548.67551.83551.04149.0950.63%0.54%0.86%1151.27850.56148.75251.55851.05549.0790.55%0.98%0.67%1250.87150.83748.9851.1951.06649.2270.63%0

18、.45%0.50%1351.73750.99449.19251.99251.22949.5910.49%0.46%0.81%1450.47750.16449.23650.72350.6449.7330.49%0.95%1.01%Aver0.63%0.57%0.96%Max1.14%2.16%2.66%Min0.47%-0.68%0.49%實(shí)驗(yàn)結(jié)果Note：3號(hào)棕化線;實(shí)驗(yàn)結(jié)果棕化后電阻的平均改動(dòng)率在1%以內(nèi)，優(yōu)于Ohmega 50方阻的9.71%和10.11改動(dòng)量數(shù)據(jù)來源“存放時(shí)間對(duì)電阻的影響， micro-etching 分別為1.6m和2.0m 。SES后棕化后0.5cm1cm5cm0.5

19、cm1cm5cmPp1.050.661.261.120.591.15Ppk0.550.330.640.130.140.84電阻值改變量(棕化后-SES后)/SES后0.5cm1cm5cmAver0.63%0.57%0.96%Max1.14%2.16%2.66%Min0.47%-0.68%0.49%TOC 50/TreatmentBatch 1Batch 2AvgAfter alkaline etching51.58 51.61 50.83 50.85 Brown oxide with 1.6um micro-etching54.57 54.58 57.75 57.81 Brown oxide

20、with 2.0um micro-etching55.64 55.65 57.11 57.15 Changes in micro-etching 1.6m5.78%5.77%13.60%13.69%9.71%Changes in micro-etching 2.0m7.87%7.84%12.34%12.39%10.11%Ticer 50/ ;ESD測試板SES后電阻值和尺寸丈量結(jié)果2021-12-23;實(shí)驗(yàn)?zāi)康臏y試Ticer埋阻資料抗ESD性能測試圖形背景當(dāng)前形狀4塊ESD測試板，兩塊進(jìn)展了SES，兩塊電鍍后未DES，留用。測試了兩塊進(jìn)展SES板的阻值和電阻尺寸。部分Unit在SES前因干膜粘

21、附不牢，導(dǎo)致電阻兩端的銅面在做SES時(shí)被滲蝕，這部分電阻舍去，未進(jìn)展丈量。丈量Set內(nèi)第10行Unit內(nèi)上部電阻，如有下部電阻被丈量會(huì)特別標(biāo)示出。測試板的Set左圖圖形和其內(nèi)的Unit上圖圖形；其中Set內(nèi)有20行11列個(gè)Unit，每個(gè)Unit有上下兩個(gè)一樣的電阻設(shè)計(jì)。A1A2A3A4B1B2B3B4C1C2C3C4D1D2D3D4E1E2E3E4F1F2F3F4G1G2G3G4測試板Panel及其內(nèi)部各Set編號(hào);Panel 1 & 2 電阻長寬丈量值Panel 1Panel 2WidthLengthNote: 兩行橫坐標(biāo)數(shù)值中上一行為電阻設(shè)計(jì)長度，下一行為電阻設(shè)計(jì)寬度。;Panel 1 v

22、s. 2 電阻實(shí)踐尺寸與設(shè)計(jì)值差別Note:1. 兩行橫坐標(biāo)數(shù)值中上一行為電阻設(shè)計(jì)長度，下一行為電阻設(shè)計(jì)寬度； 2. D-value為丈量值與設(shè)計(jì)值的差值。電阻寬度由DES決議，Panel 1蝕刻速度為2.8m/min，Panel 2為2.65m/min。從左上圖可知，蝕刻后電阻的寬度與設(shè)計(jì)值之差Panel 1更小，動(dòng)搖也更小。普通的，蝕刻線速度越慢，蝕刻量越多，寬度越窄，即更接近設(shè)計(jì)值。左上圖結(jié)果與這一結(jié)論相反，需求結(jié)合其他變量再分析。電阻的長度由SES決議，Panel 1蝕刻速度為3.6m/min，Panel 2為4m/min。從左以下圖可知，蝕刻后電阻的長度與設(shè)計(jì)值之差Panel 1更小

23、，動(dòng)搖也更小。 電阻制造尺寸補(bǔ)償為寬度添加38m，長度減少50m。從左邊的兩張圖能發(fā)現(xiàn)，不同寬度和長度設(shè)計(jì)對(duì)補(bǔ)償量要求差別較大，在堅(jiān)持當(dāng)前時(shí)辰量下可以根據(jù)左圖進(jìn)展差別化補(bǔ)償。;Panel 1 vs. 2 方阻率差別Note: 兩行橫坐標(biāo)數(shù)值中上一行為電阻設(shè)計(jì)長度，下一行為電阻設(shè)計(jì)寬度。方阻率隨著設(shè)計(jì)電阻寬度的添加越接近規(guī)范值，一樣的電阻寬度設(shè)計(jì)，長度越長方阻率越接近規(guī)范值。按照電阻的面積陳列左以下圖，方阻率根本是隨面積的添加而更接近規(guī)范值。;LCSM電阻尺寸丈量A3-2A3-1Note: 兩行橫坐標(biāo)數(shù)值中上一行為電阻設(shè)計(jì)長度，下一行為電阻設(shè)計(jì)寬度。LCSM尺寸丈量寬度上比線寬丈量儀要寬，長度上

24、要短，但是計(jì)算所得的方阻值結(jié)果相差不大，整體趨勢一樣。;方阻率測試板層壓后電阻值丈量結(jié)果2021-1-7;實(shí)驗(yàn)結(jié)果層壓后電阻的改動(dòng)量相比于棕化后少于0.3% 。編號(hào)SES后電阻值（）棕化后電阻值（）層壓后電阻值（）(層壓后-SES后)/SES后(層壓后-棕化后)/棕化后panelUnit號(hào)0.5cm1cm5cm0.5cm1cm5cm0.5cm1cm5cm0.5cm1cm5cm0.5cm1cm5cmpanel1151.73850.87248.35852.03951.0848.78551.91251.23448.8590.34%0.71%1.04%-0.24%0.30%0.15%251.10850

25、.85248.39551.49851.11648.88251.39651.00348.8760.56%0.30%0.99%-0.20%-0.22%-0.01%351.85750.97748.08752.12151.18548.67251.95651.07948.6740.19%0.20%1.22%-0.32%-0.21%0.00%452.70351.68247.9652.95651.96448.2752.79951.84848.2870.18%0.32%0.68%-0.30%-0.22%0.04%552.02351.92548.48552.34552.15548.76652.25352.076

26、48.8520.44%0.29%0.76%-0.18%-0.15%0.18%653.16351.64648.2553.4851.91548.52953.33151.86348.540.32%0.42%0.60%-0.28%-0.10%0.02%752.02251.20848.53852.4251.44448.88252.37951.49749.2480.69%0.56%1.46%-0.08%0.10%0.75%852.73752.20149.8653.00452.46350.28552.90352.62250.630.31%0.81%1.54%-0.19%0.30%0.69%952.05452

27、.04249.93352.32452.28950.55952.16652.20450.6350.22%0.31%1.41%-0.30%-0.16%0.15%1051.70252.83149.51752.08152.47449.81551.95352.40549.7780.49%-0.81%0.53%-0.25%-0.13%-0.07%1152.87552.349.77253.17552.59150.33153.27352.47550.570.75%0.33%1.60%0.18%-0.22%0.47%1252.57652.46549.84352.86752.80750.31252.71252.8

28、0450.3260.26%0.65%0.97%-0.29%-0.01%0.03%1351.85452.05250.07652.31452.30950.5152.24452.24150.5260.75%0.36%0.90%-0.13%-0.13%0.03%1452.68751.74349.853.01952.10250.47852.94352.10250.8720.49%0.69%2.15%-0.14%0.00%0.78%panel2151.31851.49248.45251.89151.92849.14751.7351.89249.5070.80%0.78%2.18%-0.31%-0.07%0

29、.73%252.04757.09448.22152.3958.3349.07752.25260.14149.2910.39%5.34%2.22%-0.26%3.10%0.44%351.04551.48247.96551.31451.72248.28351.14351.62148.3120.19%0.27%0.72%-0.33%-0.20%0.06%452.33351.43448.15852.59651.67748.42252.49151.58648.3950.30%0.30%0.49%-0.20%-0.18%-0.06%551.32551.70548.4351.59751.97248.6685

30、1.45551.85248.7010.25%0.28%0.56%-0.28%-0.23%0.07%652.97451.23348.36253.27351.46748.71853.20451.34948.7780.43%0.23%0.86%-0.13%-0.23%0.12%752.74452.09748.62453.00552.3749.91552.86253.08250.3840.22%1.89%3.62%-0.27%1.36%0.94%851.56750.0248.94252.15750.33449.56152.13650.34249.91.10%0.64%1.96%-0.04%0.02%0

31、.68%950.4350.62948.83550.66650.85849.23950.48750.75249.4860.11%0.24%1.33%-0.35%-0.21%0.50%1051.50850.76548.67551.83551.04149.09551.70551.18749.2120.38%0.83%1.10%-0.25%0.29%0.24%1151.27850.56148.75251.55851.05549.07951.4250.99949.0920.28%0.87%0.70%-0.27%-0.11%0.03%1250.87150.83748.9851.1951.06649.227

32、51.06150.95449.2420.37%0.23%0.53%-0.25%-0.22%0.03%1351.73750.99449.19251.99251.22949.59151.951.19149.6890.32%0.39%1.01%-0.18%-0.07%0.20%1450.47750.16449.23650.72350.6449.73350.62950.8149.9170.30%1.29%1.38%-0.19%0.34%0.37%Aver0.41%0.67%1.23%-0.21%0.10%0.27%Max1.10%5.34%3.62%0.18%3.10%0.94%Min0.11%-0.

33、81%0.49%-0.35%-0.23%-0.07%;各道工序后電阻的該變量及每道工序中電阻的該變量棕化對(duì)電阻的影響大于層壓，SES后各工序累計(jì)的電阻改動(dòng)量能控制在1%左右。方阻越大，電阻變化越明顯。;ESD測試板方阻率隨電阻設(shè)計(jì)變化趨勢增補(bǔ)實(shí)驗(yàn)2021-1-8;實(shí)驗(yàn)背景第一批2 Panel ESD測試板的方阻率隨著電阻設(shè)計(jì)尺寸變化有著上述圖表的線性特征。為了更全面描畫方阻率的變化趨勢，添加了更大的電阻設(shè)計(jì)。該設(shè)計(jì)方案運(yùn)用在剩余的一張未進(jìn)展DES的ESD測試板上。目前試板正在制造中。關(guān)于這一景象，Ticer方面還未作出解釋。;測試圖形設(shè)計(jì)工藝電阻完成寬度(um)長度/寬度電阻長度(um)Lay

34、er X線寬(um)Du X電阻寬度(um)Du X電阻長度(um)Dux相對(duì)于Layer X電阻線左右位置Layer X電阻線與周圍銅皮間距(um)DES+SES4002800438478750居中5560021200638678115080021600838878155010002200010381078195020002400020382078395040060080010002000添加的設(shè)計(jì)安頓在Set板邊空隙處，共添加5種電阻的寬度設(shè)計(jì)。;方阻率測試板過熱沖擊后電阻值丈量結(jié)果2021-1-19;丈量結(jié)果Panel 1Resistor after IR-reflow(6 times,

35、 )Resistor change(compare to after lamination)Panel 2Resistor after solder float test(6 times, )Resistor change(compare to after lamination)0.5cm1cm5cm0.5cm1cm5cm51.70551.86649.449-0.05%-0.05%-0.12%51.73851.13348.653-0.34%-0.20%-0.42%52.23260.06849.199-0.04%-0.12%-0.19%51.21650.848.646-0.35%-0.40%-0

36、.47%51.12551.60448.248-0.04%-0.03%-0.13%51.94450.93848.515-0.02%-0.28%-0.33%52.45551.54648.328-0.07%-0.08%-0.14%52.69351.87648.245-0.20%0.05%-0.09%51.42751.80848.636-0.05%-0.08%-0.13%52.6152.18148.6540.68%0.20%-0.41%53.15651.29848.696-0.09%-0.10%-0.17%53.52452.34848.9420.36%0.94%0.83%52.83353.01750.

37、3-0.05%-0.12%-0.17%52.18851.65549.127-0.36%0.31%-0.25%52.1150.30249.842-0.05%-0.08%-0.12%53.06852.54450.630.31%-0.15%0.00%50.44550.71349.414-0.08%-0.08%-0.15%52.1251.99450.603-0.09%-0.40%-0.06%51.6851.15349.158-0.05%-0.07%-0.11%51.98452.78649.7530.06%0.73%-0.05%51.38250.94949.026-0.07%-0.10%-0.13%53

38、.29652.41950.6420.04%-0.11%0.14%51.03550.90449.155-0.05%-0.10%-0.18%52.57552.74350.243-0.26%-0.12%-0.16%51.84551.12449.582-0.11%-0.13%-0.22%52.45652.24250.9370.41%0.00%0.81%50.58650.74949.845-0.08%-0.12%-0.14%52.92151.98950.646-0.04%-0.22%-0.44%Avg.0.01%0.03%-0.06%Avg.-0.06%-0.09%-0.15%熱沖擊對(duì)電阻值得的影響很小

39、，最大也只需-0.15%，可以以為Ticer埋阻資料耐熱沖擊性能沒有問題。Test condition：IR-reflow：peak240 +/-5、5-25sec, 6cycleSolder float test：288+/-5、10sec, 6cycle;ESD測試板阻焊前處置后電阻值丈量結(jié)果2021-1-19;丈量結(jié)果Note: 儲(chǔ)存條件為PD會(huì)議室阻焊前處置線為5#長寬比為4的電阻設(shè)計(jì)在儲(chǔ)存和阻焊前處置下穩(wěn)定性要明顯好與比值為2的設(shè)計(jì)。電阻設(shè)計(jì)寬度100m時(shí)，建議運(yùn)用長寬比為4或更大的設(shè)計(jì)， 寬度100m時(shí)，長寬比對(duì)電阻穩(wěn)定性的影響不大。DesignW(m)50757510010015

40、0150200200150L(m)200150300200400300600400800300R()200100200100200100200100200100CodeConditionColumn No.234567891011Aafter SESR()200.7 121.7 213.3 120.9 209.2 114.1 207.9 109.6 204.9 114.8 Bstore 7 days after SESR()199.6 117.8 211.8 119.3 209.3 114.2 207.6 110.0 205.2 115.0 (B-A)/A%-0.53%-3.14%-0.72%

41、-1.29%0.06%0.06%-0.14%0.34%0.18%0.12%Cafter SM per-treatmentR()194.1 110.6 211.7 115.4 210.2 113.8 208.1 110.3 205.7 114.1 (C-B)/B%-2.76%-6.15%-0.04%-3.30%0.44%-0.32%0.23%0.27%0.21%-0.78%;ESD測試板電測試結(jié)果相對(duì)阻焊前處置后電阻值該變量2021-1-27;丈量結(jié)果DesignW(m)50507575100100150150200200L(m)100200150300200400300600400800阻焊前

42、處理后R（）106.32 200.30 119.68 214.40 121.17 208.33 114.54 207.62 110.00 203.79 電測試結(jié)果（）79.88 195.97 114.83 205.99 117.69 206.35 114.07 208.83 110.63 204.57 電測試結(jié)果-阻焊前處理后R-26.44 -4.34 -4.85 -8.41 -3.48 -1.98 -0.47 1.21 0.63 0.78 50/100的長寬設(shè)計(jì)收阻焊制造過程影響較大，其它設(shè)計(jì)影響在5%內(nèi)。建議ESD測試舍去50/100設(shè)計(jì)方案的測試，其它設(shè)計(jì)運(yùn)用電測試結(jié)果作為ESD測試的初

43、始電阻值。;ESD初步測試結(jié)果2021-1-29;Unit內(nèi)電阻差別R1R2set編號(hào)unit編號(hào)設(shè)計(jì)電阻寬W（m）設(shè)計(jì)電阻長L（m）實(shí)測電阻值（）實(shí)測電阻寬W（m）實(shí)測電阻長L（m）實(shí)測L/W實(shí)測方阻率（）70000192100200R1106.2115.45 197.50 1.71 62.08 R2141.1115.74 195.58 1.69 83.50 70001127100400R1241.5115.45 390.63 3.38 71.37 R2208.3120.09 390.21 3.25 64.11 單個(gè)unit內(nèi)兩個(gè)電阻相差極大部分樣品。電阻值為電測試結(jié)果，長寬丈量值為褪去阻焊

44、后LCSM丈量結(jié)果。R1R2192127;電阻經(jīng)ESD沖擊后改動(dòng)情況測試前測試后變化率SetWL設(shè)計(jì)號(hào)電壓R1R2R1R2R1R2700005010010.5KV69.9471.5969.671.19-0.49%-0.56%700005020020.5KV197.9208.5164177.3-17.13%-14.96%700005020020.5KV229191.7184.3175.1-19.52%-8.66%700007515030.5KV144.5105.5107.1991.66-25.82%-13.12%700017530040.5KV210.4219.6172.7183.9-17.92

45、%-16.26%7000110020050.5KV130.3106.5109.43105.7-16.02%-0.75%7000110020050.5KV118.5133.9103.67110.1-12.51%-17.77%700005010010.8KV102.871.6473.3771.19-28.63%-0.63%700005010010.8KV109.8113.400FailFail700005020020.8KV207.3154.40152.7Fail-1.10%700007515030.8KV110.3119.297.4493.77-11.66%-21.33%700007515030

46、.8KV112.2119.986.9195.46-22.54%-20.38%700017530040.8KV211.2202.5181.7181.5-13.97%-10.37%7000110020050.8KV98.76117.598.93100.990.17%-14.05%700005010011.0KV68.7172.7300FailFail7000110020051.0KV98.76119.998.1494.82-0.63%-20.92%7000110040061.0KV220.1225.1208.1211.8-5.45%-5.91%7000015030071.0KV108.6116.6

47、106.4100.36-2.03%-13.93%700005010011.2KV77.7471.300FailFail700005010011.2KV106.574.7400FailFail700005010011.2KV77.67107.400FailFail7000110020051.2KV140.4123.1112.799.9-19.73%-18.85%7000110040061.2KV213.1209.5188206.9-11.78%-1.24%7000015030071.2KV106100.296.0295.04-9.42%-5.15%7000015060081.2KV216220.

48、1200.2204.8-7.31%-6.95%7000110040061.5KV189.3197.4179.90-4.97%Fail7000015030071.5KV114.6112.798.0296.85-14.47%-14.06%7000015060081.5KV210.7196.2197.7177.5-6.17%-9.53%7000020040091.5KV108.2100.998.66100.8-8.82%-0.10%7000015060081.8KV213.6202191.9183.8-10.16%-9.01%7000020040091.8KV107.2117.10101.7Fail-13.15%7000020040091.8KV108.2100.988.6790.85-18.05%-9.96%7000020040092.0KV117.3101.2105.399.33-10.23%-1.85%70000200800102.0KV198.4